• 한국기계가공학회지
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• 제20권4호
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• pp.106-112
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• 2021

Thermoplastic microfluidic devices are used in BioMEMS for medical and biotechnology applications, such as gene extraction, DNA analysis, and virus detection. In this research, a simple fabrication protocol with a commercially available pneumatic hot press is proposed and demonstrated for polycarbonate microfluidic devices. Microfluidic channels with a width of 200 ㎛ and a height of 10 ㎛ were designed and machined onto a brass plate as a mold insert using a CNC milling machine. The resulting microfluidic channels on the mold insert were assessed and found to have an actual width of 198 ㎛ and a height of 10 ± 0.25 ㎛. The microfluidic channels were replicated on a polycarbonate sheet using the proposed replication technique at 146℃ for 20 minutes under a constant load of 2400 kgf. The devices were then naturally cooled to 100℃ while maintaining the same pressure. It was found that the microchannels were successfully replicated in the polycarbonate, with a width of 198 ㎛ and a height of 10.07 ㎛. The proposed replication technique thus offers the rapid mass production of high-quality microfluidic devices at a low cost with a process that, unlike conventional photolithography systems, does not require expensive equipment.

• International Journal of Precision Engineering and Manufacturing
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• 제8권3호
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• pp.24-44
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• 2007

Cylindrical grinding is one of the important metal cutting processes used extensively in the finishing operation of discrete components. The inherent high cutting temperature in grinding if not controlled may lead to rapid tool wear, which in turn will lead to dimensional inaccuracy. The very nature of the grinding mechanism in material removal impairs the grounded surfaces by inducing residual stress, micro cracks and other thermal damages at the machined surface. This paper is an attempt to review some of the surface integrity issues in cylindrical grinding taken up and reported by number of researchers over the years. This review may have been planned to be useful to the researchers and other professionals interested to work on grinding.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1214-1218
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• 2005

As demands for precision parts are increased, existing methods to fabricate them such as MEMS, LIGA technology have the technical limitations like high precision, high functionality and ultra miniaturization. A micro-stereolithography technology based on $DMD^{TM}$(Digital Micromirror Device) can meet these demands. In this technology, STL file is the standard format as the same of conventional rapid prototyping system, and 3D part is fabricated by stacking layers that are sliced as 2D section from STL file. Whereas in conventional method, the resin surface is cured as scanning laser beam spot according to the section shape, but in this research, we use integral process which enables to cure the resin surface at one time. In this paper, we deal with the dynamic pattern generation and $DMD^{TM}$ operation to fabricate micro structures. Firstly, we address effective slicing method of STL file, conversion to bitmap, and dynamic pattern generation. Secondly, we suggest $DMD^{TM}$ operation and optimal support manufacturing for $DMD^{TM}$ mounting. Thirdly, we examine the problems on continuous stacking layers, and their improvements in software aspects.

• 한국산학기술학회논문지
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• 제7권5호
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• pp.811-816
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• 2006

이방성 자기저항효과(anisotropic magnetoresistance : AMR)는 단층 자성박막으로 구성되므로 경제성 있게 박막화 시켜서 소형화가 가능하다. 기존의 급속응고법으로 생산된 리본형 MCo(M=Cu, Ag) 소자가 경제적으로 공업적 목적을 달성하였으나, 리본형 특유의 두께와 가공성이 부족하여 소형 소자에 함께 집적하기 곤란한 단점이 있었다. 새로운 박막형을 쓰면 추가 열처리 없이 기존의 리본형 소자와 비교하여 박막상태로 적절한 AMR 특성이 나오는지와 최적 AMR을 얻기 위한 Co의 조성을 아는 것이 중요하다. 열증착기를 써서 100nm의 $Cu_{1-x}Co_x$와 $Ag_{1-x}$ 박막을 Co의 조성을 $10{\sim}70wt%$로 달리하며 제작하여 이때의 자기적 특성을 확인하였다. CuCo는 40% Co에 0.5T에서 1.4%, AgCo는 30% Co에 2.6%의 MR비를 얻었고 이는 리본형 소자보다는 표면 산란 효과에 의해 MR비는 작지만 표면산화막 없이 직접 다른 소자공정과 함께 진행할 수 있는 장점이 있음을 확인하였다.

