• Steel and Composite Structures
• /
• 제18권6호
• /
• pp.1541-1555
• /
• 2015

In this paper mechanical behavior of the functional gradient materials (FGM) micro-gripper under thermal load and DC voltage is numerically investigated taking into account the effect of intermolecular forces. In contrary to the similar previous works, which have been conducted for homogenous material, here, the FGM material has been implemented. It is assumed that the FGM micro-gripper is made of metal and ceramic and that material properties are changed continuously along the beam thickness according to a given function. The nonlinear governing equations of the static and dynamic deflection of microbeams have been derived using the coupled stress theory. The equations have been solved using the Galerkin based step-by-step linearization method (SSLM). The solution procedure has been evaluated against available data of literature showing good agreement. A parametric study has been conducted, focusing on the combined effects of important parameters included DC voltage, temperature variation, geometrical dimensions and ceramic volume concentration on the dynamic response and stability of the FGM micro-gripper.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.26-29
• /
• 2003

UV laser micromachining are generally used to create microstructures for micro product through a sequence of lithography-based photopatterning steps. However, the micromachining process is not suitable for the rapid realization of complex microscale 3D product because it depends on worker experiences, excessive cost and time to make many masks. In this paper, the more effective micro rapid manufacturing process, which is developed upon the base of laser micromachining. is proposed to fabricate micro products directly using UV laser ablation and phase change filling. The filling process is useful to hold the micro product during the next ablation step. The proposed micro rapid manufacturing process is also proven experimentally that enables to fabricate the 3D microscale products of UV sensitive polymer from 3D CAD data to functional micro parts.

• Bulletin of the Korean Chemical Society
• /
• 제18권9호
• /
• pp.929-933
• /
• 1997

Morphological studies in the micro-end-to-end (m-E-E) and micro-side-by-side (m-S-S) aggregations were conducted by using of scanning electron microscope (SEM) for the samples precipitated by heating of the end-products of the transition of FormⅡ (left-handed helix, three peptides per turn, 31) Form Ⅰ (right-handed helix, 3.3 peptides per turn, 103) in poly(L-proline) (PLP) in acetic acid(water)-propanol (1:9 v/v) solvent. The observed morphology for the solide state shows a rope (or super helical) type and pebbles type aggregate for the (m-E-E) and (m-S-S) aggregate respectively. The viscosities were also measured during the heat-precipitation in order to elucidate the process of formation of the rope- and pebbles-type aggregates. The result for the (m-E-E) aggregations exhibit two steps, i.e., at first, the viscosity increases with time (step 1), thereafter it decrease until attain the last value (step 2). But the (m-S-S) aggregations show only one step in the decreases in viscosity. On the bases of all experimental results it is possible to propose a reasonable mechanism for the formation of the two types of aggregates of the (m-E-E) and (m-S-S).

• 한국정밀공학회지
• /
• 제23권1호
• /
• pp.201-208
• /
• 2006

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step-by-step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• 한국정밀공학회지
• /
• 제17권3호
• /
• pp.158-164
• /
• 2000

In recent year, desire and request fer micro automation are growing rapidly covering the whole range of the industry. This has been caused mainly by request of more accurate manufacturing process due to a higher density of integrated circuits in semiconductor industry. This paper presents a six d.o.f fine motion stage using magnetic levitation technique, which is one of actuating techniques that have the potential for achieving such a micro motion. There is no limit in motion resolution theoretically that the magnetically levitated part over a fixed stator can realize. In addition, it Is possible to manipulate the position and the force of the moving part at the same time. Then, the magnetic levitation technique is chosen into the actuating method. However, we discuss issues of design, kinematics, dynamics, and control of the proposed system. And a few experimental results fur step input are given.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
• /
• pp.376-377
• /
• 2006

Chemical Mechanical Planarization (CMP) has emerged as an enabling technology for the manufacturing of multi-level metal interconnects used in high-density Integrated Circuits (IC). Recently, multi-level structures have been also widely used m the MEMS device such as micro engines, pressure sensors, micromechanical fluid pumps, micro mirrors and micro lenses. Especially, among the thin films available in IC technologies, polysilicon has probably found the widest range of uses in silicon technology based MEMS. This paper presents the characteristic of polysilicon CMP for multi-level MEMS structures. Two-step CMP process verifies that is possible to decrease dishing amount with two type of slurries characteristics. This approach is attractive because two-step CMP process can be decreased dishing amount considerably more then just one CMP process.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2005년도 춘계학술대회 논문집
• /
• pp.446-452
• /
• 2005

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step by step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes a voltage control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 추계학술대회 논문집
• /
• pp.543-550
• /
• 2005

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step by step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• 센서학회지
• /
• 제32권4호
• /
• pp.252-256
• /
• 2023

A one-step method for nanoscale patterning of silver ionic ink on a substrate is developed using a microscale, elastic mold deformation. This method yields unique micro/nanoscale metallic structures that differ from those produced using the original molds. The linewidth of these metallic structures is significantly reduced (approximately 10 times) through the sidewall deformation of the original mold cavity on a thin liquid film, as verified by finite element analysis. The process facilitates the fabrication of various, isolated and complex micro/nanoscale metallic structures with negligible residual layers at low cost and high throughput. These structures can be utilized for various applications, including optoelectronics, wearable sensors, and metaverse-related devices. Our approach offers a promising tool for manipulation and fabrication of micro/nanoscale structures of various functional materials.

• Restorative Dentistry and Endodontics
• /
• 제39권1호
• /
• pp.24-31
• /
• 2014

Objectives: The purpose of present study was to evaluate the internal adaptation of composite restorations using different adhesive systems. Materials and Methods: Typical class I cavities were prepared in 32 human third molars. The teeth were divided into the following four groups: 3-step etch-and-rinse, 2-step etch-and-rinse, 2-step self-etch and 1-step self-etch system were used. After the dentin adhesives were applied, composite resins were filled and light-cured in two layers. Then, silver nitrate solution was infiltrated, and all of the samples were scanned by micro-CT before and after thermo-mechanical load cycling. For each image, the length to which silver nitrate infiltrated, as a percentage of the whole pulpal floor length, was calculated (%SP). To evaluate the internal adaptation using conventional method, the samples were cut into 3 pieces by two sectioning at an interval of 1 mm in the middle of the cavity and they were dyed with Rhodamine-B. The cross sections of the specimens were examined by stereomicroscope. The lengths of the parts where actual leakage was shown were measured and calculated as a percentage of real leakage (%RP). The values for %SP and %RP were compared. Results: After thermo-mechanical loading, all specimens showed significantly increased %SP compared to before thermo-mechanical loading and 1-step self-etch system had the highest %SP (p < 0.05). There was a tendency for %SP and %RP to show similar microleakage percentage depending on its sectioning. Conclusions: After thermo-mechanical load cycling, there were differences in internal adaptation among the groups using different adhesive systems.