• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• International Journal of Control, Automation, and Systems
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• v.2 no.2
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• pp.135-143
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• 2004

Recently, high throughput screening for microorganisms with desired characteristics from a large heterogeneous population has become possible. Single cell separation has taken on increasing significance in recent years, and several different methods have been proposed so far. In this paper, we introduce several cell manipulation methods aiming at single cell separation and investigation. At first, methods for the separation of microorganisms are classified. Then, we introduce two different approaches, that is, (1) indirect manipulation using laser trapped microtools and (2) thermal gelation.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.158-163
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• 2001

Operators suffer much difficulty in manipulating micro/nano-sized objects without the assistance of human interfaces, due to the scaling effects in micro/nano world. This paper presents a micro manipulation system based on the teleoperation techniques which enables the operators to manipulate the objects with ease by transferring both human motion and manipulation skill to a micromanipulator. An experimental setup consisting of a micromanipulator operated under stereo-microscope with the help of intelligent user interface provides a tool that can be used to visualize and manipulate micro-sized 3D objects in a controlled manner. The key features of a micro manipulation system and control strategies using teleoperation techniques for handling micro objects are presented. Experimental results demonstrate the feasibility of this system in precisely controlling trapping and manipulation of micro objects based on teleoperation techniques.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1501-1506
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• 2005

This paper presents the design of a multiple beam optical tweezers instrument used for manipulating micro/nano-sized components. The basic equations used in designing the optical tweezers are derived and the stable and time-sharing multiple beam optical tweezers are constructed with scanning mirrors. The laser beam passes through a series of optical components such as lenses, mirrors, and scanning mirrors, and overfills the entrance aperture of microscope objective, which gives a stable trap. By rotating the laser beam with the scanning mirror, the focal positions are translated in the specimen plane and multiple micro/nano-sized objects can be moved. The constructed optical tweezers is used to manipulate cells and liposomes simultaneously and to trap multiple nano-wires. The experiments prove that the developed optical tweezers can be a very versatile manipulation tool for studying gene therapy and nano device fabrication.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.12-19
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• 2003

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.168.2-168
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• 2001

Generally, operators suffer much difficulty in manipulating micro-nano-sized objects without assisting of human interface, due to the scaling effects in micro/nano world. Thus, the micromanipulation system based on the teleoperation techniques enables operators to manipulate the micro objects easily by transferring both human motion and manipulation skills to the micromanipulator. In teleoperated microassembly, it is necessary to provide a useful user interface for facilitating micro assembly task executed by human operators. In this paper, Intelligent User Interface (UI) for teleoperated microassembly is proposed. The proposed intelligent UI improves task performance by teleoperated micromanipulation as well as guides operators to succeed in desirable ...

• Proceedings of the KWS Conference
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• 2002.10a
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• pp.781-784
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• 2002

Adhesion phenomenon is more significant for smaller objects, because adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. For the purpose of microassembly, theoretical understanding is required for the Adhesion phenomenon. Authors have developed a force measurement system in an ultra-high vacuum chamber of Auger electron spectroscopy. The force between arbitrary combination of materials can be measured at a pressure less than 100 nPa after and before Ar ion sputtering and chemical analysis for several atomic layers of the surface. The results are successfully interpreted with a theory of contact mechanics. Since surface energy is quite important in the interpretation, electronic theory is used to evaluate the surface energy. In the manipulation of small objects, the adhesional force is always attractive. Repulsive force is essential for the manipulation. It can be generated by Coulomb interaction. The voltage required for detachment is theoretically analyzed and the effect of boundary conditions on the detachment is obtained. The possibility and limitations of micro-manipulation using both the adhesion phenomenon and Coulomb interaction are theoretically clarified. Its applicability to nano-technology is found to be expected.

• Nano
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• v.13 no.10
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• pp.1850112.1-1850112.6
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• 2018

Optical manipulation on microscale and nanoscale structures opens up new possibilities for assembly and control of microelectromechanical systems and nanoelectromechanical systems. Static optical force induces constant displacement while changing optical force stimulates vibration of a microcantilever/nanocantilever. The vibratory behavior of a single carbon nanocoil cantilever under optical actuation is investigated. A fitting formula to describe the laser-induced vibration characteristics is deduced based on a classical continuum model, by which the resonance frequency of the carbon nanocoil can be determined directly and accurately. This optically actuated vibration method could be widely used in stimulating quasi-1D micro/nanorod-like materials, and has potential applications in micro-/nano-opto-electromechanical systems.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.495-496
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• 2006

Electrostatically actuated nanoscale tweezers are fabricated on micro processed electrodes using FIB-CVD. Heavily doped electrode works as interconnection platform for controlling nanoscale devices. Short bent pillars are deposited to control the gap distance of main tweezers fabricated on bent ones. Two types of tweezers which have different gap distances are fabricated and tweezing motion was successfully demonstrated. The threshold voltages at snap-down of the pillars are dependent on the initial gap distance of the unactuated pillars, and the measured values were 93V for 3.6um and 30V for 2.2um. The dimension of nano tweezers and initial gap distances are controllable as demonstrated and we expect more complicated 3-dimensional shapes are also possible.

• Proceedings of the KWS Conference
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• 2005.06a
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• pp.367-369
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• 2005

For the purpose of the optimization or the break through of production processes, it is essential to understand or theoretically interpret dominant mechanisms of the processes, and further more, archive them. and utilize them combining some of them which are needed. Especially in the technology for micro- or nano-scaled objects, adhesion phenomenon is no more negligible, because the adhesion force is proportional to the size of objects meanwhile gravity force is proportional to the third power of it. Author has been working about the mechanisms for micro-assembly processes, which include joining processes and manipulation processes. In the present paper, the strategy and the progress to establish the micro-assembly technology archive are introduced. Some of the mechanisms are introduced with related basic approaches to the adhesion phenomena. Also it will be expressed that our data base project for the surface and interfacial energies is strongly related to these basic approaches.