• 한국생산제조학회지
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• 제19권2호
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• pp.184-190
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• 2010

Recently, the polishing process using magnetorheological fluids(MR fluids) has been focused as a new ultra-precision polishing technology for micro and optical parts such as aspheric lenses, etc. This method uses MR fluid as a polishing media which contains required micro abrasives. In the MR polishing process, the surface roughness and material removal rate of a workpiece are affected by the process parameters, such as the properties of used nonmagnetic abrasives(particle material, size, aspect ratio and density, etc.), rotating wheel speed, imposed magnetic flux density and feed rate, etc. The objective of this research is to predict MRR according to the polishing conditions based on the multiple regression analysis. Three polishing parameters such as wheel speed, feed rates and current value were optimized. For experimental works, an orthogonal array L27(313) was used based on DOE(Design of Experiments), and ANOVA(Analysis of Variance) was carried out. Finally, it was possible to recognize that the sequence of the factors affecting MRR correspond to feed rate, current and wheel speed, and to determine a combination of optimal polishing conditions.

• 상하수도학회지
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• 제9권2호
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• pp.97-107
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• 1995

Today a conventional water treatment system has many problems. The ozone/GAC process, sometimes termed Biological Activated Carbon(BAC), appeared to be effective for the removal of soluble organic matters in the drinking water. The water quality of Nak-dong river in Pusan, generally shows BDOC 30-40% and NBDOC 60-70%. The pilot plant installed at the Duk-san water works that was been largest treatability(1,650,000ton/day) in Pusan. A experimental water in the pilot plant made use of the water after sand-filteration. Following results are drawn from this study. Initial adsorption velocity($DOC/DOC_o/T$) in the pure adsorption of GAG had a 0.0225, it's velocity changed to 0.006 after ozone added and the optimum ozone dose ranged of $1.4-2.0mgO_3/L$. A experimental water in the pilot plant composed with humic material(78%). Humic material composed with humic acid(20%) and fulvic acid(56%), and it's rate changed to 18 and 50% respectively after ozone added. DOC constantly decreased in the EBCTs and removal efficieny in the 15min of EBCT was 45-50%. It showed the largest removal rate of BDOC in the EBCT 5 and among the season, characteristics of removal varied. The HPC distributed over $10^6-10^7CFU/cm^3$ in the bed depth and among the season, distribution of HPC were differential.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.46-49
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• 2003

Chemical mechanical polishing (CMP) is an essential dielectric planarization in multilayer microelectronic device fabrication. In the CMP process it is necessary to minimize the extent of surface defect formation while maintaining good planarity and optimal material removal rates. The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on W passivation layer, in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5% hydrogen peroxide such as $Fe(NO_3)_3$, $H_2O_2$, and $KIO_3$. The difference in removal rate and roughness of W in stable and unstable slurries are believed to caused by modification in the mechanical behavior of $Al_3O_3$ particles in presence of surfactant stabilizing the slurry.

• 한국전기전자재료학회논문지
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• 제18권4호
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• pp.303-308
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• 2005

In this paper, the effects of oxidants on tungsten chemical mechanical polishing (CMP) process were investigated using three different oxidizers such as Fe(NO₃)₃, KIO₃ and H₂O₂. Moreover, the interaction between the tungsten film and the oxidizer was discussed by potentiodynamic polarization measurement with three different oxidizers, in order to compare the effects of W-CMP and electrochemical characteristics on the tungsten film as a function of oxidizer. As an experimental result, the tungsten removal rate reached a maximum at 5 wt％ Fe(NO₃)₃concentration, and when 5 wt％ H₂O₂was added in the slurry, the removal rate of W increased. Also, the microstructures of surface layer by atomic force microscopy(AFM) image were greatly influenced by the slurry chemical composition of oxidizers. It was shown that the surface roughness and removal rate of the polished surface were improved in Fe(NO₃)₃than KIO₃. The electrochemical results indicate that the corrosion current density of the 5 wt％ H₂O₂ and 5 wt％ H₂O/sub 2+/＋ 5 wt％ Fe(NO₃)₃was higher than the other oxidizers. Therefore, we conclude that the W-CMP characteristics are strongly dependent on the kinds of oxidizers and the amounts of oxidizer additive.

