• International Journal of Aeronautical and Space Sciences
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• 제12권4호
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• pp.371-378
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• 2011

In this paper, the wavelet denoising techniques using thresholding method are applied to the low cost micro electromechanical system (MEMS)-global positioning system(GPS) integrated system. This was done to improve the navigation performance. The low cost MEMS signals can be distorted with conventional pre-filtering method such as low-pass filtering method. However, wavelet denoising techniques using thresholding method do not distort the rapidly-changing signals. They can reduce the signal noise. This paper verified the improvement of the navigation performance compared to the conventional pre-filtering by simulation and experiment.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.282-285
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• 2009

MEMS를 적용한 추진기관용 점화안전장치를 설계하고 제작하였다. MEMS는 일반적인 기계요소 설계 방식을 따라 설계하였다. 제작된 시료에 대한 검사 결과와 설계 데이터를 비교해 본 결과 스프링의 비선형 요소에 의한 영향과 가공오차 등으로 인하여 설계된 성능 값과 근사한 차이를 나타냈다. MEMS가 결합된 점화안전장치의 성능 시험을 실시함으로써 MEMS 적용 가능성을 입증하였다.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2001년도 추계 기술심포지움
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• pp.55-60
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• 2001

RF MEMS is an exciting emerging technology that has great potential to develop TOC (Transceiver-on-Chip). Applications of the RF MEMS to wireless communications systems are presented. The ability of the RF MEMS technology to enhance the performance and to reduce the size of passive components, in particular, switches, inductors, and tunable capacitors, is addressed. A number of potential wireless system opportunities for the TOC are awaiting the maturation of the RF MEMS technology.

• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.23-27
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• 2008

As a biofuel source, direct photosynthetic/metabolic biofuel cells (DPBFC) use cyanobacteria whose photosynthesis and metabolization reactions can convert light energy to electricity, In our previous work, we fabricated a prototype micro-DPBFC that could generate a peak current density of $36{\mu}A/cm^{2}$ and a maximum power density of $270nW/cm^{2}$. In this study, we improve on the previous results by using carbon micro electromechanical systems (C-MEMS), formed from the pyrolysis of patterned photoresist, to fabricate carbon electrodes of an arbitrary shape and controlled porosity to increase the surface area. With these new C-MEMS electrodes, the maximum power density of the micro-DPBFC was $516nW/cm^{2}$, a performance twice as good as the results of our previous work.

• 한국공작기계학회논문집
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• 제15권4호
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• pp.39-43
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• 2006

A computer-controlled micro tribotester has been developed to investigate the friction and wear characteristics of thin coatings, which can be applied to silicon-based materials. In the developed system, a step motor gives a reciprocating movement and an electromagnet applies a load between a ball and a plate specimen. Test results confirmed that the application of load in the range of $0.03{\sim}1.8N$ and with a sliding speed of $4.44{\sim}7.70mm/s$ was successfully accomplished. Advantages of the developed micro tribotester are: (1) realization of micro load and displacement applicable to micro electromechanical systems(MEMS) using DC motor and electromagnet (2) continuously variable load and reciprocating speed; and (3) high reliability, which allows for unattended use for long periods.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1556-1557
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• 2008

"Biomimetics" is the study and simulation of biological systems with desired properties. In recent times, biomimetic surfaces have emerged as novel solutions for tribological applications in micro-electromechanical systems (MEMS). These biomimetic surfaces are attractive for MEMS application as they exhibit low adhesion/friction and wear properties at small-scales. In this paper, we present some of the examples of biomimetic surfaces that have potential application in small-scale devices.

• 제어로봇시스템학회논문지
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• 제22권6호
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• pp.470-476
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• 2016

This paper proposes a practical algorithm for the reduction of measurement errors due to drift in a micro-electromechanical system (MEMS) gyros that are used for a mobile robot. Any drift in a MEMS gyro will cause an unbounded growth of errors in the estimation of heading, which makes it nearly useless in applications that require high accuracy over a long operating time. In proposed method, maneuvers of a cleaning robot are observed through encoders' measurement process and a decision to correct bias drift will be made if necessary. The method used in this paper is called the "heading estimation filter". To evaluate the accuracy of the proposed method, a comparison was made between the estimation of the heading of the cleaning robot and one from a motion capture system.

• Smart Structures and Systems
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• 제6권1호
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• pp.1-16
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• 2010

This paper presents a novel smart MEMS accelerometer which employs a hybrid control algorithm and an estimator. This scheme is realized by adding a sliding-mode controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value as well as adding an adaptive nonlinear observer to a conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

• Transactions on Electrical and Electronic Materials
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• 제17권3호
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• pp.129-133
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• 2016

Theoretical and graphical analysis of pull-in-voltage and figure of merit for a fixed-fixed capacitive Micro Electromechanical Systems (MEMS) switch is presented in this paper. MEMS switch consists of a thin electrode called bridge suspended over a central line and both ends of the bridge are fixed at the ground planes of a coplanar waveguide (CPW) structure. A thin layer of dielectric material is deposited between the bridge and centre conductor to avoid stiction and provide low impedance path between the electrodes. When an actuation voltage is applied between the electrodes, the metal bridge acquires pull in effect as it crosses one third of distance between them. In this study, we describe behavior of pull-in voltage and figure of merit (or capacitance ratio) of capacitive MEMS switch for five different dielectric materials. The effects of dielectric thicknesses are also considered to calculate the values of pull-in-voltage and capacitance ratio. This work shows that a reduced pull-in-voltage with increase in capacitance ratio can be achieved by using dielectric material of high dielectric constant above the central line of CPW.

• 소성∙가공
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• 제33권2호
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• pp.118-122
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• 2024

Micro-electromechanical systems (MEMS) based in-situ heating holders have been developed to enable high resolution imaging of heat treatment analysis. However, unlike the standard 3 mm metal disk specimens used in the furnace-based heating holder and general transmission electron microscopy holder, the MEMS-based in-situ heating holder requires thin specimens that can be penetrated by electrons to be transferred onto the MEMS chip. Previously, focused ion beam milling was used to transfer metal specimens, but it has the disadvantage of being expensive and the risk of specimen damage due to gallium ions. Therefore, in this study, we devised a method of transferring metallic materials by ultrasonic treatment using a transmission electron microscopy specimen made by electro jet polishing. A 3mm electropolished metal disk was placed in an appropriate solution, ultrasonicated, and then drop casted. The transfer of the specimen was successful, but it was confirmed that dislocations were formed inside the specimen due to ultrasonic treatment. This study provides a novel method for transferring metallic materials onto MEMS chips, which is cost-effective and less gallium ion damaging to the specimen. The results of this study can be used to improve the efficiency of heat treatment analysis using MEMS-based in-situ heating holders.