• Title/Summary/Keyword: Maxwell Model

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Study on Chucking Force and Substrate Deformation Characteristics of Electrostatic Chuck for Deposition According to Substrate Sizes (증착용 정전척의 기판 크기에 따른 척킹력 및 기판 변형 특성 연구)

  • Seong Bin Kim;Dong Kyun Min
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.2
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    • pp.12-18
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    • 2024
  • A Electrostatic chuck is a device that fixes the substrate, using the force between charges applied between two parallel plates to attract substrates such as wafers or OLED panels. Unlike mechanical suction methods, which rely on physical fixation, this method utilizes the force of electrostatics for fixation, making it important to verify the adhesion force. As the size of the substrate increases, deformations due to gravity or chucking force also increase, and the adhesion force decreases rapidly as the distance between the chuck and the substrate increases. The outlook for displays is shifting from small to large OLEDs, necessitating consideration of substrate deformations. In this paper, to confirm the deformation of the substrate through various patterns, a simplified 2D model using Ansys' electromagnetic field analysis program, Maxwell, and the static structural analysis program, Mechanical, was utilized to observe changes in adhesion force according to the variation in the air gap between the substrate and the chuck. Additionally, the chucking force was analyzed for the size of the substrate, and the deformation of the substrate was confirmed when gravity and chucking force act simultaneously.

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Faults Analysis and Dynamic Simulation Method for Poly-Phase PM Synchronous Motor (다상 영구자석 동기전동기의 고장특성 해석에 관한 연구)

  • Choi, Se-Kwon;Cho, Jun-Seok;Kim, Ju-Yong;Jung, Tae-Uk
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.826_827
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    • 2009
  • This paper introduces major potential faults of Poly-Phase Permanent Magnet Synchronous Motor and their simulation realization methods. The faults of Poly-Phase PM Synchronous Motor, generally, stator turn faults, demagnetizing field. Based on the derived expressions, Poly-Phase PM synchronous Motor simulation model, which is capable of representing stator turn faults, is implemented in Maxwell.

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AC Loss Calculation in High Temperature Superconductors Using Slab model (Slab모델을 이용한 HTS AC 손실의 계산)

  • 최세용;주진호;류경우;나완수
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2001.02a
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    • pp.102-103
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    • 2001
  • In this paper we calculate the AC Loss in the superconducting slab carrying ac transport current. Magnetic diffusion equation for computation of the electric field and current distribution are based on Maxwell's equations and non-linear constitutive equation. The E-J characteristics of superconductor are applied to computation. We will present the result of the high-temperature superconductor case comparison with the slab of low temperature superconductor.

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Characteristic Analysis of Two-Phase SRM with Single Diode Bridge Rectifier (단상 다이오드 브리지 정류기를 갖는 2상 SRM 특성해석)

  • Lee, Chan-Gyo;Oh, Ju-Hwan;Kwon, Byung-Il
    • Proceedings of the KIEE Conference
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    • 2005.10c
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    • pp.89-91
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    • 2005
  • In This paper the convertor topology using single diode bridge rectifier for the now two-phase switched reluctance motor is proposed. The single diode bridge rectifier is supplied by the Ac voltage source. The nonlinear model of two-phase SRM is implement by maxwell and result show the photographic.

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Design of Coaxial Magnetic Gear for Improvement of Torque Characteristics

  • Shin, H.M.;Chang, J.H.
    • Journal of Magnetics
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    • v.19 no.4
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    • pp.393-398
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    • 2014
  • This paper proposes new types of models that have coaxial magnetic gear (CMG) configurations to increase torque transmission capability. They have flux concentrating structures at the outer low speed rotor, and permanent magnets (PMs) are embedded in the space between stationary pole pieces. The torque performances of the proposed models are compared with those of a basic CMG model. The harmonic torque components due to air gap field harmonics are also analyzed to investigate the torque contribution of each harmonic by using finite element analysis (FEA) and the Maxwell stress tensor. The proposed CMG model is optimized to have high torque density with low torque ripples by response surface methodology (RSM). Compared to the basic CMG model, the proposed model has a huge increase in transmitted torque density, and is very advantageous in term of PM use.

Development of Discharge Model and Preventive Diagnosis Program for Discharge Risk Assessment of Charged Human Body (대전인체의 방전위험성 평가를 위한 모델 및 예방진단 프로그램 개발)

  • 김두현;김상철;고은영
    • Journal of the Korean Society of Safety
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    • v.13 no.3
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    • pp.80-87
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    • 1998
  • This paper presents a study on the development of discharge model and computer program for assessing the risk of electrostatic discharge(ESD) of charged human body This ESD event is modelled as a two-body problem using spherical conductors, simulating the approach of a charged conductor (human body) to a second conductor (electronic equipment). The charge/discharge process for the model is formulated as a matrix of equations by Maxwell's method. Body potentials, energies and the charge transfer during a discharge are calculated. The developed program, based on the suggested scheme in this paper, is applied to a sample system. The results provide a better understanding of ESD event and demonstrate the usefulness of two-body model in practical applications.

