• Title/Summary/Keyword: Material Defects

Search Result 1,308, Processing Time 0.037 seconds

Analysis on the defect and scratch of Chemical Mechanical Polishing process (CMP 공정의 Defect 및 Scratch의 유형분석)

  • 김형곤;김철복;정상용;이철인;김태형;장의구;서용진
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2001.11a
    • /
    • pp.189-192
    • /
    • 2001
  • Recently, STI process is getting attention as a necessary technology for making high density of semiconductor by devices isolation method. However, it does have various problems caused by CMP process, such as torn oxide defects, nitride residues on oxide, damages of si active region, contaminations due to post-CMP cleaning, difficulty of accurate end point detection in CMP process, etc. In this work, the various defects induced by CMP process was introduced and the above mentioned Problems of CMP process was examined in detail. Finally, the guideline of future CMP process was presented to reduce the effects of these defects.

  • PDF

Development of an Effective Defect Classification System for Inspection of QFN Semiconductor Packages (QFN 반도체 패키지의 외형 결함 검사를 위한 효과적인 결함 분류 시스템 개발)

  • Kim, Hyo-Jun;Lee, Jung-Seob;Joo, Hyo-Nam;Kim, Joon-Seek
    • Journal of the Institute of Convergence Signal Processing
    • /
    • v.10 no.2
    • /
    • pp.120-126
    • /
    • 2009
  • There are many different types of surface defects on semiconductor Integrated Chips (IC's) caused by various factors during manufacturing process, such as cracks, foreign materials, chip-outs, chips, and voids. These defects must be detected and classified by an inspection system for productivity improvement and effective process control. Among defects, in particular, foreign materials and chips are the most difficult ones to classify accurately. A vision system composed of a carefully designed optical system and a processing algorithm is proposed to detect and classify the defects on QFN(Quad Flat No-leads) packages. The processing algorithm uses features derived from the defect's position and brightness value in the Maximum Likelihood classifier and the optical system is designed to effectively extract the features used in the classifier. In experiments we confirm that this method gives more effective result in classifying foreign materials and chips.

  • PDF

Theoretical Investigation of Edge-modified Zigzag Graphene Nanoribbons by Scandium Metal with Pyridine-like Defects: A Potential Hydrogen Storage Material

  • Mananghaya, Michael
    • Bulletin of the Korean Chemical Society
    • /
    • v.35 no.1
    • /
    • pp.253-256
    • /
    • 2014
  • Functionalization of zigzag graphene nanoribbon (ZGNR) segment containing 120 C atoms with pyridine (3NV-ZGNR) defects was investigated on the basis of density-functional theory (DFT) calculations, results show that edge-modified ZGNRs by Sc can adsorb multiple hydrogen molecules in a quasi-molecular fashion, thereby can be a potential candidate for hydrogen storage. The stability of Sc functionalization is dictated by a strong binding energy, suggesting a reduction of clustering of metal atoms over the metal-decorated ZGNR.

The Effect of Specimen Size on Liquid Segregation in Deformation Behavior of Mushy State Material (고액공존재료의 변형거동에서 재료의 크기가 액상편석에 미치는 영향)

  • 윤성원;서판기;강충길
    • Transactions of Materials Processing
    • /
    • v.12 no.2
    • /
    • pp.94-101
    • /
    • 2003
  • For the optimal net shape forging of S semi-solid materials (SSM), it is important to predict the deformation behavior and defects of materials. Among these defects, liquid segregation is detrimental to produce products with good mechanical properties. Moreover, to apply a numerical method to thixoforging, it is very important to prevent a liquid segregation during forming process. The liquid segregation phenomena in deformation behavior of semi-solid material with variation of test specimen size were studied. The SSM compression tests were performed by dynamic material test system with a furnace. Stress-strain curves and microstructures of SSM were investigated, and Porosities were analyzed to evaluate the effects of experiment parameters on liquid segregation.

Reconstruction of large oroantral defects using a pedicled buccal fat pad

  • Yang, Sunin;Jee, Yu-Jin;Ryu, Dong-mok
    • Maxillofacial Plastic and Reconstructive Surgery
    • /
    • v.40
    • /
    • pp.7.1-7.5
    • /
    • 2018
  • Background: Oroantral communicating defects, characterized by a connection between the maxillary sinus and the oral cavity, are often induced by tooth extraction, removal of cysts and benign tumors, and resection of malignant tumors. The surgical defect may develop into an oroantral fistula, with resultant patient discomfort and chronic maxillary sinusitis. Small defects may close spontaneously; however, large oroantral defects generally require reconstruction. These large defects can be reconstructed with skin grafts and vascularized free flaps with or without bone graft. However, such surgical techniques are complex and technically difficult. A buccal fat pad is an effective, reliable, and straightforward material for reconstruction. Case presentation: This report describes three cases of reconstruction of large oroantral defects, all of which were covered by a pedicled buccal fat pad. Follow-up photography and radiologic imaging showed successful closure of the oroantral defects. Furthermore, there were no operative site complications, and no patient reported postsurgical discomfort. Conclusion: In conclusion, the use of the pedicled buccal fat pad is a reliable, safe, and successful method for the reconstruction of large oroantral defects.

