• 한국정밀공학회지
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• 제28권2호
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• pp.245-250
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• 2011

A high-resolution shadow mask, a nanostencil, is widely used for high resolution lithography. This high-resolution shadowmask is often fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. In this study, FIB milling on 500-nm-thin SiN membrane was tested and characterized. 500 nm thick and $2{\times}2$ mm large membranes were made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 60 nm could be made into the membrane. The nanostencil could be used for nanoscale patterning by local deposition through the apertures.

• Advances in Computational Design
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• 제5권1호
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• pp.13-34
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• 2020

As small size and complex metal machining components demand increases, cutting processes in microscale become necessary. Ball-end milling is a commonly used finishing process, which nowadays can be applied in the microscale size. Surface quality and dimensional accuracy are two basic parameters that affect small size components in their assembly and functionality. Thus, good quality can be achieved by optimizing the cutting conditions of the procedure. This study presents a 3D simulation model of ball-end milling in microscale developed in a commercial CAD software and its optical and computing results. These carried out results are resumed to surface topomorphy, surface roughness, chip geometry and cutting forces calculations that arising during the cutting process. A great number of simulations were performed in a milling machine centre, applying the discretized kinematics of the procedure and the final results were compared with measurements of Al7075-T651 experiments.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.375-376
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• 2006

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.437-438
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.283-284
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• 2007

• 한국분말재료학회지
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• 제10권6호
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• pp.415-421
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• 2003

The study for producing the flake powders by milling of aluminum foil and gas atomized powders was carried out. The effects of lifter bars on the ball motions and milling of aluminum foils were also investigated. The aluminum foils were laminated each other, elongated, fragmented into small foils and finally formed into the flake powders during the dry ball-milling. The spherical atomized-powders were milled to coarse flake powders with high aspect ratio and then changed to fine flake powders with lower aspect ratio. Even though long times were required for making flake powders by milling of foils, the water covering areas of them were higher than those of powders milled using gas-atomized powders, suggesting aluminum foils were more plastically deformed by micro-forging. On the other hand, as the number of lifter bars increased, the necessary rotation speeds of milling jar for cascading mode and cataracting mode decreased drastically. It was possible to achieve same quality of milled flake powder by using the lifter bars under the lower milling speeds. The painting test showed that the appearance of painted surface was good and optimum content range of aluminum paste in car paint to maximize the degree of gloss was 3-5%.

• 대한기계학회논문집A
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• 제34권10호
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• pp.1493-1498
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• 2010

본 논문에서는 압축냉각공기, MQL 및 $MoS_2$ 나노유체 MQL 을 적용한 메소스케일 밀링의 가공 특성에 관한 실험적 연구를 수행하였다. 마이크로/메소 밀링 가공 실험 수행을 위하여 BLDC 스핀들과 DC 모터슬라이드를 장착한 데스크톱 크기의 3 자유도 메소 스케일 기계가공 시스템을 구현하였고, 가공 시편의 표면거칠기 측정 및 분석을 통해 가공성능 평가를 수행하였다. 실험을 통해 압축냉각공기, MQL 및 $MoS_2$ 나노유체 MQL 을 사용한 경우 건식가공에 비하여 표면거칠기가 향상되는 것을 발견하였으며 특히 $MoS_2$ 나노유체 MQL 과 압축냉각공기를 동시에 적용하였을 경우의 가공 표면거칠기가 가장 우수함을 확인하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.904-909
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• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. In these user interfaces the concepts of Design for Manufacturing (DFM) was implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.170-173
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• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. For the user interfaces, the concepts of Design for Manufacturing (DFM) were implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• 한국정밀공학회지
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• 제23권3호
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• pp.56-60
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• 2006

A high-resolution shadow mask, or called a nanostencil was fabricated for high resolution lithography. This high-resolution shadowmask was fabricated by a combination or MEMS processes and focused ion beam (FIB) milling. 500 nm thick and $2{\times}2mm$ large membranes wore made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 70 nm could be made into the membrane. By local deposition through the apertures of nanostencil, nanoscale patterns down to 70 nm could be achieved.