• 제목/요약/키워드: MgO thin films

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Transparent Nano-floating Gate Memory Using Self-Assembled Bismuth Nanocrystals in $Bi_2Mg_{2/3}Nb_{4/3}O_7$ (BMN) Pyrochlore Thin Films

  • 정현준;송현아;양승동;이가원;윤순길
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 추계학술발표대회
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    • pp.20.1-20.1
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    • 2011
  • The nano-sized quantum structure has been an attractive candidate for investigations of the fundamental physical properties and potential applications of next-generation electronic devices. Metal nano-particles form deep quantum wells between control and tunnel oxides due to a difference in work functions. The charge storage capacity of nanoparticles has led to their use in the development of nano-floating gate memory (NFGM) devices. When compared with conventional floating gate memory devices, NFGM devices offer a number of advantages that have attracted a great deal of attention: a greater inherent scalability, better endurance, a faster write/erase speed, and more processes that are compatible with conventional silicon processes. To improve the performance of NFGM, metal nanocrystals such as Au, Ag, Ni Pt, and W have been proposed due to superior density, a strong coupling with the conduction channel, a wide range of work function selectivity, and a small energy perturbation. In the present study, bismuth metal nanocrystals were self-assembled within high-k $Bi_2Mg_{2/3}Nb_{4/3}O_7$ (BMN) films grown at room temperature in Ar ambient via radio-frequency magnetron sputtering. The work function of the bismuth metal nanocrystals (4.34 eV) was important for nanocrystal-based nonvolatile memory (NVM) applications. If transparent NFGM devices can be integrated with transparent solar cells, non-volatile memory fields will open a new platform for flexible electron devices.

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MBE growth and magnetic properties of epitaxial FeMn2O4 film on MgO(100)

  • Duong, Van Thiet;Nguyen, Thi Minh Hai;Nguyen, Anh Phuong;Dang, Duc Dung;Duong, Anh Tuan;Nguyen, Van Quang;Cho, Sunglae
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.318.2-318.2
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    • 2016
  • FeM2X4 spinel structures, where M is a transition metal and X is oxygen or sulfur, are candidate materials for spin filters, one of the key devices in spintronics. Both the Fe and M ions can occupy tetrahedral and octahedral sites; therefore, these types of compounds can display various physical and chemical properties [1]. On the other hand, the electronic and magnetic properties of these spinel structures could be modified via the control of cation distribution [2, 3]. Among the spinel oxides, iron manganese oxide is one of promising materials for applications. FeMn2O4 shows inverse spinel structure above 390 K and ferrimagnetic properties below the temperature [4]. In this work, we report on the structural and magnetic properties of epitaxial FeMn2O4 thin film on MgO(100) substrate. The reflection high energy electron diffraction (RHEED) and X-ray diffraction (XRD) results indicated that films were epitaxially grown on MgO(100) without the impurity phases. The valance states of Fe and Mn in the FeMn2O4 film were carried out using x-ray photoelectron spectrometer (XPS). The magnetic properties were measured by vibrating sample magnetometer (VSM), indicating that the samples are ferromagnetic at room temperature. The structural detail and origin of magnetic ordering in FeMn2O4 will be discussed.

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동시증착법에 의해 성장된 붕화마그네슘 박막의 증착속도에 따른 효과 (Effect of Deposition Rate on $MgB_2$ Thin Films Growth by Co-deposition Method)

  • 박성창;강성구;정대길;정준기;임영진;김찬중;김철진
    • Progress in Superconductivity
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    • 제10권1호
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    • pp.29-34
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    • 2008
  • Magnesium diboride ($MgB_2$) is an inexpensive and simple superconductor. This material was first synthesized and its structure confirmed in 1953 but its superconducting properties were not discovered until 2001 when they caused great excitement. In this study, superconducting $MgB_2$ thin films on the r-$Al_{2}O_3$ substrates have been grown by the combination of radio frequency magnetron sputtering of B and thermal evaporation of Mg. The deposition conditions were varied by changing deposition rate. Before the co-deposition of Mg and B, the deposition rates of each element have been measured separately. The $MgB_2$ layers had 400nm in thickness and superconducting transition temperatures have been measured around $\sim$38.6K. Superconducting properties have been measured by PPMS, XRD, and SEM.