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A Fast Analytic Model of Axial Flux Permanent Magnet Machines with Static/Dynamic Axis Eccentricity

  • Guo, Baocheng;Huang, Yunkai
    • Journal of Magnetics
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    • v.21 no.4
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    • pp.554-560
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    • 2016
  • This paper presents a general analytical model to calculate the characteristics of axial-flux permanent-magnet machines with axis eccentricities. The radial and tangential magnetic flux densities in the air gap under normal conditions were first obtained using a combination of Maxwell's equations and Schwarz-Christoffel (SC) transformation. Next, equations for the radii were deduced to investigate the static/dynamic eccentricities. The back electromotive forces (EMFs) were calculated and compared with those obtained from finite element (FE) analysis. The analytical predictions show good agreement with the FE results. Detection approaches were obtained by comparing with normal conditions, and the analytical model was verified experimentally.

Rheological Properties of Rough Rice(I) -Stress Relaxation of Rough Rice Kernel- (벼의 리올러지 특성(特性)(I) -곡립(穀粒)의 응력이완(應力弛緩)-)

  • Kim, M.S.;Kim, S.R.;Park, J.M.
    • Journal of Biosystems Engineering
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    • v.15 no.3
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    • pp.207-218
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    • 1990
  • Grains display characteristics of both elastic bodies and viscous fluids when they are subjected to mechanical treatments in harvesting, handling, and processing. This viscoelastic behavior of grains when mechanically stressed must be fully understood to establish maximum machine efficiency and have a minimum degree of grain damage and the highest quality of the final product. The studies were conducted to examine the effect of the moisture content, the loading rate and the initial deformation on the stress relaxation behavior of whole kernel of rough rice, and develop the rheological model to represent its stress relaxation behavior. The following results were obtained from the study. 1. Moisture content had the greatest influence on the initial portion of the relaxation curve. With elapsing time the lower moisture content resulted in the lower residual stress for the Japonica-type rough rice and vice versa for the Indica-type rough rice. But within the ranges of moisture content tested, the degree of stress relaxation per unit strain on the Indica-type rough rice was a little higher than those on the Japonica-type rough rice. 2. The slower loading rate resulted in less initial stress. The decreasing trend of residual stress for all the samples tested with increasing loading rate was shown. 3. The higher initial deformation for all the samples resulted in less initial stress. The increasing of amount of stress relaxation per unit strain with increase of initial stress indicated that viscoelastic properties of rough rice depended not only upon duration of load applied but also initial stress applied. This means that rough rice is nonlinear viscoelastic material. 4. The compression stress relaxation properties of rough rice kernel can be described by a generalized Maxwell model representing by the Maxwell elements.

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Magnetic Field Analysis for Development of Magnetic Torquer

  • Yim, Jo-Ryeong;Lee, Seon-ho;Rhee, Seung-Wu
    • Bulletin of the Korean Space Science Society
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    • 2003.10a
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    • pp.63-63
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    • 2003
  • There are many actuators and sensors used for attitude control system for KOMPSAT such as Reaction Wheel Assembly, Magnetic Torque Assembly, Dual Thruster Module, Solar array Drive, Three Axis Magnetometer, Conical Earth Sensor, Fine Sun Sensor Assembly, Coarse Sun Sensor Assembly, Gyro Reference Assembly and so on. For KOMPSA T satellite it has been considered using the Magnetic Torquer (MTQ) generating the magnetic dipole moment. In general, the magnetic dipole moment for satellite attitude control system is used for dumping out the excessive reaction wheel momentum so that the reaction wheel speed is not saturated. The objective of this study is to analyze the magnetic field characteristics generated by the Magnetic Torquer using the Maxwell 2D Field Simulator software. Currently, the developing model (DM) of the MTQ is being developed and manufactured at a company under the supervision of KARL MTQ is an electromagnet consisting of a ferromagnetic cylindrical core on which an excitation coil is wound. A current is passed through the coil to produce a dipole momentum in the ferromagnetic core. The configuration of the MTQ will be introduced in the presentation. The 2 dimensional model of the MTQ is drawn as axisymmetric models in RZ plane, and each corresponding material is assigned to the each MTQ object, the core, coil, and background. After the boundary conditions, current sources, and solution parameters are set up, the magnetic field intensities, directions, and other values specified by users can be calculated by using the finite element analysis. The theoretical magnetic field quantities obtained by the Maxwell 2D Simulator can be used for the basis of the development of the MTQ.

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Photo Displacement Properties of Nano structure Organic Ultra Thin Films (통신용 부품제작을 위한 유기초박막의 전자특성에 관한 연구)

  • Song, Jin-Won;Cho, Su-Young;Kim, Young-Gun;Kim, Hyung-Gon;Lee, Kyung-Sup
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11b
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    • pp.27-32
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    • 2004
  • Maxwell displacement current (MDC) measurement has been employed to study the dielectric property of Langmuir-films. MDC flowing across monolayers is analyzed using a rod-like molecular model. A method for determining the dielectric relaxation time ${\tau}$ of floating 'monolayers on the water surface is presented. MDC floing across monolayers is analyzed using a rod-like molecular model. It is revealed that the dielectric relaxation time ${\tau}$ of monolayers in the isotropic polar orientational phase is determined using a liner relationship between the monolayer compression speed a and the molecular area Am. Compression speed a was about 30,40,50mm/min. LB layers of Arachidic acid deposited by LB method were deposited onto slide glass as Y-type film.The physicochemical properties of the LB films were examined by UV absorption spectrum, SEM and AFM. The structure of manufactured device is Au/Arachidic acid/Al, the number of accumulated layers are 3~9. Also, we then examined of the MIM device by means of I-V characteristic of the device is measured from -3 to +3[V]. The insulation property of a thin film is better as the distance between electrodes is larger.

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