• 한국정밀공학회지
• /
• 제21권4호
• /
• pp.32-38
• /
• 2004

Laser-induced thermochemical wet etching of titanium in phosphoric acid has been investigated to examine the feasibility of this method fur fabrication of microstructures. Cutting, drilling, and milling of titanium foil were carried out while examining the influence of process parameters on etch width, etch depth, and edge straightness. Laser power, scanning speed of workpiece, and etchant concentration were chosen as major process parameters influencing on temperature distribution and reaction rate. Etch width increased almost linearly with laser power showing little dependence on scanning speed while etch depth showed wide variation with both laser power and scanning speed. A well-defined etch profile with good surface quality was obtained at high concentration condition. Fabrication of a hole, micro cantilever beam, and rectangular slot with dimension of tess than 100${\mu}{\textrm}{m}$ has been demonstrated.

• 융복합기술연구소 논문집
• /
• 제3권2호
• /
• pp.39-43
• /
• 2013

Titanium has been used to satisfy various applications such as bio engineering, aerospace, electronics, automobile. Recently, micro fabrication technologies of metals such as titanium have been required to satisfy many conditions in various fields. To satisfy these demands, micro electrochemical process using laser marking can be an alternative method because it is one of the precision machining and efficient process. Micro electrochemical process using laser marking needs to accomplish form of the oxidized recast layer on metal surface by laser marking. The laser beam marking conditions such as average power, pulse repetition rate and marking speed should be properly selected to form oxidized recast layer. So, the characteristics of titanium surface according to laser marking conditions was investigated through SEM(scanning electron microscope), EDS(energy dispersive spectrometer) and surface roughness analysis.

• 한국마이크로전자및패키징학회:학술대회논문집
• /
• 한국마이크로전자및패키징학회 2000년도 추계 기술심포지움 논문집
• /
• pp.95-98
• /
• 2000

• 한국정밀공학회지
• /
• 제20권2호
• /
• pp.33-39
• /
• 2003

A new microlens fabrication technique, the excimer laser lithography is developed. This bases on the pulsed laser irradiation and the transfer of a chromium-on-quartz reticle on to the polymer surface with a proper projection optics system. An excimer laser lithography system with 1/4 and 1/20 demagnification ratios was constructed first, and the photoablation characteristics of the PMMA and Polyimide were experimentally examined using this system. For two different shapes of microlenses, a spherical lens and a cylindrical lens, fabrication techniques were investigated. One for the spherical lens is a combination of the mask pattern projection and fraction effect. The other for the cylindrical lens is a combination of the mask pattern projection and the relative movement of a specimen. The result shows that various shapes of micro optical components can be easily fabricated by the excimer laser lithography.

• 한국정밀공학회지
• /
• 제21권12호
• /
• pp.13-20
• /
• 2004

Manufacturing process for the microfluidic device can include such sequential steps as master fabrication, electroforming, and injection molding. The laser ablation using masks has been applied to the fabrication of channels in microfluidic devices. In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation of PET (polyethylene terephthalate) by the excimer laser radiation could be used successfully to make three dimensional master fur nickel mold insert. The mechanism fur ablative decomposition of PET with KrF excimer laser $({\lambda}: 248 nm, pulse duration: 5 ns)$ was explained by photochemical process, while ablation mechanism of PMMA (polymethyl methacrylate) is dominated by photothermal process, the .eaction between PC (polycarbonate) and KrF excimer laser beam generate too much su.face debris. Thus, PET was adopted in polymer master for nickel mold insert. Nickel electroforming using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• 한국레이저가공학회지
• /
• 제18권3호
• /
• pp.14-19
• /
• 2015

A helical fabricating method using $CO_2$ laser was utilized for producing cone-shaped structure on a silica substrate. Output power and the number of scanning radiation were modified in order to control the structure. The experiment shows that the depth and width of cone-shape were increased with higher output power of the laser and the number of scanning. We demonstrate fabrication of multidirectional side-firing optical fiber with diameter of 440 um using the $CO_2$ laser fabrication technique.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 추계학술대회 논문집
• /
• pp.1037-1040
• /
• 2002

In micro-stereolithography technology, fabrication conditions that include laser power, laser scan speed, laser scan pitch, and material property of photopolymer such as penetration depth and critical exposure are considered as major process variables. But the existing scan path generation methods based only on CAD model have not taken them into account, which has resulted in cross-section dimension of low accuracy. Thus, to enhance cross-section dimensional accuracy, the physical resin solidification n phenomena should be reflected in laser scan path generation and stage operating code. In this paper, multi-line experiments based on single line solidification model are performed. And the method for improving cross-section dimensional accuracy is presented, which is to apply the database based on experimental results to laser scan path generation.

• Journal of the Optical Society of Korea
• /
• 제19권4호
• /
• pp.327-333
• /
• 2015

This paper reports the fabrication of various micro-lensed single-mode optical fibers through the use of an enhanced peak power $CO_2$ laser beam. The end faces of the optical fibers are exposed to the $CO_2$ laser beam to form convex, concave, and conical shape optical fiber tips. Peak power of the $CO_2$ laser beam was varied from 0.8 W to 1.5 W depending on the shape of the optical fiber tip. We also discover the dependence of the angle of the optical fiber tip on the rotation angle and the number of $CO_2$ laser irradiations. The angle shows an increasing trend with both these parameters. We achieve a wide range of lenticular fibers with end face angle varying from $4.47^{\circ}$ to $8.13^{\circ}$. Furthermore, we investigate the emission pattern of light from the developed micro-lensed fibers. The proposed $CO_2$ laser based optical fiber reshaping technique shows great consistency, and thus is suitable for commercial applications.

• Corrosion Science and Technology
• /
• 제8권5호
• /
• pp.184-187
• /
• 2009

The trend of the microjoining technology by the laser-soldering process has been reviewed. Among the production technologies, joining technology plays an important role in the fabrication of electronic components. This has led to an increasing attention towards the use of modern microjoining technology such as micro-resistance spot joining, micro-soldering, micro-friction stir joining and laser-soldering, etc. This review covers the recent technical trends of laser-soldering collected from the COMPENDEX DB analysis of published papers, research subject and research institutes.

• 세라미스트
• /
• 제10권3호
• /
• pp.91-97
• /
• 2007

Femtosecond laser micro-processing received much attention in the past decade. The nature of ultra-short light-matter interaction permits femtosecond laser to overcome the diffraction limit and realize precise micro-processing. The ultrahigh light intensity of the femtosecond laser allows sapece-selective microscopic modifications to materials based on multiphoton processes. In this paper, we review our recent research development on space-selective precipitation and control of functional crystals in glasses by an infrared femtosecond laser. The technique will open new possibilities in the fabrication of micro-optical components with various optical functions.