• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.180-180
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• 2000

Plasma source ion implantation is a new doping technique for the formation of shallow junction with the merits of high dose rate, low-cost and minimal wafer charging damage. In plasma source ion implantation process, the wafer is placed directly in the plasma of the appropriate dopant ions. Negative pulse bias is applied to the wafer, causing the dopant ions to be accelerated toward the wafer and implanted below the surface. In this work, inductively couples plasma was generated by anodized Al antenna that was located inside the vacuum chamber. The outside wall of Al chamber was surrounded by Nd-Fe-B permanent magnets to confine the plasma and to enhance the uniformity. Before implantation, the wafer was pre-sputtered using DC bias of 300B in Ar plasma in order to eliminate the native oxide. After cleaning, B2H6 (5%)/H2 plasma and negative pulse bias of -1kV to 5 kV were used to form shallow p+/n junction at the boron dose of 1$\times$1015 to 5$\times$1016 #/cm2. The as-implanted samples were annealed at 90$0^{\circ}C$, 95$0^{\circ}C$ and 100$0^{\circ}C$during various annealing time with rapid thermal process. After annealing, the sheet resistance and the junction depth were measured with four point probe and secondary ion mass spectroscopy, respectively. The doping uniformity was also investigated. In addition, the electrical characteristics were measured for Schottky diode with a current-voltage meter.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.261-261
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• 2010

본 연구에서는 PBMS (Particle Beam Mass Spectrometer)와 ISPM (In-Situ Particle Monitor)을 연계하여 BPSG (Borophosphosilicate Glass) 및 PSG (Phosphosilicate Glass) 박막 증착을 위한 CVD (chemical vapor deposition) 공정 중 발생하는 오염입자 발생특성에 대해 비교 평가하였다. 소스는 TEB (Triethylborate), TEPO (Triethylphosphate) 및 TEOS (Tetraethoxysilane)를 사용하였고, 운반가스 및 반응가스로 He과 $O_2$ 및 $O_3$를 사용하였다. 증착온도와 압력은 각각 $450^{\circ}C$, 200 Torr 이었다. 반응기의 배기라인에 PBMS와 ISPM을 설치하고 500 nm 이하의 입자에 대해 공정단계별 시간에 따른 모니터링 결과 전 공정에 걸쳐 동일한 패턴의 입자발생분포를 보였으며, 특히 PBMS의 경우 ISPM의 입자측정한계인 260 nm 이하의 입자크기도 측정할 수 있었다. 입자발생이 안정적으로 일어나는 증착공정 중 PBMS를 통하여 입자크기를 측정한 결과 BPSG의 경우 약 110 nm, PSG의 경우 약 80 nm의 분포를 나타내었다. 이를 통해 TEB 소스가 배제된 PSG의 경우 BPSG의 경우보다 입자의 성장이 지체됨을 확인하였다. 측정에 대한 신뢰성을 확보하기 위해 PBMS 내의 TEM (Transmission Electron Microscopy) grid를 이용하여 입자를 샘플링 하였고, TEM 분석을 실시한 결과 PBMS 측정결과와 잘 일치하였다. 또한 EDS (Energy Dispersive Spectroscopy) 분석을 통하여 입자성분에 대해 검증하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.397-397
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• 2010

Bone is considered as hierarchically organized biocomposites of organic (collagen) and inorganic (hydroxyapatite) materials. The precise structural dependence between hydroxyapatite (HAp, $Ca_{10}(PO_4)_6(OH)_2)$ crystals and collagen fibril is critical to unique characteristics of bone. To meet those conditions and obtain optimal properties, it is essential to understand and control the initial growth mechanisms of hydroxyapatite at the molecular level, such as other nano-structured materials. In this study, collagen fibrils were prepared by adsorbing native type I collagen molecules onto hydrophobic surface. Hydrophobicity was introduced on the Si wafer surface by using PECVD (plasma enhanced chemical vapor deposition) method and cyclohexane as a precursor. Biomimetic nucleation and growth of HAp on the self-assembled collagen nanofibrils were occurred through incubation of the sample in SBF (simulated body fluid). Chemical and morphological evolution of HAp nanocrystals was investigated by surface-sensitive analytical techniques such as ToF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) and AFM (Atomic Force Microscopy) in the early growth stages (< 24 hrs). The very initial stages (< 12 hrs) of mineralization could be clearly demonstrated by ToF-SIMS chemical mapping of surface. In addition to ToF-SIMS and AFM measurement, scanning electron microscopy, energy dispersive spectroscopy and X-ray diffraction analysis were conducted to characterize the HAp layer in the late stages. This study is of great importance in the growth of real bone-like materials with a structure analogous to that of natural bones and the development of biomimetic nanomaterials.

