• 한국전기전자재료학회논문지
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• 제19권7호
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• pp.655-661
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• 2006

Dielectric and piezoelectric properties of PMN-PZT ceramics with a high mechanical quality factor$(Q_m)$ and a low temperature sintering temperature were investigated as a function of PZN substitution in order to develop multilayer piezoelectric transformer for AC-DC converter. Multilayer piezoelectric transformers were subsequently manufactured using the PMN-PZN-PZT ceramic offering the optimal behavior and then the electrical performance were invetigated. At the sintering temperature of $940^{\circ}C$, density, electromechanical coupling factor$(k_p)$, mechanical qualify factor$(Q_m)$ and dielectric constant$(\varepsilon_r)$ of 8 mol% PZN substituted specimen were $7.73g/cm^3$, 0.524, 1573 and 1455, respectively. The PZN substitution caused a increase in the dielectric constant and the electromechnical coupling factor. The voltage step-up ratio of multilayer piezoelectric transformer showed the maximum value at near the resonant frequency of 76.55 kHz and increased according to the increase of load resistance. The multilayer piezoelectric transformer with the output impedance coincided with the load resistance showed the temperature increase of less than $20^{\circ}C$ at the output power of 10 W. Based on the results, the manufactured multilayer transformer using the low temperature sintered PMN-PZN-PZT ceramics can be stably driven for both step-up and down transformers.

• Transactions on Electrical and Electronic Materials
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• 제2권3호
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• pp.18-23
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• 2001

For the piezoelectric transformer application, Pb(Sb$\_$1/2/ Nb$\_$1/2/)O$_3$-Pb(Zr,Ti)O$_3$ ceramics were produced by attrition milling. Microstructural, dielectric and piezoelectric characteristics of the ceramics were investigated as a function of milling time. The particle size and grain size decreased while dielectric constant, density and mechanical quality factor (Q$\_$m/) increased with milling time. Temperature coefficient of resonant frequency (TCf$\_$r/) was shifted to positive side with increasing milling time. The attrition milling process proved to be one of the effective routes to produce transformers for high power application.

• 한국전기전자재료학회논문지
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• 제16권3호
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• pp.202-206
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• 2003

In this study, modified PbTi $O_3$ ceramics was manufactured to apply for 30MHz SMD type ceramic resonator with the variations of electrode weight. To investigate the effects of electrode weight on resonant characteristics of ceramic resonator using 3$^{rd}$ overtone thickness vibration mode, ceramic wafers for resonator were fabricated by evaporating electrode weights of 0.66, 1.765, 2.32, 3.87$\times$ 10$^{-4}$ g/c $m^2$ with silver, respectively. And then, SMD type ceramic resonators were fabricated with the size of 3.7$\times$3.1mm and electrode radius size of 0.77mm. With increasing electrode weight, resonant resistance was gradually decreased. At the electrode weight of 2.32$\times$10$_{-4}$ g/c $m^2$, mechanical quality factor( $Q_{mt3}$) and dynamic range(D.R) showed the maximum value of 2,152 and 49dB, respectively.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1439-1441
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• 2001

In this paper, the piezoelectric and dielectric properties as a function of x and r in $yPbZr_xTi_{1-x}O_3-(1-y)Pb(Mn_{1/3}Nb_{2/3})O_3$ piezoelectric ceramics is investigated. As a results, when y is 0.95 and x is 0.505, electromechanical coupling factor($k_p$), permittivity(${{\varepsilon}_{33}}^T/{\varepsilon}_0$), piezoelectric strain constant($d_{33}$) and mechanical quality factor($Q_m$) are 58[%], 1520, 272 [pC/N] and 1550, respectively. From XRD analysis, when x is 0.505, it is MPB which present rhombohedral and tetragonal phase in same quantity. Also, From SEM observation. when sintering temperature is 1150[$^{\circ}C$], grain size is about 2 [${\mu}m$]. As y decreases, piezoelectric and dielectric properties and curie temperature decreases, but mechanical quality factor and sintering temperature increases.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.403-406
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• 2000

The piezoelectric properties and the doping effect of N $b_2$ $O_{5}$ and Mn $O_2$for 0.95PbZ $r_{x}$ $Ti_{x}$ $O_3$+0.05Pb(M $n_{0.42}$ $W_{0.26}$S $b_{0.32}$) $O_3$ compositions have been investigated. In the composition of 0.95PbZ $r_{0.54}$ $Ti_{0.46}$ $O_3$+0.05Pb(M $n_{0.42}$ $W_{0.26}$S $b_{0.32}$) $O_3$the Values Of $k_{p}$ find and $\varepsilon$$_{33}$ $^{T}$ are maximized, but $Q_{m}$ Was minimized ( $k_{p}$ =0.51, $Q_{m}$ =1750). The grain size was suppressed and the uniformity of grain was improved with doping concentration of N $b_2$ $O_{5}$ for 0.95PbZ $r_{0.54}$ $Ti_{0.46}$ $O_3$+0.005Pb(M $n_{0.42}$ $W_{0.26}$S $b_{0.32}$) $O_3$sample. The values of $k_{p}$ increased and the values of $Q_{m}$ slightly decreased when 0.5 wt% of N $b_2$ $O_{5}$ is doped. And the values of $k_{p}$ was the same formation of the N $b_2$ $O_{5}$ dopant when 0.5 wt% of M $n_2$ $O_{5}$ is doped. But the values of $Q_{m}$ was deeply decreased when 0.5 wt% of Mn $O_2$is doped. As a experiment results under high electric field driving, this piezoelectric ceramics are very stable. Conclusively, piezoelectric ceramic compsiton investigated at this paper is suitable for application to high power piezoelectric devices.. devices..ices.. devices..

