• Journal of the Semiconductor & Display Technology
• /
• v.15 no.1
• /
• pp.6-11
• /
• 2016

For high volume manufacturing using extreme ultraviolet (EUV) lithography, mask protection from contamination during lithography process must be solved, and EUV pellicle is the strongest solution. Based on the technical requirements of EUV pellicle, EUV pellicle should have large membrane area ($110{\times}140mm^2$) with film transmittance over 90% and mechanical stability. Even though pellicle that satisfies size standard with high transmittance has been reported, its mechanical stability has not been confirmed, nor is there a standard to evaluate the mechanical stability. In this study, we suggest a rather simple method evaluating mechanical stability of pellicle membrane using spin-coater which can emulate the linear accelerated motion. The test conditions were designed by simulating the acceleration distribution inside pellicle membrane through correlating the linear acceleration and centripetal acceleration, which occurs during linear movement and rotation movement, respectively. By these simulation results, we confirmed the possibility of using spin-coater to evaluate the mechanical stability of EUV pellicle.

• Journal of Mechanical Science and Technology
• /
• v.20 no.9
• /
• pp.1428-1435
• /
• 2006

A slightly curved crack with an eigenstrain is considered. Solutions for a slightly curved crack in a linear isotropic material under asymptotic loading as well as for a slightly curved crack in a linear isotropic material with a concentrated force are obtained from perturbation analyses, which are accurate to the first order of the parameter representing the non-straightness. Stress intensity factors for a slightly curved crack with an eigenstrain are obtained from the perturbation solutions by using a body force analogy. Particular attention is given to the crack path stability under mode I loading. A new parameter of crack path stability is proposed for a crack with an eigenstrain. The path stability of a crack with steady state growth in a transforming material and a ferroelectric material is examined.

• Journal of Mechanical Science and Technology
• /
• v.14 no.3
• /
• pp.358-368
• /
• 2000

The hydrodynamic stability of the Karman boundary-layer flow due to a rotating disk has been numerically investigated for moving disturbance waves. The disturbed flow over a rotating disk can lead to transition at much lower Re than that of the well-known Type I instability mode. This early transition is due to the excitation of the Type II instability mode of moving disturbances. Presented are the neutral stability results concerning the two instability modes by solving new linear stability equations reformulated not only by considering whole convective terms but by correcting some errors in the previous stability equations. The reformulated stability equations are slightly different with the previous ones. However, the present neutral stability results are considerably different with the previously known ones. It is found that the flow is always stable for a disturbance whose dimensionless wave number k is greater than 0.75.

• Journal of Drive and Control
• /
• v.11 no.3
• /
• pp.22-30
• /
• 2014

In this research, the energy stability level method is used for examining the stable state of Field Robot under effects of swing motion, at particular postures of manipulator, and terrain conditions. The energy stability level is calculated by using the dynamic models of Field Robot, subjected to the concept of equilibrium plane and support boundary. The results, simulated by using computing program for estimating the potential overturning of Field Robot, supply useful predictions of stability analysis for designers and operators.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.21 no.10
• /
• pp.1712-1717
• /
• 1997

Stability and accuracy for the trapezoidal rule of the Newmark time integration method are analyzed when variable time step sizes are adopted. A new analytic approach to stability and accuracy analysis is also proposed for time integration methods with variable time step sizes. The trapezoidal rule with variable time step sizes has the "actual" unconditional stability which is the same as that of the method with constant time step sizes. However, the method with variable time step sizes is first-order accurate while the method with constant time step sizes is second-order accurate. accurate.

• International Journal of Naval Architecture and Ocean Engineering
• /
• v.9 no.4
• /
• pp.382-389
• /
• 2017

We are developing a prototype underwater glider for subsea payload delivery. The idea is to use a glider to deliver payloads for subsea installations. In this type of application, the hydrodynamic forces and dynamic stability of the glider is of particular importance, as it has implications on the glider's endurance and operation. In this work, the effect of two different wing forms, rectangular and tapered, on the hydrodynamic characteristics and dynamic stability of the glider were investigated, to determine the optimal wing form. To determine the hydrodynamic characteristics, tow tank resistance tests were carried out using a model fitted alternately with a rectangular wing and tapered wing. Steady-state CFD analysis was conducted using the hydrodynamic coefficients obtained from the tests, to obtain the lift, drag and hydrodynamic derivatives at different angular velocities. The results show that the rectangular wing provides larger lift forces but with a reduced stability envelope. Conversely, the tapered wing exhibits lower lift force but improved dynamic stability.

