• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.6
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• pp.543-550
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• 2002

In this paper, the $CF_4$ decomposition rate and by-product were investigated for two simulated plasma reactors which are metal particle reactor and spiral wire reactors as a function of mixed gases. The $CF_4$ decomposition rate by plasma reactor with metal particle electrode had a gain of 20~25% over that by plasma reactor with spiral wire electrode. The $CF_4$ decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The $CF_4$ decomposition efficiency of metal particle reactor was about 80% at AC 24kV. The $CF_4$ decomposition rate used Ar-$N_2$ as base gas was the highest among three base gases of $N_2$, $Ar-N_2$, air. The by-products of the $N_2$, $N_2Ar$ base as were similar, but in case of air base they were different.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.912-916
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• 2002

In this paper, the $CF_4$ decomposition rate and by-product were investigated for a simulated two plasma reactors which are metal particle reactor and spiral wire reactor as function of mixed gases. The $CF_4$ decomposition rate by plasma reactor with metal particle electrode had a gain of 20~25[%] over that by plasma reactor with spiral wire electrode. The $CF_4$ decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The $CF_4$ decomposition efficiency of metal particle reactor was about 80[%] at AC 24[kV]. The $CF_4$ decomposition rate used $Ar-N_2$ as base gas was the highest among three base gases of $N_2$, $Ar-N_2$, air. The by-products of the $N_2$, $Ar-N_2$ base as were similar, but in case of air base they were different.

• Journal of Environmental Science International
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• v.12 no.6
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• pp.635-641
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• 2003

A recycling process for the waste FRP from boats was developed. The recycling process is composed of decomposition of waste FRP with propylene glycol and synthesis of recycled unsaturated polyester resin from the decomposed liquid material. Prior to the decomposition, waste FRP was cut into 2cm x 5cm segments and mechanical impact was applied by press roller to give gaps between cumulated laminates. Propylene glycol effectively decomposed the waste FRP segments and glass fibers were easily separated from decomposed liquid material. Recycled unsaturated polyester resin could be made from the decomposed liquid material by reaction with maleic anhydride and phthalic anhydride.

• Proceedings of the Korean Environmental Sciences Society Conference
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• 2005.05a
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• pp.267-271
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• 2005

This experiment was carried out at 450"C, which is relatively lower than the temperature for supercritical water oxidation (600-650$^{\circ}C$). In this experiment, the decomposition rates of various incombustible organic substances were very high. In addition, it was confirmed that hetero atoms existed in organic compounds and chlorine was neutralized by sodium(salt formation).However, to raise the decomposition rate, relatively large amount of sodium nitrate(3-4 times the equivalent weight) was required. When complete oxidation is intended as in the case with PCB, the amount of oxidizer and decomposition cost is important. But when vaporization reduction is required as in the case with nuclear wastes, the amount of radioactive wastes increases instead. But as can be seen in the result of XRD measurement, unreacted sodium nitrate remained unchanged. If oxidation reaction of organic substance simply depends on collision frequency, unreacted sodium nitrate can be recovered and reused, then oxidation equivalent weight would be sufficient. In the gas generated, toxic gas was not found. As the supercritical water medium has high reactivity, it is difficult to generate relatively low energy level SO$_{X}$, and NO$_{X}$.

• Journal of Korean Society for Atmospheric Environment
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• v.29 no.1
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• pp.27-37
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• 2013

CFCs (Chlorofluorocarbons) and HCFCs (Hydrochlorofluorocarbons) that are chemically stable were proven to be a greenhouse gases that can destroy ozone layer. On the other hand, HFCs (Hydrofluorocarbons) was developed as an alternative refrigerant for them, but HFCs still have a relatively higher radiative forcing, resulting in a large Global Warming Potential (GWP) of 1,300. Current regulations prohibit production and use of these chemicals. In addition, obligatory removal of existing material is in progress. Methods for the decomposition of these material can be listed as thermal cracking, catalytic decomposition and plasma process. This study reports the development of low cost and high efficiency plasma scrubber. Stability of steam plasma generation and effect of plasma parameters such as frequency of power supply and reactor geometry have been investigated in the course of the development. Method for effective removal of by-product also has been investigated. In this study, elongated rotating arc was proven to be efficient in decomposition of HFCs above 99% and to be able to generate stable steam plasma with steam contents of about 20%.

