• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1344-1348
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• 2003

It is generally known to be difficult to etch a surface of a transparent material such as fused silica by conventional laser ablation in which the surface is simply irradiated with a laser beam. A lot of studies have been done to provide a method capable of efficiently etching transparent materials without defects such as cracks. One of the promising methods or the micro-machining of optically transparent materials is laser induced etching. In this study, micro-drilling of fused silica by laser induced wet etching was conducted. KrF excimer and YAG laser were used as light sources. Acetone solution pyrene and ethanol solution of rhodamine were used as etchant.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1780-1783
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• 2003

Burrs formed in micro drilling with Ø 1.0 and 0.5 are observed. The changes of burr geometry are compared when feed rate and velocity changes. Characteristics of burr formation in 4 different workpiece materials are analyzed. The coefficient of burr geometry, CB is introduced to classify burrs according to burr height and burr types. Finally control charts are produced using the coefficient of burr geometry and burr types in each workpiece material. Data base is constructed to be used for burr expert system.

• 한국기계가공학회지
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• 제4권1호
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• pp.18-23
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• 2005

This paper reports experimental results on microdrilling process for silicon parts used in semiconductor equipments. An experimental system was developed consisting of a high speed precision machine, microscope system, and project profile instrument. The experimental results indicate that the amount of chipping at the entrance and exit of micro hole decreases as the spindle speed increases up to 18,000 rpm. At higher spindle speed, however, the amount of chipping increases rapidly. The amount of chipping and infeed rate show proportional relationship up to 20 m/min of infeed rate. Beyond that infeed rate, however, sudden increase in the amount of chipping has occurred.

• 한국레이저가공학회지
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• 제17권2호
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• pp.5-10
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• 2014

Aluminum has been widely used in the electric applications because of light metals. When mechanical element is periodically moving with contacting other surfaces, the anodizing process for aluminum is useful for avoiding the abrasive damage. The anodized element has quietly different characteristics with respect to the distribution of hardness and crystal structure. In this work, the laser drilling of anodized surface is studied experimentally. Fusion drilling method - laser drilling with inert gas blowing - is used. The effect of various process parameters (gas pressure, laser power, focus position) is investigated with respect to the hole size and circularity.

• 한국생산제조학회지
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• 제8권1호
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• pp.15-20
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• 1999

• 한국정밀공학회지
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• 제20권9호
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• pp.109-117
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• 2003

With development of high advanced technologies and skills, micro machining techniques also are being more functional and smaller. Some of the recently developed micro machining technologies are micro drilling, micro EDM, WEDG, LBM, micro milling, micro UVM etc. In these micro machining techniques, Micro -EDM is generally used for machining micro holes, pockets, and micro structures in difficult-cut-materials. For machining micro structures, first of all, tool electrode should be fabricated by WEDG process. In micro-EDM, parameters such as peak current, pulse width, duration time are very important to fabricate the tool electrode and micro structures. Developed experimental equipments are composed of RLC circuit with PWM. In this paper, using developed micro EDM machine, the characteristics of micro electro discharge machining are investigated at micro holes, slot, and pocket machining etc. Also the trends of tool wear are investigated in case of hole and slot machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.795-796
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.283-284
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• 2007

• 한국기계가공학회지
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• 제7권3호
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• pp.30-35
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• 2008

As demands for being economical, precise drilling process is on the increase. Therefore, the objective of this study is to develop a step cutter that can be controllable through micro dimension and can be changed from separate manufacturing processes of drilling and boring into an integrated one. In order to attain this object the step cutter is designed with a 3D geometric modeling and the design could be modified easily by using parametric modeling methodology. Also, collision is not occurred during manufacturing process because of cutting simulation. The step cutter is assembled by parts made up of 5-axis machining and sintering. Validation tests are accomplished. They show that developed cutter has characteristics such as reduction of machining time as well as the good surface roughness of the machined hole. Indeed, reliability could be obtained from a durability test.

• 한국정밀공학회지
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• 제18권12호
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• pp.152-158
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• 2001

In this paper, we have developed an electro discharge machine for micro drilling driven by a voice coil actuator. Because the voltage signal of the electro-discharging circuit shows a lot of peaks and valleys, the active type low-pass filtering technique is adopted to get the average of the signal. Since the motion of the voice coil is precisely controlled by the error value between the object voltage value and the measured one, it is possible to prevent the mechanical contact between the rotating electrode and the workpiece and to maintain the appropriate machining conditions during the process. The electro-chemical machining technology was also adopted to make small diameter electrodes. Pure water is used as a dielectric. The machining procedure is performed to verify the feasibility of the developed system. It takes about 10 seconds to drill the ${\phi}m$100${\mu}m$ hole to the 100${\mu}m$ thickness stainless steel plate. The machining time depends on the values of the resister and the capacitor. There may exist the optimal values of time constant and the tendency is displayed In the appendix.