• 마이크로전자및패키징학회지
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• 제7권1호
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• pp.29-34
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• 2000

본 연구에서는 전극판에 깊은 홈을 가지고 전기적으로 구동 되는 마이크로미러에 대한 감쇠 특성을 고찰하였다. 유한요소법을 사용하여 마이크로미러의 공기막과 구조물 변위가 커플된 시뮬레이션이 본 연구에 적용되었다. 감쇠력은 구동 되는 미러판과 전극판 사이 공기막의 스퀴즈효과에 의해 발생한다. 전극판의 홈은 감쇠력을 감소시키며, 미러판을 낮은 전압dptj 고속 구동할 수 있도록 하여주며 정밀제어가 가능하도록 하여 준다.

• KSTLE International Journal
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• 제6권2호
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• pp.51-57
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• 2005

Surface texturing of tribological applications is an attractive technology of engineered surface. Therefore, reduction of friction is considered to be necessary for improved efficiency of machines. The current study investigated the potential of textured micro-scale grooves on bearing steel flat mated with pin-on-disk. We discuss reducing friction due to the influence of sliding direction at surface pattern. We can indicate lubrication mechanism as a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter for the lubrication condition. It was found that the friction coefficient was changed by the surface pattern and sliding direction, even when surface pattern was the same. It was thus verified that micro-scale grooves could affect the friction reduction considerably under mixed and hydrodynamic lubrication conditions. The lubrication regime influences the friction coefficient induced by the sliding direction of groove pattern. The friction coefficient depends on a combination of resistance force and hydrodynamic.

• Tribology and Lubricants
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• 제31권5호
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• pp.221-228
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• 2015

It is possible to prevent a piston from contacting the cylinder by changing the shape of the piston or by applying micro-textures, such as micro-grooves or micro-holes, over the piston surface. Usually, the minimum radial clearance reaches its minimum value at the beginning of the suction stroke because the pressure around the piston is low and almost axisymmetric such that the net pressure force on the piston is not sufficiently high to support the piston from touching the cylinder. In this study, we apply a series of saw-tooth-shaped grooves on the piston surface, and numerically investigate the effects of groove depth, groove angle, and the number of grooves with radial clearance variations using a finite difference method. We conduct a dynamic analysis of the piston for various changes in groove geometries to obtain the minimum radial clearance variation for the entire compression cycle. The minimum radial clearance increases while friction loss decreases when we apply the series of saw-tooth-shaped grooves on the piston. In addition, we analyze the impact of the change in the groove shape variable due to changes in radial clearance. Leakage variations are relevant to radial clearance, but have almost no effect on the groove parameters.

• Restorative Dentistry and Endodontics
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• 제45권2호
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• pp.11.1-11.9
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• 2020

Objectives: This study compared the flow and filling of several retrograde filling materials using new different test models. Materials and Methods: Glass plates were manufactured with a central cavity and 4 grooves in the horizontal and vertical directions. Grooves with the dimensions used in the previous study (1 × 1 × 2 mm; length, width, and height respectively) were compared with grooves measuring 1 × 1 × 1 and 1 × 2 × 1 mm. Biodentine, intermediate restorative material (IRM), and mineral trioxide aggregate (MTA) were evaluated. Each material was placed in the central cavity, and then another glass plate and a metal weight were placed over the cement. The glass plate/material set was scanned using micro-computed tomography. Flow was calculated by linear measurements in the grooves. Central filling was calculated in the central cavity (㎣) and lateral filling was measured up to 2 mm from the central cavity. Results: Biodentine presented the least flow and better filling than IRM when evaluated in the 1 × 1 × 2 model. In a comparison of the test models, MTA had the most flow in the 1 × 1 × 2 model. All materials had lower lateral filling when the 1 × 1 × 2 model was used. Conclusions: Flow and filling were affected by the size of the test models. Higher grooves and materials with greater flow resulted in lower filling capacity. The test model measuring 1 × 1 × 2 mm showed a better ability to differentiate among the materials.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2005년도 춘계학술대회
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• pp.546-549
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• 2005

Micro EDM milling using deionized water as dielectric fluid was investigated. After machining micro grooves using deionized water with different voltage. capacitance. and resistivity of deionized water, machining characteristics were investigated. The wear of a tool electrode and the machining time can be reduced by using deionized water instead of kerosene. Micro hemispheres were machined in deionized water and kerosene and their machining characteristics were compared.

• Transactions on Electrical and Electronic Materials
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• 제8권1호
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• pp.26-31
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• 2007

The goal of this study is to determine if High Pressure Micro Jet (HPMJ) conditioning can be used as a substitute for, or in conjunction with, conventional diamond pad conditioning. Five conditioning methods were studied during which 50 ILD wafers were polished successively in a 100-mm scaled polisher and removal rate (RR), coefficient of friction (COF), pad flattening ratio (PFR) and scanning electron microscopy (SEM) measurements were obtained. Results indicated that PFR increased rapidly, and COF and removal rate decreased significantly, when conditioning was not employed. With diamond conditioning, both removal rate and COF were stable from wafer to wafer, and low PFR values were observed. SEM images indicated that clean grooves could be achieved by HPMJ pad conditioning, suggesting that HPMJ may have the potential to reduce micro scratches and defects caused by slurry abrasive particle residues inside grooves. Regardless of different pad conditioning methods, a linear correlation was observed between temperature, COF and removal rate, while an inverse relationship was seen between COF and PFR.

• 한국정밀공학회지
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• 제17권4호
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• pp.106-113
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• 2000

One of the recent changes in machining technology is rapid application of micro- and high precision grinding processes. A fine groove generation is necessary for the fabrication of optics, electronics and semiconductor parts. Slot grinding is very efficient for the generation of micro ordered groove with hard and brittle materials. In the process of slot grinding, chipping at the sharp edges and microcracks of the ground grooves are inevitable defects. Chipping should be reduced for the improvement of surface integrity. Mechanical contact with diamond grits causes microcracks at the grooves. This damage resides subsurface, and can be the cause of failure of the punch die. This paper deals with chipping generation at the sharp edges, surface integrity of side groove and fracture strength is related to the microcracks in the slot grinding.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1223-1227
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• 2005

Fine microgroove is the key component to fabricate micro-grating, micro-grating lens and so on. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. This study deals with the creation of ultra-precision micro grooves using non-rotational diamond tool and CNC machining center. The shaping type machining method proposed in the study allows to produce V-shaped grooves of $40\mu{m}$ in depth with enough dimensional accuracy and surface. For the analysis of machining characteristics in micro V-grooving, three components of cutting forces and AE signal are measured and processed. Experimental results showed that large amplitude of cutting forces and AE appeared at the beginning of every cutting path, and cutting forces had a linear relation with the cross-sectional area of uncut chip thickness. From the results of this study, proposed micro V-grooving technique could be successfully applied to forming the precise optical parts like prism patterns on light guide panel of TFT-LCD.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2005년도 춘계학술발표대회 논문집
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• pp.97-101
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• 2005

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
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• pp.82-88
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• 2006