Annealing effects of AgInS$_2$/GaAs Epilayer grown by Hot Wall Epitaxy

  • K. J. Hong;Park, C.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2001.07a
    • /
    • pp.823-827
    • /
    • 2001
  • The AgInS$_2$epilayers with chalcopyrite structure grown by using a hot-wall epitaxy (HWE) method have been confirmed to be a high quality crystal. From the optical absorption measurement, the temperature dependence of the energy band gap on the AgInS$_2$/GaAs was derived as the Varshni's relation of Eg(T)=2.1365 eV-(9.89${\times}$10$\^$-3/ eV)T$^2$/(2930+T). After the as-grown AgInS$_2$/GaAs was annealed in Ag-,S-, and In-atmosphere, the origin of point defects of the AgInS$_2$/GaAs has been investigated by using the photoluminescence (PL) at 10 K. The native defects of V$\_$Ag/, V$\_$s/, Ag$\_$int/, and S$\_$int/ obtained from PL measurement were classified to donors or acceptors type. And, we concluded that the heat-treatment in the S-atmosphere converted the AgInS$_2$/GaAs to optical p-type. Also, we confirmed that the In in the AgInS$_2$/GaAs did net from the native defects because the In in AgInS$_2$did exist as the form of stable bonds.

  • PDF

Lock-In Thermography Based NDT of Parts for the Automotive Industry

  • Bohm, Stefan;Hellmanns, Mark;Backes, Andreas;Dilger, Klaus
    • Journal of Adhesion and Interface
    • /
    • v.7 no.4
    • /
    • pp.10-12
    • /
    • 2006
  • The successful use of adhesively bonded parts depends on the defect-free bond of the components. Therefore it is necessary to detect relevant faults and defects in an early state of the production. A 100% test should be pursued, but especially at complicated structures the detection of defects is not easy. Possible testing methods, which show a high potential for the NDT of adhesively bonded parts, are thermography based NDT methods. At present mainly two different procedures of active thermography are being used: Pulse and Lock-In Thermography. With pulse thermography the examined material is warmed up with a short energy pulse (light, eddy current or ultrasonic pulse) and the heat response is recorded after a certain time. The result is an infrared image which indicates material defects in different depths. This paper presents a variety of images showing the capability of Lock-In Thermography to image subsurface defects. Several examples of adhesives joints qualify the ultrasonic Lock-In-Thermography for the in-process quality control for adhesive bonded components.

  • PDF

Primary damage of 10 keV Ga PKA in bulk GaN material under different temperatures

  • He, Huan;He, Chaohui;Zhang, Jiahui;Liao, Wenlong;Zang, Hang;Li, Yonghong;Liu, Wenbo
    • Nuclear Engineering and Technology
    • /
    • v.52 no.7
    • /
    • pp.1537-1544
    • /
    • 2020
  • Molecular dynamics (MD) simulations were conducted to investigate the temperature effects on the primary damage in gallium nitride (GaN) material. Five temperatures ranging from 300 K to 900 K were studied for 10 keV Ga primary knock-on atom (PKA) with inject direction of [0001]. The results of MD simulations showed that threshold displacement energy (Ed) was affected by temperatures and at higher temperature, it was larger. The evolutions of defects under various temperatures were similar. However, the higher temperature was found to increase the peak number, peak time, final time and recombination efficiency while decreasing the final number. With regard to clusters, isolated point defects and little clusters were common clusters and the fraction of point defects increased with temperature for vacancy clusters, whereas it did not appear in the interstitial clusters. Finally, at each temperature, the number of Ga interstitial atoms was larger than that of N and besides that, there were other different results of specific types of split interstitial atoms.

BIOMECHANICAL STUDY OF THE CALVARIAL DEFECTS AFTER IMPLANTATION OF THE TOOTHASH AND PLASTER IN THE RAT (백서에서 치아회분과 석고 매식 후 두개 결손부의 생물물리적 성질에 관한 실험적 연구)

  • Kim, Young-Kyun;Ko, Young-Mu
    • Maxillofacial Plastic and Reconstructive Surgery
    • /
    • v.19 no.1
    • /
    • pp.45-54
    • /
    • 1997
  • The purpose of this investigation was to determine the biomechanical property of calvarial defects reconstructed using toothash, plaster and tooth-plaster mixture. Full-thickness bony defects were made on the rat calvaria with size of $10mm{\times}10mm$. Group 1 was filled with toothash only, group 2 : toothash-plaster mixture, and group 3 : plaster only. The defects were allowed to heal for 12 and 20 weeks before killing the animals. Light microscopic examinations vas taken after 12 week after operation. The hardness was evaluated for test of mechanical property. The following results were obtained : 1. In light microscopic examination 12 week after operation, there were no inflammatory and foreign body reaction. Implanted particles were resorbed gradually or united directly with newly formed bone. 2. In hardness test, the hardness of newly formed bone was lower than that of normal bone and there was significant difference(P<0.01). The site of new bone formation has enough hardness to resist the mechanical stress. These results suggest that toothash and plaster are biocompatible and osteoconductive material.

  • PDF