1 |
ADXL150/ADXL250 data sheet, Analog Devices.
|
2 |
ANSYS software, Version. 10.
|
3 |
Chowdhury, S., Ahmadi, M. and Miller, W.C. (2005), "Pull-In Voltage calculations for MEMS Sensors with Cantilevered Beams", The 3rd Int. IEEE-NEWCAS Conf., 143-146.
|
4 |
Edvards, C. and Spurgeon, S.K. (1998), Sliding Mode Control, TAYLOR & FRANCIS.
|
5 |
Kraft, M. (1997), Closed Loop Digital Accelerometer Employing Oversampling Conversion, Ph.D. thesis, Coventry University, School of Engineering, UK.
|
6 |
Krstic, M., Kanelleskapoulas, I. and Kokotovic, P. (1995), Nonlinear and Adaptive Control design, New York, John Wiley and Sons. Inc.
|
7 |
Lobontiu, N. and Garcia, E. (2005), Mechanics of Microelectromechanical Systems, Springer Science + Business Media, Inc.
|
8 |
Luo, H., Zhang, G., Carley, L.R. and Fedder, G.K. (2002), "A Post-CMOS Micromachined Lateral Accelerometer", J. Microelectromech. Syst., 11,188-195.
DOI
ScienceOn
|
9 |
Lyshvitz, S.E. and Lyshvitz, M.A. (2000), "Analysis, Dynamics, and Control of Micro-Electromechanical Systems", Proc. of American Control Conf., Chicago, 3091-3095.
|
10 |
Park, K., Pochiraju, K. and Varadan, V.K. (2002), "A hierarchical model for MEMS device performance simulation", SPIE Proc. Series, 4700,135-146.
|
11 |
Park, S. and Horowitz, R. (2003), "Adaptive Control for the Conventional Mode of Operation of MEMS Gyroscopes", J. Microelectromech. Syst., 12, 101-108.
DOI
ScienceOn
|
12 |
Slotine, J. and Jacques, E. (1991), Applied Nonlinear Control, Prentice-Hall.
|
13 |
Spooner, J.T., Maggiore, M., Ordonez, R. and Passino, K.M. (2002), Stable Adaptive Control and Estimation for Nonlinear Systems, New York, John Wiley and Sons. Inc.
|
14 |
System Planning Corporation (1994), Micro Electro Mechanical Systems (MEMS) an SPC market study.
|
15 |
Vishal, G. (2000), Approaches to Synthesis of a CMOS Accelerometer, M.S. thesis, Carnegie Mellon University.
|
16 |
Yazdi, N., Ayazi, F. and Najafi, K. (1998) "Micromachined Inertial Sensors", Proc. of the IEEE, 86, 1640-1659.
DOI
ScienceOn
|
17 |
Zhang, G. (1998), Design and Simulation of CMOS-MEMS accelerometer, Project Report, Carnegie Mellon University.
|
18 |
Zhu, G., Penet, J. and Saydy, L. (2006), "Robust Control of an Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties", Proc. of the 2006 American Control Conf., Minneapolis, 1233-1238.
|