• International Journal of Precision Engineering and Manufacturing
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• v.2 no.3
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• pp.54-60
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• 2001

A newly designed inductive micro displacement detecting system is presented. The proposed inductive system consists of driving coils, position-detecting coils, cores, and closed-loop formed magnetic blocks. The cores and magnetic blocks are made of Mn-Zn ferrite. When AC sine wave is applied to the driving coils, the time derivative flux is generated within the system, and then induced voltages arise in the position-detecting coils according to the core\`s position. Putting the cores to be moved proportionally to the input displacement, the induced voltage is proportional to input displacement. The parameters that affect the system characteristics are turn ratio, air-gap size, excitation frequency, overlap area, load resistance, capacitance effect, and so forth. Based on the experimental results, the system parameters are selected in such a way as to have high sensitivity ad stable responses. The sensitivity of the proposed inductive displacement-detecting system is greater than 2800mV.V-1mm-1 and the linearity error is below $\pm$0.10% in the range of $\pm$200㎛.

• Current Applied Physics
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• v.18 no.11
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• pp.1368-1374
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• 2018

In this paper, forced vibration was used to regulate the droplet migration, fully recording the transient migration of droplets on a micro-textured substrate under the resonance frequency by a high-speed camera. The influence of resonance frequency and dynamic migration characteristics of droplets on the solid micro-texture surface under lateral vibration were researched. The experiment demonstrates that the driving force is caused by the difference between the left and right contact angles made the droplet oscillate and migrate, and as time t increases, the left and right contact points are periodically shifted and the amplitude of migration increases. Therefore, based on the droplet migration behavior and its force balance mechanism, a spring vibration model of migration behavior of the vibrating droplet micro unit was set up to predict the complete trajectory of its migration on a solid surface. The calculation results show that the theoretical displacement is less than the experimental displacement, and the longer the time, the larger the difference. Affected by the vibration, part of the droplet permeates through the micro-texture, resulting in the droplet losing height and the contact angle becoming smaller as well. While the other part of droplet overcomes the internal surface tension to migrate.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.464-467
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• 1997

In this paper, a high precision track following control algorithm is proposed for micro electrostatic actuator considering of the application for hard disk drive. The micro electrostatic actuator proposed has nonlinear voltage-displacement characteristic in a working range of 0.8.mu.m and has uni-directional movement. Mid range reference and open-loop bias are proposed for the revision of negative position error, and inverse model for linearization.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.124-124
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• 2004

최근 MEMS공학의 발전으로 미소 가공물과 그 미소 가공물을 가공하는 공작기계의 발전이 두드러지고 있다. 마이크로 성형기는 이러한 미소 가공물을 만드는 공작기계들 중의 하나이다. 마이크로 성형기(micro former)는 마이크로 홀(micro holl)을 만드는 성형기로써 크랭크 축의 회전에 의한 펀치의 직선 운동으로 마이크로 홀을 뚫는 성형기이다. 마이크로 홀을 성형할 때에는 상하, 좌우의 미세한 변위가 생길 수 있다.(중략)

• Journal of Powder Materials
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• v.23 no.4
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• pp.311-316
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• 2016

$Ni(OH)_2$ hollow spheres have been prepared by solvent displacement crystallization using a micro-injection device, and the effect of process parameters such as concentration and the relative ratio of the injection speed of the precursor solution, which is an aqueous solution of $NiSO_4{\cdot}6H_2O$, to isopropyl alcohol of displacement solvent have been investigated. The crystal phases after NaOH treatment are in the ${\beta}-phase$ for all process parameters. A higher concentration of $NiSO_4{\cdot}6H_2O$ aqueous solution is injected by a micro-injection device and bigger $Ni(OH)_2$ hollow spheres with a narrower particle size distribution are formed. The crystallinity and hardness of the as-obtained powder are so poor that hydrothermal treatment of the as-obtained $Ni(OH)_2$ at $120^{\circ}C$ for 24 h in distilled water is performed in order to greatly improve the crystallinity. It is thought that a relative ratio of the injection speed of $NiSO_4{\cdot}6H_2O$ to that of isopropyl alcohol of at least more than 1 is preferable to synthesize Ni(OH)2 hollow spheres. It is confirmed that this solution-based process is very effective in synthesizing ceramic hollow spheres by simple adjustment of the process parameters such as the concentration and the injection speed.

