• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.993-998
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• 2002

watches, air bearings and printed circuit hoards (PCB). However, it is not easy to determine optimum cutting conditions since the micro drilling process is very sensitive to various disturbances. Also, undesirable characteristics to optimize the micro drilling are small signal-to-noise ratios, drill wandering motions and high aspect ratios. Thus, in this study, experimental design methods are applied to determine optimum cutting conditions. Suing the methods, three cutting parameters, fred, step and curving speed are optimized to minimize thrust forces. Obtained conditions are verified through required experimental works. As the results, it is shown that the experimental methods can be applied to micro drilling processes to determine Optimum Cutting Conditions.

• 한국정밀공학회지
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• 제19권11호
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• pp.211-220
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The mirror was fabricated by using MEMS technology. Especially, the process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the Process reliability. The mirror size was 2.5mm${\times}$3mm and it needed about 35V for displacement of 3.2 ${\mu}$.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.421-426
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• 2003

Micro-suing that used on micro mechanism should be equal to distance between pitch and correct of shape. Therefore, micro spring must make by super-precision working. But, current step of super-precision processing depends on special quality of work piece and is ineffective the aspect of cost and productivity yet. Also, to use as demandable length shearing process perform but even if make precision spring, in the aspect of quality of coil spring make difficult that produce product of good quality. Therefore, purpose of this study presented proposed process that extract the point of processing factor after perform finite element analysis applying existing sheet shearing process to suing shearing process consider cost and productivity after evaluate.

• 한국자동차공학회논문집
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• 제12권3호
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• pp.51-58
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• 2004

Optimization of engine desist and operation parameters using a genetic algorithm was demonstrated for direct injection diesel engine combustion. A micro genetic algorithm and a modified KIVA-3V code were used for the analysis and optimization of the engine combustion. At each generation of the optimization step the micro genetic algorithm generated five groups of parameter sets, and the five cases of KIVA-3V analysis were to be performed either in series or in parallel. The micro genetic algorithm code was also parallelized by using MPI programming, and a multi-CPU parallel supercomputer was used to speed up the optimization process by four times. An example case for a fixed engine speed was performed with six parameters of intake swirl ratio, compression ratio, fuel injection included angle, injector hole number, SOI, and injection duration. A simultaneous optimization technique for the whole range of engine speeds would be suggested for further studies.

• 한국공작기계학회논문집
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• 제15권4호
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• pp.39-43
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• 2006

A computer-controlled micro tribotester has been developed to investigate the friction and wear characteristics of thin coatings, which can be applied to silicon-based materials. In the developed system, a step motor gives a reciprocating movement and an electromagnet applies a load between a ball and a plate specimen. Test results confirmed that the application of load in the range of $0.03{\sim}1.8N$ and with a sliding speed of $4.44{\sim}7.70mm/s$ was successfully accomplished. Advantages of the developed micro tribotester are: (1) realization of micro load and displacement applicable to micro electromechanical systems(MEMS) using DC motor and electromagnet (2) continuously variable load and reciprocating speed; and (3) high reliability, which allows for unattended use for long periods.

• 한국전기전자재료학회논문지
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• 제14권8호
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• pp.658-662
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• 2001

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.358-361
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• 1999

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD\`s and micro-heater on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO$_2$ layer The MgO layer improved adhesion of Pt thin-films to SiO$_2$` layer without any chemical reactions to Pt thin-films under high as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at N2 flow rate of 2000 sccm/min, heating power of 1.2W. The respons time was about 100 msec when input flow was step-input

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 추계학술대회논문집
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• pp.294-297
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• 2004

RTP(Rapid Thermal Pressing) is to fabricate desired pattern on polymer substrate by pressing patterned mold against the substrate heated around glass transition temperature. For a successful RTP process, the whole process including heating, molding, cooling and demolding should be conducted 'rapidly' as possible. As the RTP process is effective in replicating patterns on flat large surface without causing shape distortion after cooling, it is being widely used for fabricating various micro/bio application components, especially with channel-type microstructures on surface. This investigation finally aims to develop a RTP process machine for mass-producing micro/bio application components. As a first step for that purpose, we intended to examine the technological difficulties for realizing mass production by RTP process. Therefore, in the current paper, 4 kinds of RTP machines were examined and then the RTP process was conducted experimentally for PMMA film by using one of the machines, HEX 03. The micro-patterned molds used for RTP experiment was fabricated from silicon wafer by semi-conduct process. The replicated micro patterns on PMMA films were examined using SEM and the causes of defect observed in the replicated patterns were discussed.

• 대한기계학회논문집B
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• 제32권3호
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• pp.231-234
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• 2008

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

• 한국공작기계학회논문집
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• 제18권1호
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• pp.36-41
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• 2009

This paper presents the development of a micro punching system with modified cymbal mechanism. To realize the micro punching, we introduced the hybrid system with a macro moving part and micro punching part. The macro moving part consists of a ball screw, a linear guide and the micro step motor and micro punching part includes the PZT actuators and displacement amplification device with modified cymbal mechanism. The PZT actuator is capable of producing very large force, but they provide only limited displacements which are several micro meters. Thus the displacement amplification device is necessary to make those actuators more efficient and useful. For this purpose, a cymbal mechanism in series is proposed. The finite element method was used to design the cymbal mechanism and to analyze the mode shape of the one. The displacement and mode shape error between the FEM results and experiments are within 10%. A considerable design effort has been focused on optimizing the flexure hinge to increase the output displacement and punching force.