• 제목/요약/키워드: Material Erosion

검색결과 325건 처리시간 0.029초

친수성 고분자를 이용한 고정입자패드의 텅스텐 CMP (Tungsten CMP in Fixed Abrasive Pad using Hydrophilic Polymer)

  • 박범영;김호윤;김형재;김구연;정해도
    • 한국정밀공학회지
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    • 제21권7호
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    • pp.22-29
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    • 2004
  • As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

하상재료가 침식-퇴적 양상에 미치는 영향 분석 (Impact of Bed Material on Erosion-deposition Patterns)

  • 반채웅;이선민;최성욱
    • 한국수자원학회:학술대회논문집
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    • 한국수자원학회 2017년도 학술발표회
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    • pp.111-111
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    • 2017
  • 본 연구에서는 2차원 하상변동 모형을 이용하여 sine 곡선형 개수로에서 하상재료의 분포가 침식-퇴적 양상에 미치는 영향을 분석하였다. 흐름 해석을 위하여 유한차분법을 이용하여 천수방정식을 해석하였다. 총유사량을 산정하기 위하여 Engelund-Hansen 공식을 이용하였으며, 하상변동을 모의하기 위하여 Exner 방정식을 해석하였다. 또한 모형을 sine 곡선형 수로의 실내실험에 적용하여 검증하였다. 하천의 지형형태학적 발달 과정을 체계적으로 분석하기 위하여, 이상화된 sine 곡선형 수로에 사행도, 폭-파장비, 폭-수심비 등의 인자를 고정시키고, 하상재료의 입경을 종속변수로 설정하여 수치실험을 수행하였다. 하상재료의 입경을 변화시켜 가며 흐름과 하상변동 결과를 비교하고 분석하였다.

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Sliding Wear and Corrosion Resistance of Copper-based Overhead Catenary for Traction Systems

  • Kwok, C.T.;Wong, P.K.;Man, H.C.;Cheng, F.T.
    • International Journal of Railway
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    • 제3권1호
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    • pp.19-27
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    • 2010
  • In the present study, the electrical sliding wear and corrosion resistance of pure copper (Cu) and six age-hardened copper alloys (CuCr, CuZr, CuCrZr, CuNiSiCr, CuBe and CuBeNi) were investigated by a pin-on-disc tribometer and electrochemical measurement. Various copper-based alloys in the form of cylindrical pin were forced to slide against a counterface stainless steel disc in air under unlubricated condition at a sliding velocity of 31 km/h under normal load up to 20 N with and without electric current. The worn surface of and wear debris from the specimens were studied by scanning electron microscopy. Both mechanical wear and electrical arc erosion were the wear mechanisms for the alloys worn at 50 A. Owing to its good electrical conductivity, high wear and corrosion resistance, CuCrZr is a promising candidate as the overhead catenary material for electric traction systems.

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Evaluation of the effect of rubble mound on pile through dynamic centrifuge model tests

  • Jungwon Yun;Jintae Han
    • Geomechanics and Engineering
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    • 제33권4호
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    • pp.415-425
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    • 2023
  • Pile-supported wharves, port structures that support the upper deck, are installed on sloping ground. The sloping ground should be covered with a rubble mound or artificial blocks to protect the interior material from erosion caused by wave force. The behavior of the pile may vary during an earthquake if a rubble mound is installed on the slope. However, studies evaluating the effect of rubble mound on the pile during an earthquake are limited. Here, we performed dynamic centrifuge model tests to evaluate the dynamic behavior of piles installed in a slope reinforced with rubble mound. In the structure, some sections (single-pile, 2×2 group-pile) were selected for the experiment. The moment of the group-pile decreased by up to 26% upon installation of the rubble mound, whereas the moment of the single-pile increased by up to 41%, thus demonstrating conflicting results.