• The korean journal of orthodontics
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• v.47 no.4
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• pp.229-237
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• 2017

Objective: The aim of this study was to compare the initial stability as insertion and removal torque and the clinical applicability of novel orthodontic zirconia micro-implants made using a powder injection molding (PIM) technique with those parameters in conventional titanium micro-implants. Methods: Sixty zirconia and 60 titanium micro-implants of similar design (diameter, 1.6 mm; length, 8.0 mm) were inserted perpendicularly in solid polyurethane foam with varying densities of 20 pounds per cubic foot (pcf), 30 pcf, and 40 pcf. Primary stability was measured as maximum insertion torque (MIT) and maximum removal torque (MRT). To investigate clinical applicability, compressive and tensile forces were recorded at 0.01, 0.02, and 0.03 mm displacement of the implants at angles of $0^{\circ}$, $10^{\circ}$, $20^{\circ}$, $30^{\circ}$, and $40^{\circ}$. The biocompatibility of zirconia micro-implants was assessed via an experimental animal study. Results: There were no statistically significant differences between zirconia micro-implants and titanium alloy implants with regard to MIT, MRT, or the amount of movement in the angulated lateral displacement test. As angulation increased, the mean compressive and tensile forces required to displace both types of micro-implants increased substantially at all distances. The average bone-to-implant contact ratio of prototype zirconia micro-implants was $56.88{\pm}6.72%$. Conclusions: Zirconia micro-implants showed initial stability and clinical applicability for diverse orthodontic treatments comparable to that of titanium micro-implants under compressive and tensile forces.

• Journal of the Korean Geotechnical Society
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• v.28 no.4
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• pp.55-65
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• 2012

This study performs model test to propose the installation method of micro-pile appropriate to various soil conditions such as sand or silt soil. As a result, the crossed installation method (${\theta}$ < $0^{\circ}$) of micro-pile is effective in resisting a compression displacement of soil in the case of silt exhibiting the punching shear failure. And the inclined installation method (${\theta}$ > $0^{\circ}$ or ${\theta}$ < $0^{\circ}$) of micro-pile is effective in resisting a lateral displacement of soil in the case of sand to exhibiting the general or local shear failure.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.140-148
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• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

• Journal of the Korean Society for Precision Engineering
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• v.12 no.2
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• pp.48-58
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool, optical device, measurement systen. In order ro keep a high precision displacement resolution, they use a position sensor and feedback the error. From the practical point of view, a high-resolution displacement sensor system are very expensive and difficult to guarantee such sensitive sensors work properly in the hard opera- tion environment of industry. In this study, a micro-positioning grinding table which does not require position sensor but uses piezoelectric voltage feedback, has been developed. It is driven by hystersis-considering reference input voltage which calculated from computer and then uses actuator/sensor characteristics of piezoelectric materials. From the result of experiments we proved a fast and stable response of micro-positioning system and suggested efficient technique to control the piezoelectric actuator. And through grinding experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as extremely small depth of grinding.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.501-502
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• 2006

In-plane type micro piezoelectric micro grippers with pneumatic lines for manipulation biological cells and micro parts were designed, fabricated, and characterized. Micro grippers were fabricated through the final micro-sanding process after wafer level bonding between the etched 4' Si wafer with pneumatic channels and 4' glass wafer. Displacements between two jaws of fabricated micro grippers were linearly increased with applying voltages to piezoelectric actuator. In the case of applying 80 V, the displacement between two jaws was $160{\mu}m$. Using fabricated micro grippers, manipulation tests for biological cell and micro parts with the sizes less than $100{\mu}m$ are in process.