• Korean Journal of Microbiology
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• v.38 no.3
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• pp.168-172
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• 2002

Budding yeasts maintain an effective system to regulate intracellular pH in response to environmental pH fluctuation. In a previous study we reported that SHC1 plays a role in cell growth at alkaline condition, not at acid pH. We constructed a null mutant deleted an entire open reading frame for SHC1. To test whether the retardation in cell growth was caused by the absence of intracellular pH buffering capacity, we measured intracellular pH with a pH-sensitive fluorescent dye, C.SNARE. The intracellular pH of the mutant cell was much higher than that of wild-type cells, indicating that the mutant cells lack some types of buffering capacity. We also investigated the level of $Na^＋ and K^＋$ content with atomic mass spectroscopy after alkali shock. Wild-type cell showed a higher level of intracellular K^＋$ content, whereas there was no difference in $Na^＋$ level. The result suggested that K^＋$ is more important in the regulation of intracellular pH in yeasts.

• Food Science and Biotechnology
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• v.17 no.6
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• pp.1214-1220
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• 2008

Secondary metabolites from the fruit body of Phellinus linteus were evaluated for their proliferative effect on human osteoblast-like cells. 3-[4,5-Dimethylthiazole-2-y1]-2,5-diphenyl-tetraxolium bromide (MTT) assay and alkaline phosphatase (ALP) activity assay were used to assess the effect those isolates on the human osteoblast-like cell line (Saos-2). Activity-guided fractionation led to the isolation of ALP-activating phenolic compounds through the extraction of P. linteus, solvent partitioning, and repeated silica gel and octadecyl silica gel (ODS) column chromatographic separations. From the result of spectroscopic data including nuclear magnetic resonance (NMR), mass spectrometry (MS), and infrared spectroscopy (IR), the chemical structures of the compounds were determined as 4-(4-hydroxyphenyl)-3-buten-2-one(1), 2-(3',4'-dihydroxyphenyl)-1,3-benzodioxole-5-aldehyde (2), 4-(3,4-dihydroxyphenyl)-3-buten-2-one (3), 3,4-dihydroxybenzaldehyde (4), and protocatechuic acid methyl ester (5), respectively. This study reports the first isolation of compounds 1-3 and 5 from P. linteus. In addition, all phenolic compounds stimulated proliferation of the osteoblast-like cells and increased their ALP activity in a dose-dependent manner ($10^{-8}$ to $10^{-1}\;mg/mL$). The present data demonstrate that phenolic compounds in P. linteus stimulated mineralization in bone formation caused by osteoporosis. The bone-formation effect of P. linteus seems to be mediated, at least partly, by the stimulating effect of the phenolic compounds on the growth of osteoblasts.

• Membrane and Water Treatment
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• v.10 no.6
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• pp.471-484
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• 2019

The complex combination of organic contaminants in the wastewater made water treatment challenging; hence, organic matter in water bodies is usually measured in terms of organic carbon. Since it is important to identify the types of compounds when deciding suitable treatment methods, this study implemented a quantitative and qualitative analysis of the organic matter content in an actual graywater sample from Ulsan, Republic of Korea using mass spectroscopy (MS). The graywater was treated using adsorption to remove the organic contaminants. Using orbitrap MS, the organic matter content between an untreated graywater and the treated effluent were compared which yielded a significant formula count difference for the samples. It was revealed that CHON formula has the highest removal count. Isotherm studies found that the Freundlich equation was the best fit with a coefficient of determination ($R^2$) of 0.9705 indicating a heterogenous GAC surface with a multilayer characteristic. Kinetics experiments fit the pseudo-second order equation with an $R^2$ of 0.9998 implying that chemisorption is the rate-determining step between the organic compounds and GAC at rate constant of $52.53g/mg{\cdot}h$. At low temperatures, the reaction between GAC and organic compounds were found to be spontaneous and exothermic. The conditions for optimization were set to achieve a maximum DOC and TN removal which yielded removal percentages of 94.59% and 80.75% for the DOC and TN, respectively. The optimum parameter values are the following: pH 6.3, 2.46 g of GAC for every 30 mL of graywater sample, 23.39 hrs contact time and $38.6^{\circ}C$.