장기 모니터링을 통한 독도 자연사면의 토층 변화 분석 (Long-Term Monitoring and Analysis of Changes in the Soil Layer on Dokdo)

  • 김경수;송영석;윤대성;방은석
    • 지질공학
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    • 제34권2호
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    • pp.163-171
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    • 2024
  • 독도의 토층 변화는 독도에 대한 학술적 가치와 함께 독도의 지속가능한 보전 및 활용 측면에서 상당히 중요한 의미를 가진다. 또한 독도에 자생하는 식물 및 생물의 발달에 필수적인 토대가 되므로 독도의 토층에 대한 지속적인 조사와 관찰이 필요하다. 따라서, 본 연구에서는 독도의 자연사면에 대한 토층 변화를 측정하기 위하여 내구성이 우수하고 설치 및 관리가 간편하며, 측정이 용이한 지표침식측정계를 설치하였다. 지표침식측정계는 길이 30~50 cm, 직경 1.5 cm의 강봉 형태이며, 해풍으로 인한 부식의 저항성을 높이기 위해 스테인리스 재질로 제작하였다. 그리고 동도와 서도의 토층분포구간을 대상으로 각각 6개씩의 지표침식측정계를 설치하였으며, 2014년부터 2021년까지 약 8년 동안 매년 1회에서 3회의 현장 측정을 실시하였다. 측정결과 지표침식측정계가 설치된 동도의 토층에서는 전반적으로 미세하게 퇴적되는 양상을 보였으며, 서도의 경우 동도와 반대로 미세하게 침식되는 양상이 나타났다. 동도에 설치된 지표침식측정계는 비교적 동도의 중간 혹은 하부지역에 설치되어 있으므로 동도의 토층 변화는 상부에 존재하는 토층에서의 풍화에 의한 침식 혹은 토사유출로 인하여 주로 퇴적되는 양상이 나타났다. 그러나 서도에 설치된 지표침식측정계는 서도의 상부 혹은 중간지역에 설치되어 있으므로 서도의 토층에서는 풍화로 인한 침식 및 유출이 직접 발생되었을 것으로 판단된다.

황폐임야(荒廢林野)가 수해참상(水害慘狀)에 미치는 영향(影響) (천보산(天寶山)과 인접(隣接) 죽엽산(竹葉山)을 중심(中心)으로) (Influences of the devastated forest lands on flood damages (Observed at Chonbo and the neighbouring Mt. Jook-yop area))

