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Microlens Fabrication by Using Excimer Laser  

김철세 (㈜신도리코)
김재도 (인하대학교 기계공학부)
윤경구 (한국기계연구원)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.2, 2003 , pp. 33-39 More about this Journal
Abstract
A new microlens fabrication technique, the excimer laser lithography is developed. This bases on the pulsed laser irradiation and the transfer of a chromium-on-quartz reticle on to the polymer surface with a proper projection optics system. An excimer laser lithography system with 1/4 and 1/20 demagnification ratios was constructed first, and the photoablation characteristics of the PMMA and Polyimide were experimentally examined using this system. For two different shapes of microlenses, a spherical lens and a cylindrical lens, fabrication techniques were investigated. One for the spherical lens is a combination of the mask pattern projection and fraction effect. The other for the cylindrical lens is a combination of the mask pattern projection and the relative movement of a specimen. The result shows that various shapes of micro optical components can be easily fabricated by the excimer laser lithography.
Keywords
Microlens; Chromium-on-quartz; Polymer; Excimer laser;
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