• 한국정밀공학회지
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• 제32권1호
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• pp.69-74
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• 2015

Cadmium telluride (CdTe) is being developed for thin film of the X-Ray detector recently. But a rough surface of the CdTe should be improved for resolution and signal speed. This paper shows the study on the improvement of surface roughness and removal rate by applying Chemical Mechanical Polishing. The conventional potassium hydroxide (KOH) based colloidal silica slurry could not realize a mirror surface without physical defects, resulting in low material removal rate and many scratches on surface. In order to enhance chemical reaction such as form oxidized layer on the surface of cadmium telluride, we used hydrogen peroxide ($H_2O_2$) as an oxidizer. Consequently, in case of 3 wt% concentration of hydrogen peroxide, the highest MRR (938 nm/min) and the lowest surface roughness ($R_{p-v}=10.69nm$, $R_a=0.8nm$) could be obtained. EDS was also used to confirm the generated oxide of cadmium telluride surface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.41-44
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• 2003

As the device feature size is reduced to the deep sub-micron regime, the chemical mechanical polishing (CMP) technology is widely recognized as the most promising method to achieve the global planarization of the multilevel interconnection for ULSI applications. However, cost of ownership (COO) and cost of consumables (COC) were relatively increased because of expensive slurry. In this paper, the effects of different slurry composition on the oxide CMP characteristics were investigated to obtain the higher removal rate and lower non-uniformity. We prepared the various kinds of slurry. In order to save the costs of slurry, the original slurry was diluted by de-ionized water (DIW). And then, alunima abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry.

• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.39-43
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• 2008

Atmospheric pressure plasma polishing (APPP) is a noncontact precision machining technology that uses low temperature plasma chemical reactions to perform atom-scale material removal. APPP is a complicated process, which is affected by many factors. Through a preliminary theoretical analysis and simulation, we confirmed that some of the key factors are the radio frequency (RF) power, the working distance, and the gas ratio. We studied the influence of the RF power and gas ratio on the removal rate using atomic emission spectroscopy, and determined the removal profiles in actual operation using a commercial form talysurf. The experimental results agreed closely with the theoretical simulations and confirmed the effect of the working distance. Finally, we determined the element compositions of the machined surfaces under different gas ratios using X-ray photoelectron spectroscopy to study the influence of the gas ratio in more detail. We achieved a surface roughness of Ra 0.6 nm on silicon wafers with a peak removal rate of approximately 32 $mm^{3}$/min.

• KSBB Journal
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• 제23권6호
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• pp.535-540
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• 2008

In this study, the effects of several factors such as initial nitrate concentration, C/N ratio, biomass amount and external carbon source on denitrification process were investigated using synthetic wastewater and sludge obtained from wastewater treatment facility. As a result, the condition of lower initial nitrate concentration was increased to the removal rate of nitrate than that of high concentration. The increases of C/N ratio and initial biomass amount were linearly enhanced the removal rate. The use of ethanol as external carbon source was shown the highest removal yield than that of others.

• Journal of Advanced Marine Engineering and Technology
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• 제22권6호
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• pp.809-815
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• 1998

This study has been performed to investigate MRR(metal removal rate) surface roughness with various pulse-on duration using the copper and graphite electrode according to the electrode size on the heat treated STD 11 which is extensively used for metallic molding steel in the EDM. The results obtained are as follow ;a)MRR increases a lot when pulse-on duration is 100 $\mu{s}$ or less but MRR has little difference with pulse-on duration of 100 $\mu{s}$ or more b) According to the increase of Pulse-on duration the large the electrode size the more MRR c) Safe discharge is needed to make maximum of MRR and the metallic organization must be complicated for discharge induction. d) Actual machining time is longer than theoretical machining time at the short pulse-on duration because of skin effect of current. e) Graphite electrode needs the larger electric discharge energy than copper electrode to remove remained chips completely.

• 한국안전학회지
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• 제19권3호
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• pp.40-44
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• 2004

To the removal of hardness materials, we've test the absorptive capacity of main material $Mg^{2+},\;Ca^{2+}$ on the using the activated carbon powder saturated in 0.1M Nitrilotriacetic acid by experimental methods. The absorptive properties of $Ca^{2+}\;and\;Mg^{2+}$ were measured with absorbent quantity and contact time., and investigated the physical properties of overall rate constant and adsorption constant adsorption isotherm, and Langmuir and Freundlich constant. In case of k' adsorption rate constants of $Ca^{2+},\;Mg^{2+}$, was 0.00299, 0.00529 by Bhattahary and Venkobachar equation. $k_{aa}$ was 0.00373, 0.00640 according with adsorption rate constants of Lagergren.