• Journal of the Institute of Electronics Engineers of Korea SC
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• v.46 no.3
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• pp.22-30
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• 2009

GPS and INS integrated systems are expected to become commonly available as a result of low cost Micro-Electro-Mechanical Sensor (MEMS) technology. However, the current performance achieved by low cost sensors is still relatively poor due to the large inertial sensor errors. This is particularly prevalent in the urban environment where there are significant periods of restricted sky view. To reduce the inertial sensor error, GPS and low cost INS are integrated using a Loosely Coupled Kalman Filter architecture which is appropriate in most applications where there is good satellite availability. In this paper, we present the GPS/INS sensor Integration using Loosely Coupled Kalman Filter approach. We also compare the simulation results of Wander Azimuth Strapdown Mechanization Scheme with the reference values generated by the ZH35C trajectory simulator that is describe mathematically either by the geometry of the path, or as the position of the object over time.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.379-382
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• 2007

The MEMS (Micro Electro Mechanical Systems) process is used in a micro/nano pattern manufacturing method. This method is based on the lithography technology. But the MEMS process has some problems such as complicated process, long processing time and high production costs. Many researchers are doing research in substitute manufacturing method to work out a solution to these problems. In this paper, we apply a dieless incremental forming technology to a substitute method of MEMS process. This dieless forming technology is using in the commercial scale sheet forming such as a prototype of automobile sheet parts. 5-axes CNC (Computerized Numeric Control) method are applied in this system to get a micro-scale dieless forming results. These 5-axes system are composed of precision AC servo motor stages (4-axes) and PZT actuator (1-axis). A PZT actuator is used in a precision actuating axis because it can be operated in the nano scale stroke resolution. This micro dieless incremental forming system has the advantage of minimization in manipulating distance and working space. As equipment and tools become smaller in size, minute inertia force and high natural frequency can be obtained. Therefore, high precision forming performance can be obtained. This allows the factory to quickly provide the customer with goods because the manufacturing system and process are reduced. To construct this micro manufacturing system, many technologies are necessary such as high stiffness frame, high precision actuating part, structural analysis, high precision tools and system control. To achieve the optimal forming quality, the micro dieless forming system is designed and made with high stiffness characteristic.

• Smart Structures and Systems
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• v.15 no.6
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• pp.1601-1623
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• 2015

Electroactive polymers have attracted considerable attention in recent years due to their sensing and actuating properties which make them a material of choice for a wide range of applications including sensors, biomimetic robots, and biomedical micro devices. This paper presents an effective modeling strategy for nonlinear large deformation (small strains and moderate rotations) dynamic analysis of polymer actuators. Considering that the complicated electro-chemo-mechanical dynamics of these actuators is a drawback for their application in functional devices, establishing a mathematical model which can effectively predict the actuator's dynamic behavior can be of paramount importance. To effectively predict the actuator's dynamic behavior, a comprehensive mathematical model is proposed correlating the input voltage and the output bending displacement of polymer actuators. The proposed model, which is based on the rigid finite element (RFE) method, consists of two parts, namely electrical and mechanical models. The former is comprised of a ladder network of discrete resistive-capacitive components similar to the network used to model transmission lines, while the latter describes the actuator as a system of rigid links connected by spring-damping elements (sdes). Both electrical and mechanical components are validated through experimental results.

• Coupled systems mechanics
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• v.10 no.1
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• pp.39-60
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• 2021

The present paper is concerned with the study of nonlinear ultrasonic waves in a magneto thermo (MT) elastic armchair single-walled carbon nanotube (ASWCNT) resting on polymer matrix. The analytical formulation is developed based on Eringen's nonlocal elasticity theory to account small scale effect. After developing the formal solution of the mathematical model consisting of partial differential equations, the frequency equations have been analyzed numerically by using the nonlinear foundations supported by Winkler-Pasternak model. The solution is obtained by ultrasonic wave dispersion relations. Parametric work is carried out to scrutinize the influence of the non local scaling, magneto-mechanical loadings, foundation parameters, various boundary condition and length on the dimensionless frequency of nanotube. It is noticed that the boundary conditions, nonlocal parameter, and tube geometrical parameters have significant effects on dimensionless frequency of nano tubes. The results presented in this study can provide mechanism for the study and design of the nano devices like component of nano oscillators, micro wave absorbing, nano-electron technology and nano-electro- magneto-mechanical systems (NEMMS) that make use of the wave propagation properties of armchair single-walled carbon nanotubes embedded on polymer matrix.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.04a
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• pp.29-33
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• 2000

