Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System |
Lee, Hyo-Sang
(Department of Chemical Engineering, University of Arizona)
DeNardis, Darren (Department of Chemical Engineering, University of Arizona) Philipossian, Ara (Department of Chemical Engineering, University of Arizona) Seike, Yoshiyuki (Asahi Sunac Corporation) Takaoka, Mineo (Asahi Sunac Corporation) Miyachi, Keiji (Asahi Sunac Corporation) Doi, Toshiro (Faculty of Education, Saitama University) |
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