• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.183-187
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• 2008

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.

• Journal of the Korean Solar Energy Society
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• v.34 no.5
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• pp.23-31
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• 2014

This study was accomplished to get the foundation design data of VMD(Vacuum Membrane Distillation) system for Solar Thermal VMD plant. VMD experiment was designed to evaluate thermal performance of VMD using PVDF(polyvinylidene fluoride) hollow fiber hydrophobic membranes. The total membrane surface area in a VMD module is $5.3m^2$. Experimental equipments to evaluate VMD system consists of various parts such as VMD module, heat exchanger, heater, storage tank, pump, flow meter, micro filter. The experimental conditions to evaluate VMD module were salt concentration, temperature, flow rate of feed sea water. Salt concentration of feed water were used by aqueous NaCl solutions of 25g/l, 35g/l and 45g/l concentration. As a result, increase in permeate flux of VMD module is due to the increasing feed water temperature and feed water flow rate. Also, decrease in permeate flux of VMD module is due to increasing salinity of feed water. VMD module required about 590 kWh/day of heating energy to produce $1m^3/day$ of fresh water.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.116.1-116.1
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• 2016

반도체 가스센서에서는 가연성 및 탄화수소계 가스를 감지 하기 위해서 $100{\sim}500^{\circ}C$ 이상의 동작온도를 필요로 한며, 이에 따라 반도체식 가스센서의 마이크로 히터 소재는 고온에서 열적 안정성이 있는 소재가 요구된다. 현재 상용화되고 있는 반도체식 가스센서는 실리콘(Silicon) 기반의 MEMS 기술을 이용한 가스센서이며, 구조적으로나 성능적 한계가 드러남에 따라 실리콘 이외의 다양한 재료의 MEMS 응용기술 개발이 필요한 실정이다. 본 연구에서는 이러한 실리콘의 재료적 한계를 극복하기 위해 다공성 알루미늄 산화물(AAO)을 기판으로 사용하여 마이크로 히터를 제작하였다. AAO의 제작에 앞서 CMP, 화학연마, 전해연마를 이용하여 적합한 전처리 공정을 선정하였고, AAO 제작 시 온도, 시간, 전압의 변수를 주어 마이크로 히터 기판에 적합한 공정을 탐색하였다. 마이크로 플랫폼은 MEMS 공정으로 제작되었으며, PR(Photo Resist)을 LPR(Liquid Photo Resist)과 DFR(Dry Film Resist)로 각각 2종 씩 선택하여 AAO에 적합한 제품을 선정하였다. 제작된 마이크로 히터는 $1.8mm{\times}1,8mm$로 소형화 하였고, 열손실의 제어를 위해 열확산 방지층을 추가하였다. 구동 온도, 소비전력, 장시간 구동시 안정성의 측정 및 평가는 적외선 열화상 카메라와 kiethly 2420 source meter를 이용하여 측정하였으며, 열확산 방지층의 유 무에 따른 온도 분포 및 소비전력을 비교평가 하였다. 최종적으로는 현재 사용화 되어있는 가스센서들의 소비전력과 비교 평가 하여 논의 하였다.

• Journal of Sensor Science and Technology
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• v.19 no.6
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• pp.462-468
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• 2010

A low power gas sensor with microheater was fabricated by MEMS technology. In order to heat up the gas sensing material to a operating temperature, a platinum(Pt) micro heater was built on to the micromachined Si substrate. The width and gap of microheater were $20\;{\mu}m$ and $4.5\;{\mu}m$, respectively. ZnO nanowhisker arrays were fabricated on a sensor device by hydrothermal method. The sensor device was deposited with ZnO seeds using PLD systems. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growthing ZnO nanowhiskers. The power consumption to heat up the gas sensor to a operating temperature was measured and temperature distribution of sensor was analyzed by a Infrared Thermal Camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high(64 %) sensitivity was obtained even at as low as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$ and was only 25 mW at $150^{\circ}C$.

• Journal of Sensor Science and Technology
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• v.17 no.5
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• pp.329-337
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• 2008

Simple, small and portable oxygen sensors were fabricated by tape casting technique. Yttria stabilized zirconia containing cordierite ceramics (YSZC) were used as a porous diffused layer of oxygen in pumping cell. Yttria stabilized zirconia (YSZ) solid electrolyte, YSZC porous diffusion layer and heater-patterned ceramic sheets were prepared by co- firing method. Limit current characteristics and the linear relationship of current to oxygen concentration were observed. Viscosity variation of the slurries both YSZ and YSZC showed a similar behavior, but micro pores in the fired sheet were increased with increasing of the cordierite amount. Molecular diffusion was dominated due to the formation of large pores in porous diffusion layer. The plateau range of limit current in porous-type oxygen sensor was narrow than the one of aperture-type oxygen sensor. However limit current curve was appeared in porous-type oxygen sensor even at the lower applied voltage. The plateau range of limit-current was widen as increasing the thickness of porous diffusion layer of the YSZ containing cordierite. Measuring temperature of $600{\sim}650^{\circ}C$ was recommended for limit-current oxygen sensor. Porous diffusion layer-type oxygen sensor showed faster response than the aperture-type one and was stable up to 30 days running without any crack at interface between the layers.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.20 no.5
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• pp.357-363
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• 2008

