• 제목/요약/키워드: Material Defects

검색결과 1,315건 처리시간 0.031초

3D-ESPI 시스템을 이용하여 결정된 응력집중계수가 피로수명에 미치는 영향에 관한 연구

  • 김성찬
    • 선박안전
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    • 제12권
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    • pp.36-43
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    • 2003
  • Fatigue life estimation by the theoretical stress concentration factors are, in general, considerably different from test results. And in calculating stress concentration factor, it is very difficult to consider actual geometry and material property which are the notch shapes, imperfections or defects of materials such as porosities inclusions and casting defects, etc. Therefore, the paper deals with the experimental method to find out the more exact stress concentration factors by measuring the strain distributions on each specimen by 3D-ESPI(Electronic Speckle Pattern Interferometry) System. Then the fatigue lives are compared between theoretical calculations using stress concentration factors determined by 3D-ESPI system and fatigue test results

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슬리브 시공유형별 기계적 및 열적 가속열화특성 분석 연구

  • 안상현;김병걸;김상수;손홍관;박인표
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.286-286
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    • 2009
  • According to previous report, aged sleeves for old transmission lines have various defect such as biased installation or corrosion of steel sleeve. These defects can cause serious accidents such as rapid increasing of sag or falling out of overhead conductor from sleeves. Moreover, the defects have been limited power capacity of transmission line. This paper study on mechanical and thermal behavior of ACSR $410mm^2$ conductor and sleeve with various defect model. The conductor has been aged artificially for 50 years. The detailed results were presented in the text.

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Reverse Moat Pattern을 가진 STI CMP 공정에서 EPD 고찰 (A study on EPD of STI CMP Process with Reverse Moat Pattern)

  • 이경태;김상용;서용진;김창일;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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    • pp.14-17
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    • 2000
  • The rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.18um semiconductor device. To employ in STI CMP, the reverse moat process has been added thus the process became complex and the defects were seriously increased. Removal rates of each thin films in STi CMP was not equal hence the devices must to be effected, that is, the damage was occured in the device dimension in the case of excessive CMP process and the nitride film was remained on the device dimension in the case of insufficient CMP process than these defects affect the device characteristics. We studied the current sensing method in STI-CMP with the reverse moat pattern.

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FRP 박스부재의 결함평가를 위한 위상배열초음파 적용성 평가 (Phased Array Ultrasonic Application for Defects Estimation of FRP Box Member)

  • 곽계환;양동운;김호선;이호현;윤국현
    • 한국농공학회논문집
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    • 제52권5호
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    • pp.69-76
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    • 2010
  • The structural material with the highest possibility of new materials that will be used in the future construction field is fiber reinforced polymer. The current studies on FRP members by using such excellent material characteristics mostly focused on stability, composite problem, and durability of FRP members. The initially constructed FRP members secure excellent stability and durability compared to reinforced concrete and steel materials, but measures for defections during the periodical inspection, methods for detecting breakages, and maintenance and reinforcement are not insufficient. Accordingly, this study proposed a measurement system using the FRP sensor to evaluate the safety of the FRP modular box member, and applied the phased array ultrasonic technique to detect the defects and damage likely to occur during the performance period.

에피박막 결함이 탄화규소 쇼트키 다이오드소자의 항복전압 특성에 미치는 영향 (Influence of the epitaxial-layer defects on the breakdown characteristics of the SiC schottky diode)

  • 정희종;방욱;김남균;김상철;서길수;김형우;김은동;이용재
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.285-288
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    • 2004
  • 탄화규소 기판의 에피 박막결함으로는 dislocation, micropipe, pin-hole 및 에피층 표면의 여러 가지 결함들이 있다. 이러한 결함들이 탄화규소 쇼트키 다이오드의 항복전압과 어떠한 상관관계가 존재하는지 알아 보기 위해 탄화규소 쇼트키 다이오드를 제작하고, 제작된 소자의 항복전압을 측정하였다. 에피 박막내의 결함 분포를 알아보기 위해 항복전압 측정후 KOH 용액을 이용한 SiC의 에칭을 수행하였으며, 제작된 여러소자들에 대해 항복전압의 분포도와 결함 분포도를 작성, 비교 관찰하였다.