• Fashion & Textile Research Journal
• /
• v.20 no.1
• /
• pp.93-100
• /
• 2018

This study comparatively analyzed the changes in the dimensional stability and the mechanical properties of stretch knit fabrics associated with washings conditions in order to determine the most appropriate washing method. Polyester and spandex knit fabrics were washed 25 cycles with nine washing condition profiles that controled detergent, hardness. temperature and RPM. The knit fabrics with repeated washings were evaluated by dimensional stability and measured by the KES-FB system. Polyester and spandex fibers have good chemical resistance. However, the changes in the dimensional stability and the mechanical properties were observed in washed knit fabrics. After repeated washings, the knit fabrics washed in an alkali or neutral detergent had good dimensional stability compared with the knit fabric washed in functional detergent. The washed knit fabrics were extended, stiff, rough, and had a smaller volume. The changes were the result of the rearrange of polyester fibers which twisted around spandex core and chemical interactions involving the detergent and the physical and mechanical forces of washing. Especially, using an alkali detergent resulted in increased stiffness and roughness of the knit fabric. In conclusion, the washing in water with low hardness and a neutral detergent can minimize the changes in dimensional stability and mechanical properties of polyester and spandex knit fabric.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2005.07a
• /
• pp.489-492
• /
• 2005

We report new polymer stabilized ferroelectric liquid crystal (PSFLC) cells with mechanical stability which is achievable by introducing photospacers in the cells. It was found that the mechanical st ability of the PSFLC cell was effected by introduction of photo spacers. We analyzed the dependence of mechanical stability and memory property on the density of photospacers in the PSFLC cell. The stability and memory properties of PSFLC Cells depending on photospacer density are discussed. 1. Introduction Recently, flexible displays have attracted much attention because they have remarkable advantages: thinner, lighter, non-breakable and conformable features. Flexible displays have various potential applications such as e-book and e-paper displays utilizing the distinct features. E-book and E-paper displays demand very low power consumption, so that bistable memory liquid crystal modes are required in case of flexible plastic LCDs for those application. Three kinds of memory LC modes have been developed; bistable nematic, bistable cholesteric and bistable FLC. Among them SSFLC as one of bistable FLC has big advantages such as low driving voltage, wide view angle and fast response time, SSFLC cells are, however, very weak against mechanical shock. Polymer stabilized FLC (PSFLC) has been developed to overcome the poor mechanical stability of SSFLC. PSFLC was known to have network structure that FLCs are oriented with smectic layer ordering in polymer network. The polymer network stabilizes the FLC orientation, which leads to improvement of mechanical stability of PSFLCD. A lot of studies have been done for the application of PSFLC to flexible $LCDs.^{[1{\sim}12]}$ However, it should be noted that PSFLC does not have sufficient mechanical stability for the particular applications such as smart card LCD, where LCD is highly bendable.Bead spacer was mainly used to maintain cell gap of conventional PSFLCDs. But the spacer density of it is not locally uniform in the cell, so that it is generally difficult that the PSFLCDs with bead spacers show sufficient mechanical stability. In order to more improve the mechanical stability of PSFLCDs, we introduced photospacers into PSFLCDs. In this paper, we describe the improvement of mechanical stability by introducing photospacers into PSFLCDs.

• Journal of Mechanical Science and Technology
• /
• v.20 no.11
• /
• pp.1898-1913
• /
• 2006

This paper deals with the design of a yaw rate controller based on gain-scheduled H$\infty$ optimal control, which is intended to maintain the lateral stability of a vehicle. Uncertain factors such as vehicle mass and cornering stiffness in the vehicle yaw rate dynamics naturally call for the robustness of the feedback controller and thus H$\infty$ optimization technique is applied to synthesize a controller with guaranteed robust stability and performance against the model uncertainty. In the implementation stage, the feed-forward yaw moment by driver's steer input is estimated by the disturbance observer in order to determine the accurate compensatory moment. Finally, HILS results indicate that the proposed yaw rate controller can satisfactorily improve the lateral stability of an automobile.

• Journal of the Korean Society for Precision Engineering
• /
• v.30 no.7
• /
• pp.725-732
• /
• 2013

This paper presents a torque distribution algorithm for improving the stability and mobility of a wall-climbing robot platform. During ascent, the pitch moment caused by the payload or external disturbances separates the robot's triangular tracks from the wall, significantly deteriorating its stability. Moreover, the reaction forces stemming from the increase in the pulling force may degrade the robot's mobility. Thus, it is very important to minimize the reaction forces acting on the triangular tracks, as well as the fluctuations in the pulling force, during the climb. Through dynamic modeling of the proposed robot platform, we demonstrated the dependence of the robot's stability and mobility on the torque distribution of the triangular tracks. Extensive simulations using different climbing speeds were used to significantly improve the stability and mobility of the proposed robot platform.