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Structural and Magnetic Properties of $FePt-B_x\;at.\%$ (X=5, 10, 15, 25 and 33) thin Film by Post-Annealing

  • Lee Young-min;Lee Byeong-Seon;Lee Chan-Gyu;Koo Bon-Heun;Shimada Y.;Kitakami O.;Okamoto S.;Miyazaki T.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2005년도 동계학술연구발표회 및 2차 아시안포럼
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    • pp.154-155
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    • 2005
  • Multi-layer film of $MgO/(FePt-B)_{50nm}/ MgO$ was deposited on Si(100) substrates by RF magnetron sputtering. The boron chips were uniformly placed oil tile FePt target. The boron content of thin film was found to be about 5, 10, 15, 25 and $33 at\%$ by using a CAMECA SX-51 wavelength dispersive spectroscopy (WDX). It is observed that X-ray diffraction patterns of FePt-B film by post-annealing exhibited a transformation from disordered fcc structure to ordered $Ll_0$ phase with fct structure from around $400^{\circ}C$. By adding B, annealing temperature for ordering is about $200^{\circ}C$ lower than that of pure FePt. This remarkable decrease of the annealing temperature is closely related to the high diffusivities of Fe and Pt associated with the defects caused by movements of B atoms. The maximum coercivity(Hc) for FePt films was found to be ${\~}$13 kOe after annealing at $600^{\circ}C$ for 1hr.

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Composition Dependence of Perpendicular Magnetic Anisotropy in Ta/CoxFe80-xB20/MgO/Ta (x=0, 10, 60) Multilayers

  • Lam, D.D.;Bonell, F.;Miwa, S.;Shiota, Y.;Yakushiji, K.;Kubota, H.;Nozaki, T.;Fukushima, A.;Yuasa, S.;Suzuki, Y.
    • Journal of Magnetics
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    • 제18권1호
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    • pp.5-8
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    • 2013
  • The perpendicular magnetic anisotropy of sputtered CoFeB thin films covered by MgO was investigated by vibrating sample magnetometry. Three different $Co_xFe_{80-x}B_{20}$ alloys were studied. Under out-of plane magnetic field, the saturation field was found to increase with increasing the Co content. The magnetization and interface anisotropy energy were obtained for all samples. Both showed a marked dependence on the MgO overlayer thickness. In addition, their variations were found to be non-monotonous as a function of the Co concentration.

유리알에 코팅된 TiO2 박막의 구조 및 광촉매 특성 (Structural and Photocatalytic Properties of TiO2 Thin Film Coated Glass Beads)

  • 정지은;이창용
    • 공업화학
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    • 제34권1호
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    • pp.30-35
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    • 2023
  • TiO2 졸을 사용하여 유리알 표면에 TiO2 코팅한 후 건조 처리한 시료(TB)와 소성한 시료(TBc)를 제조하였다. 이들 시료에 대한 TiO2 박막의 특성분석과 메틸렌블루 및 톨루엔의 광분해 실험을 수행하였다. FE-SEM, XPS 및 FTIR 분석 결과, TB 시료의 TiO2 박막은 스펀지 폼과 같은 형태이며 무정형 TiO2와 일부 결정형 TiO2가 존재하였다. TBc 시료의 TiO2 박막에는 결정형 TiO2가 주로 존재하며 침상형 입자와 미세 입자들이 혼재하였다. TBc 시료(46 mg/g)의 톨루엔 흡착량은 같은 코팅량의 TB 시료 대비 적었으나 톨루엔 분해율은 비슷했다. TB 시료의 경우, TiO2 코팅량이 증가함에 따라 톨루엔 분해능이 흡착능에 비해 적게 감소하였다. 이러한 결과는 소성하지 않은 TB 시료는 TiO2 코팅량이 증가하면 무정형 텍스처의 비표면적은 감소하는 반면 결정성 입자들의 활성점 감소는 적게 일어나기 때문으로 판단된다.