  • 정인구
    • 한국산림과학회지
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    • 제5권1호
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    • pp.4-9
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    • 1966
  • 1. On 13 September 1964 a storm raged for 3 hours and 20 minutes with pounding heavy rainfalls, and precipitation of 287.5 mm was recorded on that day. The numerous landslides were occured in the eroded forest land neighbouring Mt. Chunbo, while no landslides recorde at all on Mt. Jookyup within the premise of Kwangnung Experiment Station, the Forest Experiment Station. 2. Small-scalled Landslides were occured in 43 different places of watershed area (21.97 ha.) in which the survey had already been done, in and around Mt. Chunbo (378 m a.s.l.). The accumulated soil amount totaled $2,146,56m^3$ due to the above mentioned landslides, while soil accumulated from riverside erosion has reached to $24,168.79m^3$, consisting of soils, stones, and pebbles. However, no landslides were reported in the Mt. Jook yup area because of dense forest covers. The ratio of the eroded soil amount accumulated from the riversides to that of watershed area was 1 to 25. On the other hand, the loss and damage in the research area of Mt. Chonbo are as follows: 28 houses completly destroyed or missing 7 houses partially destroyed 51 men were dead 5 missing, and 57 wounded. It was a terrible human disaster However, no human casualties were recorded at all, 1 house-completly destroyed and missing, 2 houses-partially destroyed. Total:3 houses were destroyed or damaged, in The area of Mt. Jookyup 3. In the calculation of the quanty of accumulated soil, the or mula of "V=1/3h ($a+{\sqrt{ab}}+b$)" was used and it showed that 24, 168.79m of soil, sands, stones and pebbles carried away. 4. Average slope of the stream stood 15 at the time of accident and well found that there was a correlation between the 87% of cross-area sufferd valley erosion and the length of eroded valley, after a study on regression and correlation of the length and cross-area. In other works, the soil erosion was and severe as we approached to the down-stream, counting at a place of average ($15^{\circ}1^{\prime}$) and below. We might draw a correlation such as "Y=ax-b" in terms of the length and cross-area of the eroded valley. 5. Sites of char-coal pits were found in the upper part of the desert-like Mt. Chunbo and a professional opinion shows that the mountain was once covered by the oak three species. Furthermore, we found that the soil of both mountains have been kept the same soil system according to a research of the soil cross-area. In other words, we can draw out the fact that, originally, the forest type and soil type of both Mt. Chunbo (378m) and Mt. Jookyup (610m) have been and are the same. However, Mt. Chunbo has been much more devastated than Mt. Jookyup, and carried away its soil nutrition to the extent that the ratios of N. $P_2O_5K_2O$ and Humus C.E.C between these two mountains are 1:10;1:5 respectively. 6. Mt. Chunbo has been mostly eroded for the past 30 years, and it consists of gravels of 2mm or larger size in the upper part of the mountain, while in the lower foot part, the sandy loam was formulated due to the fact that the gluey soil has been carried and accumulated. On the hand, Mt. Jookyup has consitantly kept the all the same forest type and sandy loam of brown colour both in the upper and lower parts. 7. As for the capability of absorbing and saturating maximum humidity by the surface soil, the ratios of wet soil to dry soil are 42.8% in the hill side and lower part of the eroded Mt. Chunbo and 28.5% in the upper part. On the contrary, Mt. Jookyup on which the forest type has not been changed, shows that the ratio in 77.4% in the hill-side and 68.2% in the upper part, approximately twice as much humidity as Mt. Chunbo. This proves the fact that the forest lands with dense forest covers are much more capable of maintaining water by wood, vegitation, and an organic material. The strength of dreventing from carring away surface soil is great due to the vigorous network of the root systems. 8. As mentioned above, the devastated forest land cause not only much greater devastation, but also human loss and property damage. We must bear in mind that the eroded forest land has taken the valuable soil, which is the very existance of origin of both human being and all creatures. As for the prescription for preventing erosion of forest land, the trees for furtilization has to be planted in the hill,side with at least reasonable amount of aertilizer, in order to restore the strength of earth soil, while in the lower part, thorough erosion control and reforestation, and establishments along the riversides have to be made, so as to restore the forest type.

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마성분지(麻城盆地)의 지형생성작용(地形生成作用) (Geomorphic Processes of Masung Basin)

  • 손명원
    • 한국지역지리학회지
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    • 제2권1호
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    • pp.39-49
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    • 1996
  • 경상북도 문경시 마성면 일대에는 고생대의 퇴적암과 변성암 산지로 둘러싸인 석회암 분지가 형성되어 있다. 이 논문에서는 마성분지의 주변에 분포하는 완만한 구릉지의 지형생성작용을 밝히고자 하였다. 이를 위하여 구릉지에 피복된 퇴적층을 분석하였으며, 구릉지의 종단면에서 거리와 고도 사이의 관계를 검토하였고, 구릉지와 지질과의 상관관계를 고찰하였다. 본 논문에서 밝혀진 마성분지의 지형생성작용을 요약하면 다음과 같다. 첫째, 퇴적층은 구릉지의 말단부로 갈수록 두께가 증가한다. 퇴적층내 대부분의 역은 석회암질이며, 배후산지와 구릉지의 접경부에서 침식된 물질이다. 퇴적층은 분급은 양호하나 imbrication이 불량하다. 둘째, 분지 주변의 구릉지(해발고도 $160{\sim}230m$)는 '유로(流路)를 갖는 유수(流水)'의 작용으로 형성되었다. 지속적인 유수의 작용으로, 경암과 연암이 접하는 경계 부분에서는 상대적으로 약한 석회암이 신선한 기반암까지 침식되어 경사급변점이 나타났다. 셋째, 구릉지 형성 이후 배후산지가 협곡으로 개석되면서 생산된 boulder들이 구릉지의 퇴적층을 피복하였다. 결론적으로 마성분지의 지형생성작용은 화강암 분지의 생성작용으로 제시되었던 '암석의 연경차에 따른 차별침식'과 궤를 같이 하고 있으나, '포상류에 의한 풍화물질의 제거'와는 상이한 것으로 밝혀졌다.

