• 제목/요약/키워드: MgO Thin Film

검색결과 297건 처리시간 0.027초

고온 초전도 마이크로스트립 패치 안테나; 비방사면 급전방식을 이용한 초전도 안테나 특성 (High Tc Superconducting Microstrip Patch antenna ; Characterization of Superconducting Antenna using Non-Radiating Edge Feeding Technique)

  • 정동철;박성진;황종선;박종광;한병성
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권7호
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    • pp.375-381
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    • 2000
  • In this paper, we described the characterization of High-Tc Superconducting(HTS) microstrip antenna using non-radiating edge feeding technique and reported the microwave properties of HTS antennas with temperature. To do this, we prepared the $YBa_2Cu_3O_{7-x}$ superconducting thin film on MgO substrate using pulse-laser deposition techniques. The HTS microstrip antenna using non-radiating feeding technique was fabricated using chemical wet-etching. Then it was compared with identical antenna patterned with evaporated gold. The diverse measured results have been reported in terms of the input impedance, resonant frequency and return loss. In additional, at around the critical temperature, the effect of kinetic inductance which affect the resonant characteristic of the HTS microstrip antenna was reported.

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The Fabrication of Micro-Heaters with Low-Power Consumption Using SOI and Trench Structures

  • 정귀상;홍석우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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    • pp.197-201
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    • 2002
  • This paper presents optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SOI and trench structures. The micro-heaters are based on a thermal measurement principle and contains thermal isolation regions of 10 ${\mu}m$-thick Si membranes consisting of oxide-filled trenches in the SOI membrane rim. The micro-heaters were fabricated with Pt-RTD on the same substrate via MgO buff layer between Pt thin-film and $SiO_2$ layer. The thermal characteristics of micro-heater with trench-free SOI membrane structure was $280^{\circ}C$ at input power 0.9 W; in the presence of 10 trenches, it was $580^{\circ}C$ due to reduction of the external thermal loss. Therefore, a micro-heater with trenches in SOI membrane rim structure provides a powerful and versatile alternative technology for enhancing the performance of micro-thermal sensors and actuators.

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Process Characteristics for $YB_{2}Cu_{3}O_{7-d}$ Films Fabricated by Single Target Sputter and Surface Modification Technique

  • Lee, Eue-Jae
    • 한국재료학회지
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    • 제5권5호
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    • pp.598-605
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    • 1995
  • Thin films of $YB_{2}Cu_{3}O_{7-d}$ were prepared on various substrated of MgO(100), $SrTiO_{3}$, and $LaAlO_{3}$ by using off-axis magentron sputtering methods and annealing in-situ. The prarameters of film fabrication processes had been optimized through a "follow the lcoal maxima" strategy to yield good quality films in therms of the critical temperature $T_{c}$ and the critical current density $J_{c}$. Optimizedproecsses employing a plane magndtron and an cylindrical magnetron yielded $T_{c}$>90K along with $J_{c}$$10^{6}$A/$\textrm{cm}^2$ at 77K and > 2${\times}$$10^{7}$A/$\textrm{cm}^2$ at 5K. The sampels, however, showed degradationinthe properties, after chemical etching for fabrication of microbridges with the line width of 2-10 mocrons. In particular, the value of $T_{c}$ for the microbridges of 2microns was as small as 80%. The degradation was strongly dependent on the line width through a formula : $T_{c}$(e)=$T_{c}$)b) [1-a exp(-1000 bL)} where $T_{c}$(e) and $T_{c}$ (b) are the values of $T_{c}$ in the absolute scale measured after and before chemical etching, respectively and L is the line width in mm. By utilizing a best fitting technique, the proper constant values of a and to b were found as exp(-1.2) and 0.22, respectively. This formula was very useful in estimatiing the upper limit of the device operationtemperature.

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$UV-TiO_2$ 광촉매 반응기에 의한 미생물의 살균효과 (Killing Effects of $UV-TiO_2$ Photocatalytic System on Microorganisms)

  • 김중곤;신용국;이영상;김용호;김시욱
    • 미생물학회지
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    • 제37권2호
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    • pp.130-136
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    • 2001
  • 두가지 형태(1단 반응기와 2단 반응기)의 UV-$TiO_2$광촉매 시스템과 3가지 형태의 $TiO_2$가 코팅된 촉매를 이용하여 미생물에 대한 살균효과를 살펴보았다. 첫번째 형태는 석영관에 $TiO_2$가 박막증착된 것이고 두번째 형태는 glass bead 표면에 $TiO_2$가 코팅된 형태이며 세번째는 alginate bead에 $TiO_2$가 혼합된 형태이다. 1분동안 UV를 조사하였을때 1단 반응기에서 $TiO_2$가 박막증착된 석영관과 $TiO_2$가 코팅된 glass bead의 살균효율은 각각 63.2%와 89.9%이었다. 반응기에 기포를 주입했을 때의 살균효율은 glass bead의 경우 95%로 기포를 주입하지 않았을 때의 90.6%보다 휠씬 효과적이었다. 기포를 주입하면서 광촉매로 alginate bead에 $TiO_2$가 혼합된 것을 이용하였을 경우의 살균효율은 86%이었다. $TiO_2$가 코팅된 glass bead를 이용한 반응기에 기포를 주입하면서 $H_2$$O_2$를 처리하였을 때의 살균정도는 미량농도에서도 매우 효과적이었다. 1단 반응기보다 2단 반응기에서의 살균효율이 더욱 증가하였으며 E. coli에 대한 살균효과가 S. cerevisiae보다 더 높게 나타났다.

