• 센서학회지
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• 제16권1호
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• pp.62-67
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• 2007

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${\times}$2.5 mm, $0.5{\mu}m$ thick low stress silicon nitride membrane, 2 mm${\times}$2 mm Au/Ni/Cr membrane electrode, and $3{\mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${\times}$2 mm, $150{\mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${\times}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{\mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• 한국소음진동공학회논문집
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• 제16권12호
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• pp.1272-1278
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• 2006

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin(Au/Sn) eutectic solder bonding. The membrane chip has $2.5mm{\times}2.5mm$, 0.5${\mu}m$ thick low stress silicon nitride membrane, $2mm{\times}2mm$ Au/Ni/Cr membrane electrode, and 3${\mu}m$ thick Au/Sn layer. The backplate chip has $2mm{\times}2mm$, 150${\mu}m$ thick single crystal silicon rigid backplate, $1.8mm{\times}1.8mm$ backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50{\sim}60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is 39.8 ${\mu}V/Pa$(-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• Environmental Engineering Research
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• 제25권2호
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• pp.222-229
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• 2020

Membrane assisted condenser is an innovative membrane operation that exploits the hydrophobic nature of microporous membranes to promote water vapor condensation and recovery. It can be used for water and chemicals recovery from waste gaseous streams. In this work, the testing of membrane condenser for water and ammonia recovery from synthetic streams (i.e., a saturated air stream with ammonia) simulating the plume of cooling tower is illustrated. The modeling of the process was carried out for predicting the membrane-based process performance and for identifying the minimum operating conditions for effectively recovering liquid water. The experimental data were compared with the results achieved through the simulations showing good agreement and confirming the validity of the model. It was found that the recovery of water can be increased growing the temperature difference between the plume and the membrane module (DT), the relative humidity of the plume (RH^plume) and the feed flow rate on membrane area ratio. Moreover, the concentration of NH₃ in the recovered liquid water increased with the growing DT, at increasing NH₃ concentration in the fed gaseous stream and at growing relative humidity of the feed.

• Membrane and Water Treatment
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• 제8권4호
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• pp.355-367
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• 2017

In India, the current operation of condenser cooling system & effluent disposal system in existing power plants aims to reduce drawal of seawater and to achieve Zero Liquid Discharge to meet the demands of statutory requirements, water scarcity and ecological system. Particularly in the Steam-Electric power plants, condenser cooling system adopts Once through cooling (OTC) system which requires more drawal of seawater and effluent disposal system adopts sea outfall system which discharges hot water into sea. This paper presents an overview of closed-loop technology for condenser cooling system and to achieve Zero Liquid Discharge plant in Steam-Electric power plants making it lesser drawal of seawater and complete elimination of hot water discharges into sea. The closed-loop technology for condenser cooling system reduces the drawal of seawater by 92% and Zero Liquid Discharge plant eliminates the hot water discharges into sea by 100%. Further, the proposed modification generates revenue out of selling potable water and ZLD free flowing solids at INR 81,97,20,000 per annum (considering INR 60/Cu.m, 330 days/year and 90% availability) and INR 23,760 per annum (considering INR 100/Ton, 330 days/year and 90% availability) respectively. This proposed modification costs INR 870,00,00,000 with payback period of less than 11 years. The conventional technology can be replaced with this proposed technique in the existing and upcoming power plants.

• 대한의용생체공학회:의공학회지
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• 제26권3호
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• pp.139-144
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• 2005

An implantable microphone that can be utilized as part of a totally implantable hearing aid is designed and implemented. The proposed microphone is implanted in the center of the pinna, and designed to ensure the speech frequency range and the appropriate sensitivity. The characteristics of the proposed microphone are evaluated using a finite element analysis (FEA). The microphone is composed of a small electric condenser microphone, titanium case 6.2mm in diameter and 3mm high, and $10{\mu}m$ SUS316L vibrating membrane in contact with hypodermic tissue to maintain the sensitivity of the microphone. The microphone components are all made of biocompatible materials, then the assembled microphone is hermetically sealed using a polymer and ceramic. Experiments with the fabricated microphone confirm an operational bandwidth of up to 5kHz without any decline of sensitivity in 6mm of hypodermic tissue.