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지반입도조건에 따른 지반함몰 가능성 평가 및 수치해석적 검증 (Evaluation of Land Subsidence Risk Depending on Grain Size and Verification using Numerical Analysis)

  • 이종현;진현식;백용;윤형석
    • 지질공학
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    • 제27권2호
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    • pp.133-141
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    • 2017
  • 본 연구에서는 지반함몰의 실질적 원인인 토립자 유실에 의한 함몰 가능성을 판단하기 위해 댐설계 시 활용되고 있는 코어재와 필터재의 입도 차이에 의한 필터조건을 굴착공사 주변의 지반조건에 대한 평가 조건으로 응용하였다. 이를 위해 여러 제안자들이 실험 등을 통해 제안한 필터 기준을 확인하였으며, 이 중 미공병단에서 제안한 필터조건을 이용하여 지반입도 조건에 따른 지반함몰 가능성을 판단해 보았다. 이를 통해 사용자가 지반조사 정보로부터 획득한 지반입도조건을 이용하여 빠르게 지반함몰 가능성을 판단할 수 있는 평가도표를 작성하였으며, 다양한 굴착 주변의 지층 변화에 따른 지반함몰 가능성을 쉽게 평가해 볼 수 있을 것으로 판단된다. 또한, 입자유동 과정을 모사하기 위해 PFC3D 프로그램을 활용하였으며, 이것은 단순 지하수위 저하에 의한 지반침하 경향을 판단하는 것이 아니라 실질적인 토립자 유실에 의한 지반함몰 예측 및 평가가 지반입도조건을 통해 이루어질 수 있고 이를 수치해석 적으로 검증할 수 있음을 나타낸다.

화학 기계적 연마에서 패드표면 특성이 웨이퍼 불균일도에 미치는 영향 (Pad Surface Characteristics and their Effect on Within Wafer Non-Uniformity in Chemical Mechanical Polishing)

  • 정석훈;이현섭;정문기;신운기;이상직;박범영;김형재;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.58-58
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    • 2009
  • Uniformity related issues in chemical mechanical polishing (CMP) are within wafer non-uniformity (WIWNU), wafer to wafer non-uniformity (WTWNU), planarity and dishing/erosion. Here, the WIWNU that originates from spatial distribution of independent variables such as temperature, sliding distance, down force and material removal rate (MRR) during CMP, relies to spatial dependency. Among various sources of spatial irregularity, hardness and modulus of pad and surface roughness in sources for pad uniformity are great, especially. So, we investigated the spatial variation of pad surface characteristics using pad measuring system (PMS) and roughness measuring system. Reduced peak height ($R_{pk}$) of roughness parameter shows a strong correlation with the removal rate, and the distribution of relative sliding distance onwafer during polishing has an effect on the variation of $R_{pk}$ and WIWNU. Also, the results of pad wear profile thorough developed pad profiler well coincides with the kinematical simulation of conditioning, and it can contribute for the enhancement of WIWNU in CMP process.

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Triode magnetron sputtering system의 제작 및 특성평가 (Characteristic evaluations and production of triode magnetron sputtering system)

  • 김현후;이무영;김광태;윤상현;유환구;김종민;박철현;임기조
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.787-790
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    • 2003
  • A rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of $E{\times}B$ field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

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