• Nuclear Engineering and Technology
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• v.54 no.12
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• pp.4441-4448
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• 2022

The electrochemical oxidation process has been widely studied in the field of wastewater treatment for the decomposition of organic materials through oxidation using ·OH generated on the anode. Pt anode electrodes with high durability and long-term operability have a low oxygen evolution potential, making them unsuitable for electrochemical oxidation processes. Therefore, to apply Pt electrodes that are suitable for long-term operation and large-scale processes, it is necessary to develop a new method for improving the decomposition rate of organic materials. This study introduces a method to improve the decomposition rate of organic materials when using a Pt anode electrode in the electrochemical oxidation process for the treatment of organic decontamination liquid waste. Electrochemical decomposition tests were performed using sodium dodecylbenzenesulfonate (SDBS) as a representative organic material and a Pt mesh as the anode electrode. Y₂O₃ particles were introduced into the electrolytic cell to improve the decomposition rate. The decomposition rate significantly improved from 21% to 99%, and the current efficiency also improved. These results can be applied to the electrochemical oxidation process without additional system modification to enhance the decomposition rate and current efficiency.

• Journal of the Korea Safety Management & Science
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• v.1 no.1
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• pp.241-258
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• 1999

For hazardous air pollutants(HAP) such as NO and $NO_{2}$ decomposition efficiency, power consumption, and applied voltage were investigated by SPCP(surface induced discharge plasma chemical processing) reactor to obtain optimum process variables and maximum decomposition efficiencies. Decomposition efficiency of HAP with various electric frequencies(5~50 kHz), flow rates(100~1,000 mL/min), initial concentrations(100~1,000 ppm), electrode materials(W, Cu, Al), electrode thickness(1, 2, 3 mm) and number of electrode windings(7, 9, 11) were measured. Experimental results showed that for the frequency of 10 kHz, the highest decomposition efficiency of 94.3 % for NO and 84.7 % for $NO_{2}$ were observed at the power consumptions of 19.8 and 20W respectively and that decomposition efficiency decreased with increasing frequency above 20 kHz. Decomposition efficiency was increased with increasing residence times and with decreasing initial concentration of pollutants. Decomposition efficiency was increased with increasing thickness of discharge electrode and the highest decomposition efficiency was obtained for the electrode diameter of 3 mm in this experiment. As the electrode material, decomposition efficiency was in order : tungsten(W), copper(Cu), aluminum(Al).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.6
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• pp.458-464
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• 1998

This paper gives characterization of substrate and PZT(53/47) thin film deposited by metalorganic decomposition, which is concerned in deposition process and device fabrication process, to fabricate micro electro mechanical system (MEMS) device with piezoelectric material. The PZT thin films deposited by MOD at 700^{\circ}C$ for 30 minutes had a polycrystallinity, that is, no substrate dependence, while different interface were developed depending on the bottom electrodes. Such a structural variation could influence on not only the properties of the PZT film but also etching process for fabricating MEMS devices. Therefore the electrode structure is a very important factor in the deposition of the PZT film during etching process by HF acid for MEMS device with piezoelectric material. Piezoelectric coefficients of the PZT films on the different substrates were 40 and 80 pm/V at an applied voltage of 4V. Based in these results, it was possible for deposition of the PZT film by MOD to apply MEMS device fabrication process based on piezoelectricity after selection of proper bottom electrode.

• Transactions on Electrical and Electronic Materials
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• v.1 no.2
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• pp.18-22
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• 2000

An ozone condensation system is evaluated from the viewpoint of an ozone supplier fro oxide thin film growth. Ozone is condensed by the adsorption method and its concentration is analyzed using the thermal decomposition method, The concentration of ozone exceeds 90mol% and ozone is supplied for a sufficiently long time to grow oxide thin films. Investigation of the ozone decomposition rate demonstrates that ozone can be transferred into the film growth chamber without marked decomposition. The ozone concentration is also evaluated using a quardrupole mass analyzer and the accuracy of this method is compared with the results of the thermal decomposition method.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.11
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• pp.693-698
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• 2017

In this study, the thermal degradation properties of polyethylene terephthalate film has been examined by the capacitance, Tan ${\delta}$, thermography, FTIR, and SEM results at temperatures of $90{\sim}170^{\circ}C$ and frequencies of 0.3~3,000 kHz. It was found that the capacitance decreased with increasing thermal imaging temperature, probably caused by weakening of chemical bond with increasing temperature. Tan ${\delta}$ decreased upon increasing temperature from $90^{\circ}C$ to $170^{\circ}C$, probably due to the molecular motion of COOH radical or OH radical. The FT-IR measurement reveals that no structural change of the material occurs upon thermal radiation. The SEM measurement shows that the material is stabilized by thermal decomposition with increasing temperature; however, excessive thermal degradation obstructs the stabilization of the material.