• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.651-652
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• 2005

Chemical mechanical polishing (CMP) has emerged as the planarization technique of choice in integrated circuit manufacturing. Especially, polishing pad is considered as one of the most important consumables because of its properties. Generally, conventional polishing pad has irregular pores and asperities. If conditioning process is except from whole polishing process, smoothing of asperities and pore glazing occur on the surface of the pad, so repeatability of polishing performances cannot be expected. In this paper, CMP pad with microstructure was made using micro-molding technology and repeatability of ILD(interlayer dielectric) CMP performances and was evaluated.

• Journal of Magnetics
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• 제20권1호
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• pp.69-78
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• 2015

This paper focuses on the design of a flux-biased rotary electromagnetic actuator with compact structure for fast steering mirror (FSM). The actuator has high force density and its torque output shows linear dependence on both excitation current and rotation angle. Benefiting from a new electromagnetic topology, no additional axial force is generated and an armature with small moment of inertia is achieved. To improve modeling accuracy, the actuator is modeled with flux leakage taken into account. In order to achieve an FSM with good performance, a design methodology is presented. The methodology aims to achieve a balance between torque output, torque density and required coil magnetomotive force. By using the design methodology, the actuator which will be used to drive our FSM is achieved. The finite element simulation results validate the design results, along with the concept design, magnetic analysis and torque output model.

• 한국재료학회지
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• 제29권3호
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• pp.160-166
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• 2019

This study investigates the effect of thermo-mechanical treatment on the damping capacity of the Fe-20Mn-12Cr-3Ni-3Si alloy with deformation induced martensite transformation. Dislocation, ${\alpha}^{\prime}$ and ${\varepsilon}-martensite$ are formed, and the grain size is refined by deformation and thermo-mechanical treatment. With an increasing number cycles in the thermo-mechanical treatment, the volume fraction of ${\varepsilon}-martensite$ increases and then decreases, whereas dislocation and ${\alpha}^{\prime}-martensite$ increases, and the grain size is refined. In thermo-mechanical treated specimens with five cycles, more than 10 % of the volume fraction of ${\varepsilon}-martensite$ and less than 3 % of the volume fraction of ${\alpha}^{\prime}-martensite$ are attained. Damping capacity decreases by thermo-mechanical treatment and with an increasing number of cycles of thermo-mechanical treatment, and this result shows an opposite tendency for general metal with deformation induced martensite transformation. The damping capacity of the thermo-mechanical treated damping alloy with deformation induced martensite transformation greatly affect the formation of dislocation, grain refining and ${\alpha}^{\prime}-martensite$ and then ${\varepsilon}-martensite$ formation by thermo-mechanical treatment.

• 한국기계가공학회지
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• 제18권4호
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• pp.109-116
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• 2019

The mechanical deformation of a battery separator causes internal short-circuiting of the cathode - anode, which directly affects the explosion/ignition of batteries. To increase the mechanical properties of the separator fabricated by electro-spinning, use of a thermal pressing method is inevitable. Therefore, this research aims to maximize the mechanical strength of a porous separator by finding the proper thermal press temperatures given to Electro-spun Polyacrylonitrile (PAN) nanofibers. The different thermal press temperatures $25^{\circ}C$, $50^{\circ}C$, $75^{\circ}C$, and $100^{\circ}C$ were applied to the electro-spun fiber at 30 MPa pressure for one hour. The higher the temperature, the higher the resultant tensile strength; however, a higher temperature also lowered the strain and porosity. Thus, the membrane thermal pressed at $50^{\circ}C$ showed the best mechanical properties and the second highest porosity. Using the data, $50^{\circ}C$ was judged as the best thermal pressing temperature in terms of performance.

• Structural Engineering and Mechanics
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• 제82권4호
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• pp.417-434
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• 2022

In this work, a review of mechanical metamaterials and seismic protection systems that use them is carried out, focusing on passive protection systems. During the last years, a wide variety of classical systems of seismic protection have demonstrated to be an effective and practical way of reducing the seismic vulnerability of buildings, maintaining their health and structural integrity. However, with the emergence of metamaterials, which allow obtaining uncommon mechanical properties, new procedures and devices with high performance have been developed, reducing the seismic risk through novel approaches such as: seismic shields and the redirection of seismic waves; the use of stop band gaps and the construction of buried mass resonators; the design of pentamodal base isolators. These ideas are impacting traditional areas of structural engineering such as the design and building of highly efficient base isolation systems. In this work, recent advances in new seismic protection technologies and researches that integrate mechanical metamaterials are presented. A complete bibliometric analysis was carried out to identify and classify relevant authors and works related with passive seismic protection system based on mechanical metamaterial (pSPSmMMs). Finally, possible future scenarios for study and development of seismic isolators based on mechanical metamaterials are shown, identifying the relevant topics that have not yet been explored, as well as those with the greatest potential for future application.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.317-318
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• 2012

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 2004년도 추계학술발표회 발표논문집
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• pp.1305-1306
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• 2004

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 12th Asian Congress of Fluid Mechanics
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• pp.47.1-47.1
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• 2008

• Journal of Mechanical Science and Technology
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• 제17권11호
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• pp.1714-1724
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• 2003

Feedback strategies of a qualitative competitive game between two players can be designed such as to influence parameters of a mechanical system to induce chaotic behavior. The purpose is to reduce the options and effects of the opponent's strategy. We show it on a case with dynamics specified by a nonautonomous Duffing equation with the players represented by damping and external forcing, respectively. It seems however that the conclusions can be made valid generally.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제36회 동계학술대회 초록집
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• pp.92.1-92.1
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• 2009