• 한국전기전자재료학회논문지
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• 제14권6호
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• pp.455-459
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• 2001

In this paper, the dielectric and pizoelectric properties of 0.05Pb(M $n_{04}$ $W_{0.2}$N $b_{0.4}$) $O_3$-0.95(PbZ $r_{x}$ $Ti_{1-x}$ ) $O_3$+yN $b_2$ $O_{5}$ , are investigated as a function of the mole ratio of Zr and the amount of N $b_2$ $O_{5}$ . Also, the phase is analyzed by XRD. When the mole ratio of Zr is 0.51, the electromechanical coupling coefficient( $k_{p}$ ), relative dielectric constant ($\varepsilon$$^{T}$ $_{33}$ /$\varepsilon$$_{0}$ ), piezoelectric stain constrain ( $d_{33}$ and dielectric loss tangent show maximum, while the mechanical quality factor shows minimum value ; $k_{p}$ =56.5%, $d_{33}$ =258pC/N, $\varepsilon$$^{T}$ $_{33}$ /$\varepsilon$$_{0}$ =1170, $Q_{m}$ =1150, tan$\delta$=0.51%. At that composition, MPB which rhombohedral and tetragonal phase coexist in this ternary system is shown by the results of XRD analysis. Also, when the amount of N $b_2$ $O_{5}$ is 0.3wt%, the mechanical quality factor is increased to about 2000. The phase transition temperature of the ternary piezoelectric ceramic system showed about 35$0^{\circ}C$.TEX>.>.>.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.255-258
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• 2000

In this study, the structural, dielectric and piezoelectric properties of Pb[(Sb$\sub$1/2/Nb$\sub$1/2/)$\sub$x/- (Ni$\sub$1/3/Nb$\sub$2/3/)$\sub$0.15-x/- (Zr,Ti)$\sub$0.85/]O$_3$(x = 0, 0.01, 0.02, 0.03, 0.04, 0.05) ceramics is investigated as a function of Pb(Sb$\sub$1/2/Nb$\sub$1/2/)O$_3$ (abbreviated PSN) substitution. With the increase of PSN substitution, the crystal structure is transO$_3$formed from the tetragonal phase to the rhombohedral phase and the grain size is decreased abruptly. The curie temperature is decreased with the PSN substitution. The dielectric constant is increased with the PSN substitution and maximum value of 2290 is obtained at 4mol% PSN. With the PSN substitution, the coercive field is increased and the remnant polarization is decreased. The Electromechanical coupling factor(k$\sub$p/) Is showed the highest value of 0.622 at lmol% PSN and the mechanical quality factor(Q$\sub$m/) is decreased abruptly with the PSN substitution.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권4호
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• pp.241-246
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• 1999

In this study, the piezoelectric ceramics PZT powders were synthesized by Wet-Dry combination method. And the flexible 1-3-0 type composites were favricated with piezoceramic PZT and Eccogel polymer matrix embedded 3rd phase. Dielectric constant of 1-3-0 type composites was lower than that of single phase PZT ceramics. Thickness mode coupling factor $k_t$ which was comparable with single phase PZT ceramics, and Mechanical Quality factor $Q_m$ were about 0.65 and 6 respectively. These composites are considered as a good candidates for broad-band type transducer applications. The acoustic impedance for 1-3-0 type composites was lower than that of single phase PZT ceramics. Therefore, these composites would be better used for hydrophone applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.297-299
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• 1999

Effects of additives on the ceramic and electrical properties of Pb(Y$_{1}$2/Ta$_{1}$2/)O$_3$-PbZrO$_3$-PbTiO$_3$ceramics in a perovskite type structure were investigated. The dielectric and piezoelectric properties of the base composition were improved markedly through selection of Fe$_2$O$_3$ additives in proper amounts. The composition Pb(Y$_{1}$2/Ta$_{1}$2/)O$_3$-PbZrO$_3$-PbTiO$_3$ obtained the dielectric constant ($\varepsilon$$_{r}$=1,425). Also, electromechanical couping factors for planar(k$_{p}$) and piezoelectric constant(d$_{33}$) were obtained 0.50 and 294[pC/N] at the additives 0wt% Fe$_2$O$_3$ respectively. The mechanical quality facor(Q$_{m}$) of Pb(Y$_{1}$2/Ta$_{1}$2/)O$_3$-PbZrO$_3$-PbTiO$_3$+Fe$_2$O$_3$(0.3 wt%) is about 510.510.510.

• 반도체디스플레이기술학회지
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• 제1권1호
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• pp.15-19
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• 2002

A new vacuum packaging process in wafer level is developed for the surface micromachining devices using glass silicon anodic bonding technology. The inside pressure of the packaged device was measured indirectly by the quality factor of the mechanical resonator. The measured Q factor was about 5$\times10^4$ and the estimated inner pressure was about 1 mTorr. And it is also possible to change the inside pressure of the packaged devices from 2 Torr to 1 mTorr by varying the amount of the Ti gettering material. The long-term stability test is still on the way, but in initial characterization, the yield is about 80% and the vacuum degradation with time was not observed.