• Title/Summary/Keyword: MgO thin films

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Fabrication and Characterization of Miniaturized HTS Microstrip Antennas Using "H"-type Resonator (H 형태 공진기를 이용한 소형화된 HTS 안테나의 제작 및 특성 해석)

  • 정동철;윤창훈;황종선;최창주
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.7
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    • pp.282-287
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    • 2003
  • ″H″ type resonator has the advantage for the miniaturization of high-T7 superconducting (HTS) microstrip antenna in comparison with the conventional microstrip antenna such as rectangular type or circular type. In this paper we designed miniaturized HTS antennas using this "H"-type resonator and reported the characteristics of our antennas including return loss, bandwidth, radiation patterns, efficiency and so on. To fabricate the "H" type antenna, HTS YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) thin films were deposited on MgO substrates using rf-magnetron sputtering. For comparison between normal conducting antennas and superconducting antennas, the gold antennas with the same dimension were also fabricated. An aperture coupling was used for impedance matching between 50 $\Omega$ feed line and HTS radiating patch. The ″H" type superconducting antenna showed the performance of 1.38 in SWR, 26 % in efficiency, and 13.8 dB in the return loss superior to the normal conducting counterpart.

Superconducting Bandpass Fitter Using Hairpin-type Microstrip Line with Narrow Bandwidth Centered at 14 GHz (14 GHz 헤어핀형 초전도 대역통과 필터)

  • Son, Seok-Cheon;Kim, Cheol-Su;Lee, Sang-Yeol;Yoon, Hyung-Kuk;Yoon, Young-Joong
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1852-1854
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    • 1999
  • In order to enhance satellite communication system performance, filters are required with the characteristics of sharp skirt, low insertion loss, and high power handling capability. But the performance of microwave passive filters is significantly declined by the conduction losses, especially in case of planar structures using film conductors. By using high temperature superconducting(HTS) film material as the conductor, higher performance could be expected. We have designed and developed narrow bandpass filters using haripin-type superconducting microstrip line for satellite communication. High quality superconducting YBCO thin films have been grown on MgO substrates by pulsed laser deposition(PLD) The deposited YBCO films were patterned by conventional wet-etching process. The transition temperatures of these films had shown 86 - 89 K. The film thicknesses were about 500 nm. Experimental results are presented for the insertion loss and return loss of the filter at 60 K.

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Electrical and Optical Properties with the Thickness of Cu(lnGa)$Se_2$ Absorber Layer (Cu(InGa)$Se_2$ 광흡수막의 두께에 따른 태양전지의 전기광학 특성)

  • Kim, S.K.;Lee, J.C.;Kang, K.H.;Yoon, K.H.;Park, I.J.;Song, J.;Han, S.O.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05c
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    • pp.108-111
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    • 2002
  • CIGS film has been fabricated on soda-lime glass, which is coated with Mo film. by multi-source evaporation process. The films has been prepared with thickness of 1.0 ${\mu}m$, 1.75${\mu}m$, 2.0${\mu}m$, 2.3${\mu}m$, and 3.0${\mu}m$. X-ray diffraction analysis with film thickness shows that CIGS films exhibit a strong (112) preferred orientation. Furthermore. CIGS films exhibited distinctly decreasing the full width of half-maximum and (112) preferred peak with film thickness. Also, The film's microstructure, such as the preferred orientation, the full width at half-maximum(FWHM), and the interplanar spacing were examined by X-ray diffraction. The preparation condition and the characteristics of the unit layers were as followings ; Mo back contact DC sputter, CIGS absorber layer : three-stage coevaporation, CdS buffer layer : chemical bath deposition, ZnO window layer : RF sputtering, $MgF_2$ antireflectance : E-gun evaporation

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Miniaturized Development of Microwave Power Divider Using High-Tc Superconductors (고온초전도체를 이용한 마이크로파 전력분배기의 소형화 개발)

  • Chung, Dong-Chul;Yoo, Byung-Hwa;Kwak, Min-Hwan;Kang, Gwang-Yong;Han, Byoung-Sung
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.58 no.3
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    • pp.334-338
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    • 2009
  • In this paper, We report the miniaturization of superconducting microwave power dividers based on lumped element equivalent circuits. To do this, we analyzed a conventional branch-type power divider by using an ABCD matrix under even and odd mode excitation. Then, we calculated each lumped element impedance throughout this analysis of a transmission line matrix. Also we simulated our equivalent circuits made of lumped elements by using a full wave analysis, em Sonnet. Our deign of microwave power divider based on simulated results was fabricated on high-$T_c$ superconducting thin films deposited on MgO substrate. Experimental results were reported in terms of bandwidth, center frequency, and phase difference between $S_{21}$ and $S_{31}$. We confirm that our design will be useful in the future microwave power systum.

