• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.152-152
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• 2009

We investigate micro-tip properties as Ni-Co plating and CMP processes for MEMS probe card and units. The micro-tip are fabricated by using Ni-Co plating machine, lapping machine, and chemo-mechanical polisher. In order to get high conductive and reliable micro-tip, we control Co contents and thickness by CMP speed. We have found that about 20-25% of Co contents are required and have to lapping speed of 30 rpm. Also, we investigate photolithography and Ni-Co plating processes conditions for the one-step and the three-step micro-tips.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1690-1691
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• 2008

Micro cell stimulation device is interested in many researchers because it has several advantages such as saving time and reagents. We introduce new micro-bioreactor using micro bead and conduct cell stimulation experiments to verify effective time because cell have operated by cell-cycle (G1, S, G2, and M phase). Micro-bioreactor was made by soft lithography and CAPE (calf pulmonary artery endothelial cell) was cultured in PDMS (polydimethylsiloxane) micro device for 12 hour and cell starvation process was performed for 24 hours. Micro glass beads were rolled only by slating device every hour during 15 hour because of minimizing other stimulation force like flow and pressure. The result represents that cells under exposed under micro bead stimulation show higher growth rate than normal condition and earlier and later stimulation time are more effective.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.400-401
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• 2009

In this paper we report a micro projector including of RGB sources, a $3{\times}1$ Fiber Optic Color Synthesizer (FOCS), and a two dimensional micro mechanical scanning mirror. We further report a modifier micro collimator which can enhance the resolution of the screened image.

• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.458-464
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• 1998

This paper gives characterization of substrate and PZT(53/47) thin film deposited by metalorganic decomposition, which is concerned in deposition process and device fabrication process, to fabricate micro electro mechanical system (MEMS) device with piezoelectric material. The PZT thin films deposited by MOD at 700^{\circ}C$ for 30 minutes had a polycrystallinity, that is, no substrate dependence, while different interface were developed depending on the bottom electrodes. Such a structural variation could influence on not only the properties of the PZT film but also etching process for fabricating MEMS devices. Therefore the electrode structure is a very important factor in the deposition of the PZT film during etching process by HF acid for MEMS device with piezoelectric material. Piezoelectric coefficients of the PZT films on the different substrates were 40 and 80 pm/V at an applied voltage of 4V. Based in these results, it was possible for deposition of the PZT film by MOD to apply MEMS device fabrication process based on piezoelectricity after selection of proper bottom electrode.

• 대한기계학회논문집B
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• 제32권3호
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• pp.231-234
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• 2008

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

• 한국정밀공학회지
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• 제26권9호
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• pp.64-71
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• 2009

Recently as ultrasonic medical devices are gradually developed, many of those require smaller and more precision coaxial cables in the probe. So, the use of micro coaxial cable becomes an efficient solution for ultrasonic machine. However, there are many difficulties in stripping micro coaxial cable by traditional mechanical process. In this paper we use the Nd:YAG laser for the efficient striping of conduct wire of cable. Through some experiments, we found that there is a new possibility in the proposed method. Also, we propose a pre-process of the cable before stripping in order to enhance the performance.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권2호
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• pp.102-110
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• 2002

In this paper, we present the fabrication of tunable capacitors and 3-dimensional inductors. This work was related to fabricated 3-dimensional device for need of micro device in developing new intelligence age. This device was fabricated by electroplating used electroplating PR and high-vacuum evaporation of metal. Fabricated micro-inductor is consisted of air-bridge on electroplating rod and electroplated core. Micro-capacitor is consisted of thin metal membrane and electroplated core. Electroplating material is used Cu metal solvent. Air-gap between metal-layers function as almost perfect isolation layer. The most advantage of our micro-inductor and micro-capacitor compared to present device is a possibility that can fabricate on RF MEMS(microelectro-mechanical systems) application with high performance and various function. In this paper, we present the fabrication of tunable capacitors and 3-dimensional inductors. This work was related to fabricated 3-dimensional device for need of micro-device in developing new intelligence age. This device was fabricated by electroplating used electroplating PR and high-vacuum evaporation of metal. Fabricated micro-inductor is consisted of air-bridge on electroplating rod and electroplated core. Micro-capacitor is consisted of thin metal membrane and electroplated core. Electroplating material is used Cu metal solvent. Air-gap between metal-layers function as almost perfect isolation layer. The most advantage of our micro-inductor and micro-capacitor compared to present device is a possibility that can fabricate on RF MEMS application with high performance and various functions.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 심포지엄 논문집 정보 및 제어부문
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• pp.137-140
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• 2005

The electronic dispenser is composed of electronic part and mechanical part. Electronic part is consisted of input keypad, micro-controller, display module, and pump module. In this paper we designed micro-controller for electronic part. The micro-controller controls display module and pump module. The display module is composed by LCD device, and the pump module is composed by motor device. The micro-controller for an electronic dispenser is designed by VHDL. We used WX12864APl for the LCD device and SPS20 for the stepping motor. Also, the micro-controller is designed by Altera Quartus tool and verified with Agent 2000 Design-kit using APEX20K Device. In this paper, we present possibility to adopt of biotechnology field through designing of one-chip controller for an electronic dispenser.

• 한국생산제조학회지
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• 제23권3호
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• pp.218-222
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• 2014

A 3D printer was used to fabricate a micro-TAS system for biomedical applications. A polymeric medical device fabrication based on a 3D printer can be performed at atmospheric conditions. A CAD- and CAM-based system is a flexible method to design medical components, and a 3D printer is a suitable device to perform this task. In this research, a 100-micron-wide fluidic channel was fabricated with a high-aspect ratio. A cross-sectional SEM image confirmed its possible usage in a micro-reactor using 3D printers. CNC-machined samples were compared to 3D printer-fabricated samples, and the advantages and disadvantages were discussed. Based on the SEM images, the surface roughness of the 3D printed reactor was not affected by wet or dry conditions due to its manufacturing principle. An aspect ratio of 5 to 1 was achievable with 100-${\mu}$ m-wide fluid channels. No melting was found, and the shape of channels was straight enough to be used for micro reactors.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.16.2-16.2
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• 2005