• Journal of Adhesion and Interface
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• v.20 no.3
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• pp.102-109
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• 2019

The material constitution of multi-layered thin film coated on the PET base film was analyzed using ATR FT-IR and pyro GC/MS combination. The cross section of the film was acquired by cracking the film after dipping in liquid nitrogen and was observed using optical microscope. Total thickness of the coated film was $70{\mu}m$ and three layers were observed. Since each layers were too thin to analyze directly except the surface layer, analyzable area of each layers were exposed by using a proper solvent and were investigated using ATR FT-IR and pyro GC/MS. Results shows that three layers were commonly consisted of urethane-acrylate copolymers. Also, inorganic and/or metal inclusions detected by XPS and SEM-EDAX were exhibited by nano size $SiO_2$ particles in layer(1) and aluminum flakes in layer(2).

• Korean Journal of Agricultural Science
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• v.46 no.1
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• pp.33-44
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• 2019

This study was conducted to examine the components of phytoncide from a pine forest in the southern temperate zone. Recent studies have found that a large amount of phytoncide is released not only from cypress trees but also from pine trees. Because the amount released is the highest during summer, we selected a warm climate region in the southern temperate zone and measured the concentration in the month of August. To capture the phytoncide from the forest atmosphere, we used the adsorption tube method with a mini pump and successfully gathered 9 L of forest air at a flow rate of 150 mL/min. We performed duplicate sampling from two different tubes installed at the same location and derived the mean value. A gas chromatography/mass spectrometer detector with thermal desorption spectroscopy was utilized to perform quantitative and qualitative analyses of the captured material. The results showed that the average phytoncide particle of the pine forest in the southern temperate zone contained a number of components as follows in descending order: ${\alpha}$-Pinene (39%, $0.28ng/m^3$), followed by ${\beta}$-Pinene (16%, $0.11ng/m^3$), D-Limonene (8%, $0.06ng/m^3$), camphor (6%, $0.04ng/m^3$), camphene (6%, $0.04ng/m^3$), and p-Cymene (5%, $0.04ng/m^3$). There were also 13 additional phytoncide components in trace amounts. The results of this study are expected to provide a useful dataset for building a "Healing-forest".

• Journal of the Korean Wood Science and Technology
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• v.49 no.6
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• pp.658-666
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• 2021

A novel flame retardant and antibacterial composite membrane coating for wood surfaces was prepared by adding POSS-based phosphorous nitrogen flame retardant (later referred to as NH₂-POSS) and silver nanoparticles (Ag NPs) to chitosan (CS). The effects of NH₂-POSS content (mass fractions of CS 0%, 0.5%, 1%, 3%, 5%, and 7%) on the structure and properties of the composite membrane coating on wood were investigated. The composite film was prepared by the method of blending and ducting. Contact angle, tensile property and antibacterial effects of the composite film were measured, and infrared spectroscopy was used. The results show that the addition of NH₂-POSS can not only improve the toughness of the membrane, but also the flame retardancy of the membrane, which improves the application of the membrane in wood products. However, with the addition of NH₂-POSS, the transparency of the composite membrane was weakened. The inhibitory effect of the composite membrane on the growth of Escherichia coli was enhanced with the increase in Ag NPs. This research provides a foundation for the application of functional wood.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.2
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• pp.51-57
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• 2021

The quality of the ceramic sintered coating on a metal surface through laser surface treatment is affected by the laser irradiation pattern. Depending on the laser irradiation pattern, the amount of residual stress and heat applied or accumulated on the surface increases or decreases, affecting the thickness attained in the ceramic sintering area. When the heat energy accumulated in the sintering area is high, the ceramic and the metal alloy melt and sufficiently mix to form a homogeneous and thick bonding interface. In this study, the thermal energy accumulation in the region sintered with zirconia was controlled using four types of laser processing patterns. The thickness of the diffusion region is analyzed by laser-induced breakdown spectroscopy of Mg-ZrO2 generated by laser sintering zirconia powder on the magnesium alloy surface. On the basis of the analysis of the Mg and Zr present in the sintered region through LIBS, the effect of the irradiation pattern on the sintering quality is confirmed by comparing and analyzing the heat and mass transfer tendency of the diffusion layer and the degree of diffusion according to the irradiation pattern. The derived diffusion coefficients differed by up to 9.8 times for each laser scanning pattern.