Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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One-Step Nanoscale Patterning of Silver Ionic Ink via Elastic Mold Deformation

탄성 몰드 변형을 이용한 은 이온 잉크의 원-스텝 나노스케일 패터닝

  • Yong Suk Oh (Department of Mechanical Engineering, Changwon National University)
  • 오용석 (창원대학교 기계공학부)
  • Received : 2023.07.25
  • Accepted : 2023.07.31
  • Published : 2023.07.31
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Abstract

A one-step method for nanoscale patterning of silver ionic ink on a substrate is developed using a microscale, elastic mold deformation. This method yields unique micro/nanoscale metallic structures that differ from those produced using the original molds. The linewidth of these metallic structures is significantly reduced (approximately 10 times) through the sidewall deformation of the original mold cavity on a thin liquid film, as verified by finite element analysis. The process facilitates the fabrication of various, isolated and complex micro/nanoscale metallic structures with negligible residual layers at low cost and high throughput. These structures can be utilized for various applications, including optoelectronics, wearable sensors, and metaverse-related devices. Our approach offers a promising tool for manipulation and fabrication of micro/nanoscale structures of various functional materials.

Keywords

Acknowledgement

이 논문은 2021~2022년도 창원대학교 자율연구과제 연구비 지원으로 수행된 연구결과임.

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