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광대역 고조파 제거용 고온초전도 저역통과 필터의 설계 (A Design of High Temperature Superconducting Low-Pass Filter for Broad-Band Harmonic Rejection)

  • 곽민환;김상현;안달;한석길;강광용
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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    • pp.78-81
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    • 2000
  • A new type low-pass filter design method based on a coupled line and transmission line theory is proposed to suppress harmonics by attenuation poles in the stop band The design formula are derived using the equivalent circuit of a coupled transmission line. The new low-pass filter structure is shown to have attractive properties such as compact size, wide stop band range and low insertion loss. The seventh-order low-pass filter designed by present method Ins a cutoff frequency of 0.9 GHz with a 0.01 dB ripple level. The coupled line type low-pass filter with stripline configuration was fabricated by using a high-temperature superconducting (HTS ; $YBa_2Cu_3O_{7-x}$) thin film on MgO(100) substrate. Since the HTS coupled line type low-pass filter was proposed with five attenuation poles in stop band such as 1.8, 2.5, 4, 5.5, 62 GHz. The fabricated low-pass filter has improved the attenuation characteristics up to seven times of the cutoff frequency Bemuse of good rejection of the spurious signals and harmonics, our low-pass filter is applicable to mobile base station systems such as cellular, personal communication systems and international mobile telecommunication(IMT)-2000 systems.

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화학적인 용액 코팅방법에 의한 박막형 고온초전도체에 사용되는 SUS310 금속모재의 평탄화 연구 (Planarization of SUS310 Metal Substrate Used for Coated Conductor Substrate by Chemical Solution Coating Method)

  • 이종범;이현준;김병주;권병국;김선진;이종수;이철영;문승현;이희균;홍계원
    • Progress in Superconductivity
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    • 제12권2호
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    • pp.118-123
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    • 2011
  • The properties of $2^{nd}$ generation high temperature superconducting wire, coated conductor strongly depend on the quality of superconducting oxide layer and property of metal substrate is one of the most important factors affecting the quality of coated conductor. Good mechanical and chemical stability at high temperature are required to maintain the initial integrity during the various process steps required to deposit several layers consisting coated conductor. And substrate need to be nonmagnetic to reduce magnetization loss for ac application. Hastelloy and stainless steel are the most suitable alloys for metal substrate. One of the obstacles in using stainless steel as substrate for coated conductor is its difficulties in making smooth surface inevitable for depositing good IBAD layer. Conventional method involves several steps such as electro polishing, deposition of $Al_2O_3$ and $Y_2O_3$ before IBAD process. Chemical solution deposition method can simplify those steps into one step process having uniformity in large area. In this research, we tried to improve the surface roughness of stainless steel(SUS310). The precursor coating solution was synthesized by using yttrium complex. The viscosity of coating solution and heat treatment condition were optimized for smooth surface. A smooth amorphous $Y_2O_3$ thin film suitable for IBAD process was coated on SUS310 tape. The surface roughness was improved from 40nm to 1.8 nm by 4 coatings. The IBAD-MgO layer deposited on prepared substrate showed good in plane alignment(${\Delta}{\phi}$) of $6.2^{\circ}$.

재래식 간장의 한외여과시 공급액의 주입속도와 잔류액의 용량감소율이 간장의 투과유속, 미생물균체 및 성분저지율에 미치는 영향 (Effects of Flow Rate of Feed Kanjang and Volume Reduction Ratio of Retentate on the Permeate Flux and Rejection of Microbes Cells and Components in Kanjang during Ultrafiltration Operations)

  • 권광일;이종구;최종동;정현채;임무혁;김기주;김우성;성준현;권오준;김영지;서정식;최청;최광수
    • 한국식품과학회지
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    • 제35권1호
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    • pp.72-76
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    • 2003
  • 회분처리법으로 박층류식 평막 test cell에 의한 재래간장의 한외시험을 실시한 결과 공급액 주입속도별 투과유속의 감소는 용량감소율의 대수값에 비례하여 감소하였고 본 연구에서 사용한 분획분자량 200,000 dalton의 막에 의한 재래간장의 한외여과에서는 1.5L/min의 유속으로 공급액을 주입하는 것이 농도분극화현상을 최소화하면서 장시간 작업할 수 있음을 알 수 있었다. 간장의 한외여과시험에서 간장내의 총질소와 소금성분은 투과유속이 빠를수록 막에 의한 저지율이 더 높아졌고 따라서 500 nm에서의 간장의 흡광도는 더 낮아졌으며 Cu, Mn 및 Mg와 같은 무기성분도 다소 저지되었다. 미생물 균체는 공급간장의 유속에 상관없이 분획분자량 200,000 dalton의 한외여과막으로 100% 저지되었으나 유리아미노산은 거의 저지되지 않아 투과됨을 알 수 있었다.