• Tribology and Lubricants
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• 제35권5호
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• 대한기계학회논문집A
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• 제33권10호
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• pp.1045-1053
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• 2009

Precision stages for 6-DOF positioning, actuated by PZT stacks, which are fed back by gap sensors and guided by flexure hinges, have enlarged their application territory in micro/nano manufacturing and measurement area. The precision stages inherently have such limitations as the nonlinearity between input and output in piezoelectric stacks, feedback signal noise in precision capacitive gap sensors and low material damping in precision kinematic linkages of mechanical flexures. To surmount these limitations, the precision stage is modeled with physics-based variables, which are identified by transient response correspondence, and a gain margin calculation algorithm using the Prandtl-Ishlinskii model and describing function is newly developed to assess system performance more precisely than linear controller design schemes. Based on such analyses, a precision positioning controller is designed. Excellent positioning accuracy with rapid settlement accomplished by the controller is shown in step responses of the closed-loop system.

• Design & Manufacturing
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• 제1권1호
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• pp.27-32
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• 2007

In the optical application demand for high quality lens is increasing. Plastics lenses are demanded more than glass lenses for large size lenses as well as micro-size lenses. It is difficult to apply typical straight cooling channels of injection mold to lens molding due to its non-uniform temperature distribution. In this study, we manufactured molds for plastic lenses with the conventional cooling channels and conformal cooling channels produced by the DMLS process. We evaluated cooling performance for the 2 molds by injection molding experiment. Also, uniformity of the temperature distribution was tested by infrared camera and temperature monitoring. We confirmed that the cooling performance and temperature uniformity with the conformal cooling channels is much improved from the ones with the conventional. The cooling time with the conformal cooling channels was reduced 30% compared with the conventional cooling channels.

• Nuclear Engineering and Technology
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• 제52권11호
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• pp.2613-2619
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• 2020

This work investigated the gamma-ray shielding performance, and the physical and mechanical properties of poly (methyl methacrylate) (PMMA) composites embedded with 0-44.0 wt% bismuth trioxide (Bi₂O₃) fabricated by the fast ultraviolet (UV) curing method. The results showed that the addition of Bi₂O₃ had significantly improved the gamma shielding ability of PMMA composites. Mass attenuation coefficient and half-value layer were examined using five gamma sources (Cs-137, Ba-133, Cd-109, Co-57, and Co-60). The high loading of Bi₂O₃ in the PMMA samples improved the micro-hardness to nearly seven times that of the pure PMMA. With these enhancements, it was demonstrated that PMMA/Bi₂O₃ composites are promising gamma shielding materials. Furthermore, the fast UV curing exerts its great potential in significantly shortening the production cycle of shielding material to enable rapid manufacturing.

• 소성∙가공
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• 제25권6호
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• pp.353-358
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• 2016

Direct energy deposition (DED) is an additive manufacturing technique that involves the melting of metal powder with a high-powered laser beam and is used to build a variety of components. In recent year, it can be widely used in order to produce hard, wear resistant and/or corrosion resistant surface layers of metallic mechanical parts, such as dies and molds. For the purpose of the hardfacing to achieve high wear resistance and hardness, application of high speed steel (HSS) can be expected to improve the tool life. During the DED process using the high-carbon steel, however, defects (delamination or cracking) can be induced by rapid solidification of the molten powder. Thus, substrate preheating is generally adopted to reduce the deposition defect. While the substrate preheating ensures defect-free deposition, it is important to select the optimal preheating temperature since it also affects the microstructure evolution and mechanical properties. In this study, AISI M4 powder was deposited on the AISI 1045 substrate preheated at different temperatures (room temperature to $500^{\circ}C$). In addition, the micro-hardness distribution, cooling rates, and microstructures of the deposited layers were investigated in order to observe the influence of the substrate preheating on the mechanical and metallurgical properties.

• 한국전기전자재료학회논문지
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• 제34권6호
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• pp.401-415
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• 2021

Soft robots are promising devices for applications in drug delivery, sensing, and manufacturing. Traditional hard robotics are manufactured with rigid materials and their degrees of motion are constrained by the orientation of the joints. In contrast to rigid counterpart, soft robotics, employing soft and stretchable materials that easily deforms in shape, can realize complex motions (i.e., locomotion, swimming, and grappling) with a simple structure, and easily adapt to dynamic environment. Among them, the magnetic actuators exhibit unique characteristics such as rapid and accurate motion control, biocompatibility, and facile remote controllability, which make them promising candidates for the next-generation soft robots. Especially, the magnetic actuators instantly response to the stimuli, and show no-hysteresis during the recovery process, essential for continuous motion control. Here, we present the state-of-the-art fabrication process of magnetically controllable nano-/micro-composites, magnetically aligning process of the composites, and 1-dimensional/multi-dimensional multimodal motion control for the nextgeneration soft actuators.