• Journal of Advanced Marine Engineering and Technology
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• v.29 no.5
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• pp.482-487
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• 2005

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.603-607
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• 2002

Recently, the need leer transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to fabricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro- fabrication technique and microsystem packaging method described in this work.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1080-1083
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• 1997

Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.

• 한국정보디스플레이학회:학술대회논문집
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• 2000.01a
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• pp.219-220
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• 2000

We propose a new method for the formation of an aluminum parting layer in the fabrication of field emitter arrays, in which we used a reflow property of aluminum at a lower temperature than the deformation point of glass. After the sputtered aluminum layer on the gate metal was etched for the formation of gate holes, we carried out a rapid thermal annealing process, by which the aluminum slightly diffused into the gate hole. This reflowed aluminum could be used as a parting layer and emitter arrays were easily fabricated using this method.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3328-3330
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• 1999

In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.

• Biotechnology and Bioprocess Engineering:BBE
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• v.8 no.4
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• pp.213-220
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• 2003

Polymerase chain reaction (PCR) is one of the most widely used analytical tool and is an important module that would benefit from being miniaturized and integrated onto diagnostic or analytical chips. There are potentially two different approaches for the miniaturization of the PCR module: chamber-type and flow-type micro-PCR. These miniaturized PCRs have distinct characteristics and advantages. In this article, we review the necessity of micro-PCR, the materials for the chip fabrication, the surface modification, and characteristics of the two types of micro-PCR. The motivation underlying the development of micro-PCR, the advantages and disadvantages of the various materials used in fabrication and the surface modification methods will be discussed. And finally, the precise features of the two different types of micro-PCR will be compared.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.569-572
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• 2000

This paper presents the optimized fabrication and thermal characteristics of micro-heaters for thermal MEMS applications using a SDB SOI substrate. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10$\mu\textrm{m}$ thick silicon membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD(Resistance Thermometer Device)on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280$^{\circ}C$ at input Power 0.9 W; for the SOI membrane with 10 trenches, it is 580$^{\circ}C$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro thermal sensors and actuators.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.55-59
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• 2005

Micro injection molding analysis for microneedle fabrication was performed in the present study. The dimensions of width and thickness for microneedle are 600um, 500um, respectively. A delivery system based on guidelines for traditional injection molding was designed for four-cavities molding system. To investigate the effects of processing conditions in the mirconeedle fabrication, injection molding analysis using commercial code was performed. It was shown that the total injection time has a significant effect on the fabrication of microneedles.

• Macromolecular Research
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• v.12 no.5
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• pp.474-477
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• 2004

We present simple, low-cost methods for the fabrication of polymeric waveguides that have large core sizes for use as optical interconnects. We have used both hot embossing and micro-contact printing techniques for the fabrication of multimode waveguides using the same materials. Rectangular and large-core (60${\times}$60 $\mu\textrm{m}$$^2$) channels were readily prepared when using these methods. The dimensions of the embossed and printed channels were the same as those of the pattern on the original master. The polymeric waveguides that we fabricated with large core sizes exhibited a low propagation loss of 0.1 dB/cm at 850 nm, which indicates that hot embossing and micro-contact printing are suitable techniques for the fabrication of optical waveguides having large-core.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.12 s.189
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• pp.21-29
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• 2006