In order to investigate $CO_2$ heat transfer coefficient and pressure drop by PAG oil concentration during $CO_2$ evaporation, the experiment on evaporation heat transfer characteristics in a horizontal micro-fin tube was performed. The experimental apparatus consisted of a test section, a DC power supply, a heater, a chiller, a mass flow meter, a pump and a measurement system. Experiment was conducted for various mass fluxes($400{\sim}1200\;kg/m^2s$), heat fluxes($10{\sim}30\;kW/m^2$) and saturation temperatures ($-5{\sim}5^{\circ}C$), and PAG oil concentration($0{\sim}5\;wt%$). The variation of the heat transfer coefficient was different in accordance with the oil concentration. With the increase of the oil concentration, the evaporation heat transfer coefficient decreased and the delay of dryout by oil addition was found. Pressure drop increased with the increase of the oil concentration and heat flux, and the decrease of saturation temperature.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.10
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• pp.1-7
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• 2020

In this study, a multichannel gas-liquid microextraction system is designed by integrating the automatic elution of extraction line and multichannel gas-purging liquid phase microextraction. The system uses an injection pump and inert gas to push the extraction solvent to a sample bottle of a gas-phase color autosampler and then implements multichannel gas-liquid microextraction and gas chromatography-mass spectrometry. The system also employs a three-way integrated micro-high-temperature heater, syringe pump, and microflow controller to realize the simultaneous processing of multiple groups of samples, thus improving the sample pretreatment speed and reproducibility and reducing human error. Autoinjection experiments were implemented with polycyclic aromatic hydrocarbon standard samples. The experiments show that the average recovery rate of the system exceeds 70%, and the relative standard among the channels is less than 15%.

• Tribology and Lubricants
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• v.38 no.4
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• pp.121-127
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• 2022

This study presents the development of an integrated oil purification system consisting of moisture removal, oil flushing, and oil filtering devices. In this system, the oil flushing device is combined with a micro-bubble generator. Oil purification is necessary for ensuring the high performance of the lubricant through the efficient removal of contaminants and thus enables good maintenance of mechanical systems. The developed purification system removes moisture, varnish, and solid particles. Moreover, during oil purification, the oil flushing device separates foreign materials and contaminants remaining in the lubricating oil piping or mechanical systems. The microbubble generator, which is combined with the oil flushing device, can separate harmful contaminants, such as sludge, wear particles, and rust, from piping or lubrication systems through the cavitation effect. Moisture is removed using a double high-vacuum chamber, while sludge and varnish are removed via electro-absorption using a high-voltage generator. Additionally, the total maintenance cost of the system is reduced through the use of domestically fabricated cartridge filters composed of glass fiber and cellulose. The heater, which maintains the temperature of the lubricant at 60℃, can process 41,000 L of lubricant simultaneously. Multiple tests confirmed that the proposed integrated purification system exhibits good performance in oil flushing and removal of water and varnish.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.2
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• pp.1-5
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• 2003

In this project, the efficiency of localized heating for micro systems packaging is developed by using a forced potential scheme microheater. Less than 0.2 Mpa contact pressure was used for bonding with a 200 mA current input for $50{\mu}m$ width, $2{\mu}m$ height and $8mm{\times}8mm$, $5mm{\times}5mm$, $3mm{\times}3mm$ sized phosphorus-doped poly-silicon microheater. The temperature can be raised at the bonding region to $800^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3 minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional microheaters. For performing the gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for conducting a gross leak check. The pass ratio of bonded dies was 67%, for conventional localized heating, and 85% for our newly developed FP scheme. The bonding strength was more than 25Mpa for FP scheme packaging, which shows that FP scheme can be a good candidate for micro-scale hermetic packaging.

• Journal of Advanced Marine Engineering and Technology
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• v.36 no.8
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• pp.1097-1103
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• 2012

There are many fish farms being cultivated in the southwestern cost of South Korea. Because the farms cultivating use the basic method that inflow and circulate sea-water, slight negligence and bad design cause major negative impact on fish deaths. Also, the optimal temperature for each specie of fishes has already been proven to differ on each specie. Maintaining this environment, regardless of seasons, is very difficult and that requires research to develop. In this paper, basic characteristics of heat and mechanism of heat transfer are studied. Based on this, Open-end water vessel is designed and constructed using sandwich-insulation panels and simulated to store the heat in certain isolated space. This study confirmed that it is possible to keep constant temperature by this method, in large areas of water where it is insulated by heat insulator. and equipped with heater in Open-end water vessel where the other part is heated. The AC power controller maintains the constant temperature required and the temperature controller detects and displays the temperature by using the micro-processor.