Tunable Band-pass Filters using Ba0.5Sr0.5TiO3 Thin Films for Wireless LAN Application (무선랜 대역용 Ba0.5Sr0.5TiO3 박막을 이용한 가변 대역 통과 여파기)

  • Kim, Ki-Byoung;Yun, Tae-Soon;Lee, Jong-Chul;Kim, Il-Doo;Lim, Mi-Hwa;Kim, Ho-Gi;Kim, Jong-Heon;Lee, Byungje;Kim, Na-Young
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.13 no.8
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    • pp.819-826
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    • 2002
  • In this paper, the performance of Au / $Ba_{0.5}Sr_{0.5}TiO_3$ (BST) / Magnesium oxide (MgO) two-layered electrically tunable band-pass Filters (BPFs) is demonstrated. The devices consist of microstrip, coplanar waveguide (CPW), and conductor-backed coplanar waveguide (CBCPW) structures. These BST thin film band-pass filters have been designed by the 2.5 D field simulator, IE3D, Zeland Inc., and fabricated by thin film process. The simulation results, using the 2-pole microstrip, CPW, and CBCPW band-pass filters, show the center frequencies of 5.89 GHz, 5.88 GHz, and 5.69 GHz, and the corresponding insertion losses are 2.67 dB, 1.14 dB, and 1.60 dB, with 3 %, 9 %, and 7 % bandwidth, respectively. The measurement results show the center frequencies of 6.4 GHz, 6.14 GHz, and 6.04 GHz, and their corresponding insertion losses are 6 dB, 4.41 dB, and 5.41 dB, respectively, without any bias voltage. With the bias voltage of 40 V, the center frequencies for the band-pass filters are measured to be 6.61 GHz, 6.31 GHz, and 6.21 GHz, and their insertion losses are observed to be 7.33 dB, 5.83 dB, and 6.83 dB, respectively. From the experiment, the tuning range for the band-pass filters are determined as about 3 % ~ 8 %.

Fabrication and characterization of (개구결합을 이용한 H 형태 초전도 안테나의 제작 및 특성 해석)

  • Chung, Dong-Chul;Han, Byoung-Sung;Ryu, Ki-Su;Lee, Jong-Ha;Sok, Jung-Hyun;Lee, Eun-Hong
    • Journal of the Institute of Electronics Engineers of Korea TE
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    • v.37 no.1
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    • pp.63-69
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    • 2000
  • The high-$T_c$ Superconducting (HTS) antenna which consists of "H" type resonator has the benefits for the miniaturization of antenna in comparison with the microstrip antenna of the similar dimension. To fabricate the "H" type antenna, HTS $YBa_2Cu_3O_{7-x}$ (YBCO) thin films were deposited on MgO substrates using rf-magnetron sputtering. Standard etching processes were performed for the patterning of the "H" type antenna. For comparison between normal conducting antennas and superconducting antennas, the gold antennas with the same dimension were also fabricated. An aperture coupling was used for impedance matching between $50{\Omega}$ feed line and HTS radiating patch. The diverse experimental results were reported in terms of the resonant frequency, the return loss and the characteristics impedance. The "H" type superconducting antenna showed the performance of 1.36 in SWR, 24% in efficiency, and 14.6 dB in the return loss superior of the normal conducting counterpart.