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바인더 함량 변화가 LTCC 그린 테이프의 물리적 특성에 미치는 영향 (Effect of Binder Content on Physical Properties of LTCC Green Tapes)

  • 유정훈;여동훈;이주성;신효순;윤호규;김종희
    • 한국전기전자재료학회논문지
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    • 제19권12호
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    • pp.1112-1117
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    • 2006
  • The properties of LTCC green tape with addition of binder were investigated in order to understand an effects of binder on multilayer processing. A green sheet form was fabricated through tape casting method with the MLS-22 powder. The lamination density increased with increasing amount of binder and lamination pressure. With increasing amount of binder, the elongation of ceramic sheets increased but the tensile stress and air-permeability decreased. The addition of excessive binder is caused defects in the green sheet during via hole punching. The optimum condition of the via hole without defects was observed from amount of the binder 10 wt%.

습식 에칭에 의한 웨이퍼의 층간 절연막 가공 특성에 관한 연구 (A Study on a Wet etching of ILD (Interlayer Dielectric) Film Wafer)

  • 김도윤;김형재;정해도;이은상
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 추계학술대회 논문집
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    • pp.935-938
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    • 1997
  • Recently, the minimum line width shows a tendency to decrease and the multi-level increase in semiconductor. Therefore, a planarization technique is needed and chemical mechanical polishing(CMP) is considered as one of the most suitable process. CMP accomplishes a high polishing performance and a global planarization of high quality. But there are several defects in CMP such as micro-scratches, abrasive contaminations, and non-uniformity of polished wafer edges. Wet etching include of Spin-etching can improve he defects of CMP. It uses abrasive-free chemical solution instead of slurry. On this study, ILD(INterlayer-Dielectric) was removed by CMP and wet-etching methods in order to investigate the superiority of wet etching mechanism. In the thin film wafer, the results were evaluated at a viewpoint of material removal rate(MRR) and within wafer non-uniformity(WIWNU). And pattern step height was also compared for planarization characteristics of the patterned wafer.

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유한요소법을 이용한 전방압출공정의 내부결함에 관한 연구

  • 김태형;김병민;강범수;최재한
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1992년도 춘계학술대회 논문집
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    • pp.79-83
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    • 1992
  • According to the variation of hydrostatic pressure on the central axis of deformable material, the V-shaped central bursting defect may be created on extrusion or drawing processes. The process factors whichaffect the generation of defects are die semi-angle, reduction ratio of cross-sectional area, friction factor, material properties and so on. The combination of these factors can determine the prossibility of defect creation and the shape of various round holes which have been created inside already. By the rigid plastic finite element method, this paper describes the observations of change in shape of a round hole with process conditions suchas die semi-angle, reduction ratio of cross-sectional area and friction factorat the unsteady state of axi-symmetrical extrusion process when the round hole is alreadyexisted inside the original billet, and also, the effects of process factors are investigated to prevent the possible defects.

CMP 연마를 통한 STI에서 결함 감소 (A Study of Chemical Mechanical Polishing on Shallow Trench Isolation to Reduce Defect)

  • 백명기;김상용;김창일;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.501-504
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    • 1999
  • In the shallow trench isolation(STI) chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control within- wafer-non-uniformity, and the possible defects such as nitride residue and pad oxide damage. These defects after STI CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI filling and STI CMP were discussed. It is represented that the nitride residue can be occurred in the condition of high post CMP thickness and low trench depth. In addition there are remaining oxide on the moat surface after reverse moat etch. It means that reverse moat etching process can be the main source of nitride residue. Pad oxide damage can be caused by over-polishing and high trench depth.

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MeV 이온주입에 의한 Retrograde Triple-well 형성시 발생하는 결함제어 (Control of Defect Produced in a Retrograde Triple Well Using MeV Ion Implantation)

  • 정희석;고무순;김대영;류한권;노재상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.17-20
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    • 2000
  • This study is about a retrograde triple well employed in the Cell tr. of next DRAM and flash memory. Triple well structure is formed deep n-well under the light p-well using MeV ion implantation. MeV P implanted deep n-well was observed to show greatly improved characteristics of electrical isolation and soft error. Junction leakage current, however, showed a critical behavior as a function of implantation and annealing conditions. {311} defects were observed to be responsible for the leakage current. {311} defects were generated near the R$\_$p/ (Projected range) region and grown upward to the surface during annealing. This is study on the defect behavior in device region as a function of implantation and annealing conditions.

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