Thin composite film passivation through RF sputtering method For Large-sized Organic Display Devices

  • Lee, Joo-Won;Kim, Young-Min;Park, Jung-Soo;Bea, Sung-Jin;Kim, Na-Rae;Kim, Jai-Kyeong;Jang, Jin;Ju, Byeong-Kwon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1480-1483
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    • 2005
  • Transparent thin composite films (TCFs) were deposited on OLED devices by means of RF sputtering method and their passivation-properties were evaluated by comparing to the e-beam evaporating method. This composite film formed by mixed ratio of MgO (3wt %): $SiO_2$ (1wt %) was developed from pallet as a source of e-beam evaporator to 6-inch size target for sputtering in order to apply for large-sized organic display devices. Water Vapor Transmission Rates (WVTR) of the deposited films were measured as a function of thickness to assess the effectiveness of this film as a passivation layer and it applied to real devices. From this study, we can confirm that the passivation layer formed by TCFs using RF sputtering method sufficiently shows the potentiality of application to passivation layer for organic display devices.

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Effects of Mg Suppressor Layer on the InZnSnO Thin-Film Transistors

  • Song, Chang-Woo;Kim, Kyung-Hyun;Yang, Ji-Woong;Kim, Dae-Hwan;Choi, Yong-Jin;Hong, Chan-Hwa;Shin, Jae-Heon;Kwon, Hyuck-In;Song, Sang-Hun;Cheong, Woo-Seok
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제16권2호
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    • pp.198-203
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    • 2016
  • We investigate the effects of magnesium (Mg) suppressor layer on the electrical performances and stabilities of amorphous indium-zinc-tin-oxide (a-ITZO) thin-film transistors (TFTs). Compared to the ITZO TFT without a Mg suppressor layer, the ITZO:Mg TFT exhibits slightly smaller field-effect mobility and much reduced subthreshold slope. The ITZO:Mg TFT shows improved electrical stabilities compared to the ITZO TFT under both positive-bias and negative-bias-illumination stresses. From the X-ray photoelectron spectroscopy O1s spectra with fitted curves for ITZO and ITZO:Mg films, we observe that Mg doping contributes to an enhancement of the oxygen bond without oxygen vacancy and a reduction of the oxygen bonds with oxygen vacancies. This result shows that the Mg can be an effective suppressor in a-ITZO TFTs.

동시 열증발법으로 제조한 SmBCO 고온 초전도에서 박막 조성비가 표면형상 및 초전도 특성에 미치는 영향 (The effect of composition ratio on the surface morphology and superconducting properties of SmBCO films prepared by thermal co-evaporation method)

  • 이남진;김호섭;하홍수;고락길;송규정;하동우;양주생;김태형;정예현;염도준;문승현;박찬;오상수
    • 한국초전도ㆍ저온공학회논문지
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    • 제9권1호
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    • pp.5-8
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    • 2007
  • We have investigated the superconducting properties and surface morphology of $Sm_xBa_yCu_3O_{6+z}$ thin films deposited on LMO/IBAD-MgO/Hastelloy which prepared with different composition ratio by co-evaporation method(EDDC, Evaporation using Drum in Dual Chambers). We observed the composition ratio of SmBCO thin films by EDS analysis. We fabricated SmBCO thin film with critical current density of $1.5{\times}10^6A/cm^2$ at composition ratio of SM:Ba:Cu=1.10:2.01:3(at 77 K self-field). And, we confirmed that substitution of Sm-Ba did not occur at Cu rich phase by EDS analysis.