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Selective Etching of Magnetic Layer Using CO/$NH_3$ in an ICP Etching System

  • Park, J.Y.;Kang, S.K.;Jeon, M.H.;Yeom, G.Y.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.448-448
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    • 2010
  • Magnetic random access memory (MRAM) has made a prominent progress in memory performance and has brought a bright prospect for the next generation nonvolatile memory technologies due to its excellent advantages. Dry etching process of magnetic thin films is one of the important issues for the magnetic devices such as magnetic tunneling junctions (MTJs) based MRAM. CoFeB is a well-known soft ferromagnetic material, of particular interest for magnetic tunnel junctions (MTJs) and other devices based on tunneling magneto-resistance (TMR), such as spin-transfer-torque MRAM. One particular example is the CoFeB - MgO - CoFeB system, which has already been integrated in MRAM. In all of these applications, knowledge of control over the etching properties of CoFeB is crucial. Recently, transferring the pattern by using milling is a commonly used, although the redeposition of back-sputtered etch products on the sidewalls and the low etch rate of this method are main disadvantages. So the other method which has reported about much higher etch rates of >$50{\AA}/s$ for magnetic multi-layer structures using $Cl_2$/Ar plasmas is proposed. However, the chlorinated etch residues on the sidewalls of the etched features tend to severely corrode the magnetic material. Besides avoiding corrosion, during etching facets format the sidewalls of the mask due to physical sputtering of the mask material. Therefore, in this work, magnetic material such as CoFeB was etched in an ICP etching system using the gases which can be expected to form volatile metallo-organic compounds. As the gases, carbon monoxide (CO) and ammonia ($NH_3$) were used as etching gases to form carbonyl volatiles, and the etched features of CoFeB thin films under by Ta masking material were observed with electron microscopy to confirm etched resolution. And the etch conditions such as bias power, gas combination flow, process pressure, and source power were varied to find out and control the properties of magnetic layer during the process.

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Study on the miniaturized HTS antenna using H-type resonators for satellite communication systems. ('H'형태 공진기를 이용한 축소화된 위성통신 기지국용 고온초전도 안테나에 관한 연구)

  • Chung, D.C.;Lim, S.H.;Choi, H.S.;Hwang, J.S.;Han, B.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.559-562
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    • 2004
  • The $high-T_c$ Superconducting(HTS) antenna which consists of "H" type resonator has the benefits for the miniaturization of antenna in comparison with the microstrip antenna of the similar dimension. To fabricate the "H" type antenna HTS $YBa_2Cu_3O_{7-x}$(YBCO) thin films were deposited on MgO substrates using rf-magnetron sputtering. Standard etching processes were performed for the patterning of the "H" type antenna. For comparison between normal conducting antennas and superconducting antennas, the gold antennas with the same dimension were also fabricated. An aperture coupling was used for impedance matching between $50\Omega$ feed line and HTS radiating patch. The diverse experimental results were reported in terms of the resonant frequency, the return loss and the characteristics impedance. The "H" type superconducting antenna showed the performance of 1.36 in SWR, 24 % in efficiency, and 14.6 dB in the return loss superior to the normal conducting counterpart.

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Modification of polyamide reverse osmosis membranes seeking for better resistance to oxidizing agents

  • Silva, Lucinda F.;Michel, Ricardo C.;Borges, Cristiano P.
    • Membrane and Water Treatment
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    • v.3 no.3
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    • pp.169-179
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    • 2012
  • One of the major limitations in the use of commercial aromatic polyamide thin film composite (TFC) reverse osmosis (RO) membranes is to maintain high performance over a long period of operation, due to the sensitivity of polyamide (PA) skin layer to oxidizing agents, such as chlorine, even at very low concentrations in feed water. This article reports surface modification of a commercial TFC RO membrane (BW30-Dow Filmtec) by covering it with a thin film of poly(vinyl alcohol) (PVA) crosslinked with glutaraldehyde (GA) to improve its resistance to chlorine. Crosslinking reaction was carried out at 25 and $40^{\circ}C$ by using PVA 1.0 wt.% solutions at different GA/PVA mass ratio, namely 0.0022, 0.0043 and 0.013. Water swelling measurements indicated a maximum crosslinking density for PVA films prepared at $40^{\circ}C$ and GA/PVA 0.0043. ATR-FTIR and TGA analysis confirmed the reaction between GA and PVA. SEM images of the original and modified membranes were used to evaluate the surface coating. Chlorine resistance of original and modified membranes was evaluated by exposing it to an oxidant solution (NaClO 300 mg/L, NaCl 2,000 mg/L, pH 9.5) and measuring water permeability and salt rejection during more than 100 h period. The surface modification effectively was demonstrated by increasing the chlorine resistance of PA commercial membrane from 1,000 ppm.h to more than 15.000 ppm.h.