• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.267-268
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• 2006

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.79-80
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• 2007

Copper has been used as an interconnect material in the fabrication of semiconductor devices, because of its higher electrical conductivity and superior electro-migration resistance. Chemical mechanical polishing (CMP) technique is required to planarize the overburden Cu film in an interconnect process. Various problems such as dishing, erosion, and delamination are caused by the high pressure and chemical effects in the Cu CMP process. But these problems have to be solved for the fabrication of the next generation semiconductor devices. Therefore, new process which is electro-chemical mechanical planarization/polishing (ECMP) or electro-chemical mechanical planarization was introduced to solve the. technical difficulties and problems in CMP process. In the ECMP process, Cu ions are dissolved electrochemically by the applying an anodic potential energy on the Cu surface in an electrolyte. And then, Cu complex layer are mechanically removed by the mechanical effects between pad and abrasive. This paper focuses on the manufacturing of ECMP system and its process. ECMP equipment which has better performance and stability was manufactured for the planarization process.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.4
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• pp.33-39
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• 2010

Manufacturing accuracy of a precision instrument was essential to stability and efficiency of the product. Accordingly, geometrically accuracy management of precision instrument was very becoming the technique in order to design and manufacturing for machine. In this study, Measuring System is developed for extra long roller using non-contact sensor. Futhermore, It's studied by Geometric Tolerance. Exact roundness is obtained to Least Squares method from the reference circle of measured data. Measuring System is analyzed point of measurement and straightness of extra long roller is evaluated by FEM.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.7
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• pp.791-798
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• 2011

All mechanical-system parameters have uncertainty, and this uncertainty directly affects system performances and results in a decrease in the manufacturing outputs. In particular, since the size of a MEMS system is extremely small, the manufacturing tolerances of a MEMS system are relatively large when compared to the tolerances of a macro-scale system. High manufacturing tolerances result from an increase in the uncertainty of the system parameters, thereby affecting the performances and manufacturing yields. In this paper, the performance uncertainty of a MEMS accelerometer due to system parameter uncertainty is analyzed by using several uncertainty analysis methods. Finally, the performance distributions and manufacturing yields of the MEMS accelerometer are predicted.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.5
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• pp.1-8
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• 2022

Fused deposition modeling (FDM), based on stacking a continuous filament of polymer or composite materials, is well matured and is thus widely used in additive manufacturing technology. To advance FDM-based 3D printing technology, the mechanical properties of additively manufactured composite materials must be improved. In this study, we proposed a novel FDM 3D printing process using metal wire-polymer composites, enabling enhanced mechanical properties. In addition, we developed a new type FDM filament of copper wire wrapped in nylon material for stable 3D printing without thermal damage during the printing process. After FDM printing of the copper wire-nylon composite filament, we conducted a tensile test to investigate the mechanical behavior of the printed composite materials. The experimental results confirmed that the tensile strength of the 3D-printed metal wire-polymer composites was higher than that of the conventional single polymer material. Thus, we expect that the FDM printing process developed in this study may be promising for high-load-bearing applications.

• International Journal of Precision Engineering and Manufacturing
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• v.1 no.1
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• pp.84-90
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• 2000

The importance of Virtual Manufacturing System is increasing in the area of developing new manufacturing processes, implementing automated workcells, designing plant facility layouts and workplace ergonomics. Virtual manufacturing system is a computer system that can generate the same information about manufacturing system structure, states, and behaviors as is observed in a real manufacturing. In this research, a virtual manufacturing system for flexible manufacturing cells (VFMC), (which is a useful tool for building Computer Integrated Manufacturing (CIM), has been developed using object-oriented paradigm, and implemented with software QUEST/IGRIP. Three object models used in the system are the product model, the facility model, and the process model. The concrete behaviors of a flexible manufacturing cell are re[presented by the task-oriented description diagram, TIC. An example simulation is executed to evaluate applicability of the developed models, and to prove the potential value of virtual manufacturing paradigm.

• Journal of Mechanical Science and Technology
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• v.18 no.4
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• pp.606-621
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• 2004

A dynamic analysis using a hybrid finite element method was performed to characterize the effects of a number of manufacturing errors on bearing forces and critical tooth stress in the elements of a planetary gear system. Some tolerance control guidelines for managing bearing forces and critical stress are deduced from the results. The carrier indexing error for the planet assembly and planet runout error are the most critical factors in reducing the planet bearing force and maximizing load sharing, as well as in reducing the critical stress.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.4
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• pp.374-385
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• 2015

In this paper, effective and user friendly CAM software is presented that automatically generates any three dimensional complex toolpaths according to a CAD drawing. In advanced manufacturing, often it is essential to scan the sample following a complex trajectory which consists of short (few microns) and multidirectional moves. The reported CAM software offers constant velocity for all short trajectory elements and provides an efficient shift of tool path direction in sharp corners of a tool trajectory, which is vital for any laser, based precision machining. The software also provides fast modification of tool path, automatic and efficient sequencing of path elements in a complicated tool trajectory, location of reference point and automatic fixing of geometrical errors in imported drawing exchange files (DXF) or DWG format files.

• Journal of Aerospace System Engineering
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• v.14 no.4
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• pp.25-31
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• 2020

The development of manufacturing technology for braided composites has led to farther extension of the applications in aerospace structures. Since the mechanical characteristics of braided composites are affected by various materials and manufacturing parameters, it is important to determine the parameters required to appropriately design the braided composite structures. In this study, we proposed a geometric model of RUC (repeating unit cell) for 2D braided composites, and predicted the mechanical properties according to the change of fiber volume fraction, fiber filament size, braiding angle, and gap between adjacent yarns by the yarn slicing technique and stress averaging method. Finally, we analyze the characteristics of mechanical properties according to each manufacturing parameter of the braided composite material.

• Advances in Computational Design
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• v.4 no.1
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• pp.43-52
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• 2019

Variation Analysis (VA) is used to simulate final product variation, taking into consideration part manufacturing and assembly variations. In VA, all the manufacturing and assembly processes are defined at the product design stage. Process Capability Data Bases (PCDB) provide information about measured variation from previous products and processes and allow the designer to apply this to the new product. A new challenge to this traditional approach is posed by the Industry 4.0 (I4.0) revolution, where Smart Manufacturing (SM) is applied. The manufacturing intelligence and adaptability characteristics of SM make present PCDBs obsolete. Current tolerance analysis methods, which are made for discrete assembly products, are also challenged. This paper discusses the differences expected in future factories relevant to VA, and the approaches required to meet this challenge. Current processes are mapped using I4.0 philosophy and gaps are analysed for potential approaches for tolerance analysis tools. Matching points of simulation capability and I4.0 intents are identified as opportunities. Applying conditional variations, incorporating levels of adjustability, and the un-suitability of present Monte Carlo simulation due to changed mass production characteristics, are considered as major challenges. Opportunities including predicting residual stresses in the final product and linking them to product deterioration, calculating non-dimensional performances and extending simulations for process manufactured products, such as drugs, food products etc. are additional winning aspects for next generation VA tools.