• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1273-1279
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• 2013

We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11a
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• pp.371-375
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• 2001

The concept of a new linear motor that uses piezo-stack actuator is demonstrated. The working principle is far different from the conventional inchworm motor. This motor is based on the self-moving cell concept. The linear motor has three cells and each cell is constructed with one piezo-stack actuator and a shell structure. A cell train is constructed by connecting these cells and the cell train is fitted into a guide way with a proper interference. The cell train moves along the guide way, by activating each cell in succession. The moving motion of the motor is tested. Since this linear motor uses piezo-stack actuator with unified clamping cell, it can produce fast speed, high resolution and large push force.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1508-1511
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• 1996

In the fields of the optics, precise machine, semiconducting processing, the micro-positioning actuators are required for the control of position in submicron range. In this study, dielectric properties of 0.5PNN-(0.5-x)PZN-xPZT system ceramics with different PZT mole ratio were investigated. As the amount of PZT incerases, curie temperature was increased. The maximum of dielectric and piezoelectric constant was shown at 0.3 mole ratio of PZT amount. As a results, we have found that the structrue of ceramics with PZT 0.3 mole was morphotropic phase boundary.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.6
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• pp.52-60
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• 2005

Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been developed. However, previous designs are difficult to satisfy the functional requirements of the system due to difficulty in modeling and optimization process applying fur the independent axiomatic design. Therefore, this paper suggests a new design and design procedure based on semi-coupled, axiomatic design. A spatial 3-DOF parallel type micro mechanism is chosen aa an exemplary device. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimum design is conducted. To check the effectiveness of the optimal parameters obtained by theoretical approach, simulation has been performed by FEM.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.6
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• pp.7-16
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• 2010

Physical fundamentals of ultrashort femtosecond lasers are addressed along with emerging applications for precision manufacturing and metrology. Femtosecond lasers emit short pulses whose temporal width is in the range of less than a picosecond to a few femtoseconds, thereby enabling extremely high peak-power machining with less thermal damages. Besides, the broad spectral bandwidth of femtosecond lasers constructed in the form of frequency comb permits absolute distance measurements leading to ultraprecision positioning control and dimensional metrology.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.10
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• pp.1025-1031
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• 2007

GPS is widely used for positioning applications and attitude of a vehicle can be found also with multiple antennas. However, extremely weak signal level prevents GPS from indoor operation. DR with accelerometers and gyros and landmark based localization method used for indoor applications increase complexity and cost. In this paper, a simple but very efficient ultrasound based attitude determination system which determines both position and attitude in WSN is given. The range between transmitter and receivers are measured using the arrival time difference between ultrasound and RF signal. The 3 dimensional positions can be found using more than 3 range measurements. Furthermore, if more than 2 transmitters are used, the attitude can be determined using the baseline vectors obtained by differencing transmitter and receiver positions. The prototype system is implemented to evaluate the performance of the proposed method. In addition, an error analysis shows the relation between the attitude error and basel me length, quality of measurement and orientation of a vehicle. The static and dynamic experiments performed by micro mobile robot shows accurate position with less than 1.5cm error and attitude with less than 1 degree error can be obtained continuously with 20cm baseline. It is expected that these results can be adapted without modification to indoor applications such as home cleaning robot and autonomous wheelchair maneuvering.

• Journal of Advanced Navigation Technology
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• v.21 no.3
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• pp.251-257
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• 2017

Recently, hybrid positioning system combining GPS, vision sensor, and inertial sensor has drawn many attentions to estimate accurate vehicle positions. Since accurate multi-sensor fusion requires efficient time synchronization, this paper proposes an efficient method to obtain time synchronized measurements of vision sensor, inertial sensor, and OBD device based on GPS time information. In the proposed method, the time and position information is obtained by the GPS receiver, the attitude information is obtained by the inertial sensor, and the speed information is obtained by the OBD device. The obtained time, position, speed, and attitude information is converted to the color information. The color information is inserted to several corner pixels of the corresponding image frame. An experiment was performed with real measurements to evaluate the feasibility of the proposed method.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1303-1312
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• 2013

We report an ultra-precision lathe designed to machine micron-scale features on a large-area roll mold. The lathe can machine rolls up to 600 mm in diameter and 2,500 mm in length. All axes use hydrostatic oil bearings to exploit the high-precision, stiffness, and damping characteristics. The headstock spindle and rotary tooling table are driven by frameless direct drive motors, while coreless linear motors are used for the two linear axes. Finite element method modeling reveals that the effects of structural deformation on the machining accuracy are less than $1{\mu}m$. The results of thermal testing show that the maximum temperature rise at the spindle outer surface is approximately $0.5^{\circ}C$. Finally, performance evaluations of the error motion, micro-positioning capability, and fine-pitch machining demonstrate that the lathe is capable of producing optical-quality surfaces with micron-scale patterns with feature sizes as small as $20{\mu}m$ on a large-area roll mold.

• Fire Science and Engineering
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• v.29 no.6
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• pp.98-108
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• 2015

An integrated command system is critical for the safety of firefighters and effective work in the headquarters of a special disaster areas such as natural disaster or large man-made hazard. The integrated command system requires environmental information such as temperature, humidity, and $CO_2$ levels, as well as personal physical information such as pulse and air respirator levels. An Analog to Digital Converter (ADC) chip converts sensed information into digital signals, and a Micro Controller Unit (MCU) transmits the digital signals to a transmission board using serial communication through a Serial Peripheral Interface (SPI). The digital signals are saved in a transmission board and transmitted to the integrated command system by a Radio Frequency (RF) unit. The location of fire-fighters in a building are determined using a gyro sensor and an inertial sensor. The collected information is applied to the integrated command system for firefighter safety and to ensure that they can effectively carry out their duties. Tthis study theoretically and experimentally investigated the technologies of RF transmission, indoor position, and an integrated command system that supports decision making using the transmitted information.