• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.22-26
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• 2008

The use of electrical discharge machining (EDM) for micro-machining applications requires particular attention to the machined surface roughness and discharge gap distance, as these factors affect the geometrical accuracy of micro-parts. Previous studies of conventional EDM have shown that selected types of semi-conductive and non-conductive powder suspended in the dielectric reduced the surface roughness while ensuring a limited increase in the gap distance. Based on this, an extension of the technique to micro-EDM was studied Such work is necessary since the introduction of nanopowders suspended in the dielectric is not well understood. The experimental results showed that a statistically significant reduction in the surface roughness value was achieved at particular concentrations of the powder additives, depending on the powder material and the machining input energy setting. The average reduction in surface roughness using a powder suspended dielectric was between 14-24% of the average surface roughness generated using a pure dielectric. Furthermore, when these additive concentrations were used for machining, no adverse increase in the gap distance was observed.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.3-10
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• 2008

Micro-electrical discharge machining (micro-EDM) is an effective method for machining all types of conductive materials regardless of hardness. Since micro-EDM is an electro-thermal process, the energy supplied by the pulse generator is an important factor in determining the effectiveness of the process. In this study, an investigation was conducted on the micro-EDM of tungsten carbide (WC) to compare the performance of transistor and resistance/capacitance (RC) pulse generators in obtaining the best quality micro-hole. The performance was measured by the machining time, material removal rate, relative tool wear ratio, surface quality, and dimensional accuracy. The RC generator was more suited for minimizing the pulse energy, which is a requirement for fabricating micro-parts. The smaller-sized debris formed by the low-discharge energy of RC micro-EDM could be easily flushed away from the machined zone, resulting in a surface free of burrs and resolidified molten metal. The RC generator also required much less time to obtain the same quality micro-hole in WC. Therefore, RC generators are better suited for fabricating micro-structures, producing good surface quality and better dimensional accuracy than the transistor generators, despite their higher relative tool wear ratio.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.9
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• pp.53-57
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• 2009

There are technical requirements to manufacture large size functional parts with not only simple geometries like a flat or spherical surface but also sculptured geometries. In addition, the required machining accuracy for these parts is becoming more severe. In general, the form accuracy of machined parts is determined by the relative position between workpiece and tool during machining process. To improve machining accuracy the relative position errors should be maintained within the required accuracy. This study deals with the estimation and calibration of depth of cut using the AE signal in micro-machining. Also, this sensing technique can be applied to detect the initial contact between workpiece and tool.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.389-394
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• 2005

Microfactory is effective method for machining micro size component. Electro-chemical machining can be more suitable to a microfactory than other machining methods in terms of maintaining high accuracy. Surface profile of EDM Machined component is predicted by micro EDM simulation using superpositioning spark crater. Planar motor and micro pump are developed to construct microfactory system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.10
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• pp.3113-3125
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• 1996

The objective of this study is to develop novel method named mechanical and chemical machining technique, which is capable of producing three dimensional patterns of few micrometers in dimension on a silicon wafer without the use of a mask. The strategy is to impart mechanical energy along the path of the pattern to be fabricated on a single crystal silicon by way on introdusing frictional interaction under controlled conditions. Then, the surface is preferentially etched to reveal the areas that have been mechanically energized. Upon completion of the etching process, the three dimensional pattern is produced on the silicon surface. Experiments have been conducted to identify the optimal tool material, geometery, as well as fabrication condition. The new technique introduced in this paper is significantly simpler than the conventional method which require sophisticated equipment and much time.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1787-1792
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• 2003

Recently with the development of semiconductor technology, the miniaturization of parts and products as well as their high precision is required. In addition, as the national competitiveness is increasingly affected by the development of the micro parts through micro machining technology, the study of the micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tools under the size of $20{\mu}m$ and to machine micro holes using them. The fabrication is done by grinding and the application of ELID to the grinding wheel. The surface roughness of the micro tools is measured to evaluate the study.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.5
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• pp.572-577
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• 2012

Recently porous polymer has widely been applied to packaging, heat isolation, and sound absorption in various fields from the electrics to the automobiles industry. A lot of micro porosities inside foamed polymer provide lower heat conduction and lighter weight than non-porous polymer, because they involve gas or air during foaming process. In this paper experimental approaches of the UV laser micro machining behavior for Expanded Polypropylene (EPP) foamed polymer materials, which have different expansion rates, were investigated. From these results, the ablation phenomena were finally observed that the ablation is depended upon stronger photo-chemical than photo-thermal effect. This study will also help us to understand interaction between UV laser beam and porous polymer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1194-1197
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• 2005

Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.6
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• pp.636-641
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• 2009

Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.7
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• pp.87-93
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• 2010

This paper presents an evaluation of efficiency on glass precision machining by using abrasive water-jet machine. In this study, problems of conventional water-jet machining are examined experimentally and are analysized numerically. Especially, the reason of whitening on the machined surface of biochip glass is determined. It is found that the mass flow rate of abrasive input and transverse speed of water-jet are key parameters to control the direct machining of micro hole and channel on a glass substrate. Based on results of experimental analysis, possibility of direct fabrication of micro holes and channels on a glass substrate is successfully confirmed.