• 멤브레인
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• 제17권4호
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• pp.381-386
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• 2007

니켈입자와 고분자를 함유한 니켈슬러리를 상전환법을 이용하여 중공사 형태로 성형한 후, 소결법을 이용하여 $1,150^{\circ}C$ 환원조건에서 소결하여 금속 필터를 제조하였고 니켈 입자를 표면에 함침한 후, $800^{\circ}C$ 환원조건에서 소결하여 금속 정밀여과막을 제조하였다. 소결조건에 따른 금속 중공사 필터와 정밀여과막의 기공크기, 강도를 살펴보았다. 금속 중공사 정밀여과막은 산, 염기 및 염소에 대한 저항성이 뛰어났으며 역세척에 의한 투수량 회복률이 우수하였다.

• 소성∙가공
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• 제14권5호
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.237-240
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• 2005

The demand of micro electrical mechanical system (MEMS) bio/chemical sensor is rapidly increasing. To prevent the contamination of sensing area, a filtration system is required in on-chip total analyzing MEMS bio/chemical sensor. A nano-filter was mainly applied in some application detecting submicron feature size bio/chemical products such as bacteria, fungi and so on. We suggested a simple nano-filter fabrication process based on replication process. The mother pattern was fabricated by holographic lithography and reactive ion etching process, and the replication process was carried out using polymer mold and UV-imprinting process. Finally the nano-filter is obtained after removing the replicated part of metal deposited replica. In this study, as a practical example of the suggested process, a nano-dot array was replicated to fabricate nano-filter fur bacteria sensor application.

• 멤브레인
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• 제19권1호
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• pp.47-53
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• 2009

본 연구의 목적은 금속 중공사형 필터에 무기 입자를 코팅하여 금속/세라믹 복합 한외여과막을 제조하는 것이다. 직경이 2.0 mm이며 기공 크기가 $2{\sim}8{\mu}m$ 범위를 갖는 니켈 중공사 필터에 급냉건조법과 침지-건조법으로 실리카 졸과 티타니아 졸을 코팅하여 금속쎄라믹 복합 한외여과막을 제조하였다. SEM과 PMI 결과로부터 기공 크기가 50 nm 수준을 갖는 것을 확인하였다. 기공 크기는 입자 크기, 소성시간 및 온도에 따라 차이를 보였다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.599-600
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• 2006

This paper described the state of art of porous metal materials, the typical manufacturing technologies and performances of sintered metal porous materials, with emphasis on the recent research achievements of CISRI in development of porous metal materials. High performance porous metal materials, such as metallic membrane, sub-micron asymmetric composite porous metal, large dimensional and structure complicated porous metal aeration cones and tube, metallic catalytic filter elements, lotus-type porous materials, etc, have been developed. Their applications in energy industry, petrochemical industry, clean coal process and other industrial fields were introduced and discussed.

• 한국전기전자재료학회논문지
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• 제21권5호
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• pp.402-410
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• 2008

Single-walled carbon nanotubes (SWCNTs) were currently produced together with some contaminants such as a metallic catalyst, amorphous carbon, and graphitic nanoparticles, which should be sometimes purified for their applications. This study aimed to develop efficient, scalable purification processes but less harmful to SWCNTs. We designed three-step purification processes: acidic treatment, surface functionalization and soxhlet extraction, and heat treatment. During the soxhlet extraction using tetrahydrofuran, specifically, carbon impurities could be easily expelled through a glass thimble filter without any significant loss of CNTs. Finally, SWCNTs were left as a bulky paper on the filter through membrane filtration. Vertically aligned SWCNTs on one side of bulky paper were well developed in a speparation from the filter paper, which were formed by being sucked through the filter pores during the pressurized filtration. The bucky paper showed a very high peak current density of field emission up to $200\;mA/cm^2$ and uniform field emission images on phosphor, which seems very promising to be applied to vacuum microelectronics such as microwave power amplifiers and x-ray sources.