MEMS, Micro Electro-Mechanical Systems, present one of the greatest advanced packaging challenges of the next decade. Historically hybrid technology, generally thick film, provided sensors and actuators while integrated circuit technologies provided the microelectronics for interpretation and control of the sensor input and actuator output. Brought together in MEMS these technical fields create new opportunities for miniaturization and performance. Integrated circuit processing technologies combined with hybrid design systems yield innovative sensors and actuators for a variety of applications from single crystal silicon wafers. MEMS packages, far more simple in principle than today's electronic packages, provide only physical protection to the devices they house. However, they cannot interfere with the function of the devices and often must actually facilitate the performance of the device. For example, a pressure transducer may need to be open to atmospheric pressure on one side of the detector yet protected from contamination and blockage. Similarly, an optical device requires protection from contamination without optical attenuation or distortion being introduced. Despite impediments such as package standardization and complexity, MEMS markets expect to double by 2003 to more than ＄9 billion, largely driven by micro-fluidic applications in the medical arena. Like the semiconductor industry before it. MEMS present many diverse demands on the advanced packaging engineering community. With focused effort, particularly on standards and packaging process efficiency. MEMS may offer the greatest opportunity for technical advancement as well as profitability in advanced packaging in the first decade of the 21st century! This paper explores MEMS packaging opportunities and reviews specific technical challenges to be met.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.2
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• pp.166-171
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• 2010

Wired monitoring systems have been used for damage detection and dynamic analysis of large structures(bridges, dams, plants, etc.). However, the real-world applications still remain limited, mainly due to time and cost issues inherent to wired systems. In recent years, an increasing number of researchers have adopted WSN(wireless sensor network) technologies to the field of SHM(structural health monitoring). Accurate time synchronization is most critical for the wireless approach to be feasible for SHM purpose, along with sufficient wireless bandwidth and highly precise measuring resolution. To satisfy technical criteria stated above, a wireless vibration monitoring system that uses high-precision MEMS(micro-electro-mechanical system) sensors and A/D convertor is discussed in detail. It was found experimentally that the level of time synchronization fell within $200\;{\mu}sec$.

• Journal of Sensor Science and Technology
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• v.20 no.2
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• pp.77-81
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• 2011

This paper presents a single-pole eight-throw(SP8T) switch based on proposed a radio-frequency(RF) microelectromechanical systems (MEMS) switches. The proposed switch was driven by a double stop(DS) comb drive, with a lateral resistive contact. Additionally, the proposed switch was designed to have tapered signal line and bi-directionally actuated. A forward actuation connects between signal lines and contact part, and the output becomes on-state. A reverse actuation connects between ground lines and contact part, and the output becomes off-state. The SP8T switch of 3-stage tree topology was developed based on an arrangement of the proposed RF MEMS switches. The developed SP8T switch had an actuation voltage of 12 V, an insertion loss of 1.3 dB, a return loss of 15.1 dB, and an isolation of 31.4 dB at 6 GHz.

• Journal of Sensor Science and Technology
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• v.27 no.2
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• pp.99-104
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• 2018

A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to miniaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting in reduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane and the vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-electro-mechanical systems (MEMS) technology. In particular, a $20{\mu}m$ thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than $400{\mu}m$. In the experiments, the vibration displacement characteristics of the optimized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of $1mA_{rms}$ was applied to the coil.

• Proceedings of the KWS Conference
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• 2002.10a
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• pp.781-784
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• 2002

Adhesion phenomenon is more significant for smaller objects, because adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. For the purpose of microassembly, theoretical understanding is required for the Adhesion phenomenon. Authors have developed a force measurement system in an ultra-high vacuum chamber of Auger electron spectroscopy. The force between arbitrary combination of materials can be measured at a pressure less than 100 nPa after and before Ar ion sputtering and chemical analysis for several atomic layers of the surface. The results are successfully interpreted with a theory of contact mechanics. Since surface energy is quite important in the interpretation, electronic theory is used to evaluate the surface energy. In the manipulation of small objects, the adhesional force is always attractive. Repulsive force is essential for the manipulation. It can be generated by Coulomb interaction. The voltage required for detachment is theoretically analyzed and the effect of boundary conditions on the detachment is obtained. The possibility and limitations of micro-manipulation using both the adhesion phenomenon and Coulomb interaction are theoretically clarified. Its applicability to nano-technology is found to be expected.

• Journal of the Korean Society for Heat Treatment
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• v.36 no.3
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• pp.137-144
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• 2023

Micro electro mechanical systems (MEMS) and precision machines require excellent friction and wear characteristics to improve energy efficiency generated during sliding motion. In this study, DLC thin film with high hardness and low friction was deposited on STS304 substrate material by CVD method, and dot-shaped convex and concave micropatterns were fabricated by photolithography process. The diameter of the pattern was 20 ㎛, the pitch was 40 ㎛, and a pattern having a mesh type arrangement was fabricated and an abrasion test was performed. The results of the wear test on the micro pattern confirmed that the friction coefficient characteristics were improved compared to STS 304 and DLC thin films. In addition, in this result, the micro-pattern showed 11.4% more improved friction coefficient than the DLC thin film. The friction coefficient characteristics for convex and concave patterns of the same size showed almost similar results.