• Journal of the Semiconductor & Display Technology
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• v.7 no.2
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• pp.55-58
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• 2008

The objective of the research is to design, manufacture and test a Mass Flow Controller(MFC) capable of measuring compressible fluid flows based on a "bucket and stop-watch"method. The basic principle is the measurement of time, where the time taken to fill and empty a bucket of known volume is measured. This method of flow measurement is a new concept when compared to a commercilized current mass flow controller. For the flow meter to be able to compete with established designs it not only must be comparable in cost and robustness, it must be very accurate and reliable as well. This device should be able to handle fluid flows in the range of 0.1ml/min to 10ml/min within an accuracy of ${\pm}$1%. A possible application for a device such as this is in electronics industry where arsenic gas is used in the production of silicon chips.

• Transactions of the Korean Society of Automotive Engineers
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• v.6 no.1
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• pp.59-72
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• 1998

This experimental study was carried out to investigate the characteristics of the in-cylinder eccentricity swirl flow generated by a 4 valve cylinder head with a tangential and a helical intake port. the measurements of the in-cylinder velocity field have been made by a two-channel LDA system. The mean flow coefficient(Cf(meam)), swirl ratio(Rs) and mass flowrate with valve eccentricity ratios and an intake port partition between the two intake ports were measured in the steady flow test fig using the ISM(impulse swirl meter). The experimental results indicated that the mass flowrate through the tangential intake port was 19% and 7.7% more than that of the helical intake port in case of with and without intake port partition respectively. There was a tendency to be a single rotation flow in swirl flow fields formed by a 4 valve cylinder head because of the interaction between the two intake ports. As the intake port partition was not set between flow coefficient(Cf(mean)) was 7.35%.

• 유체기계공업학회:학술대회논문집
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• 1999.12a
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• pp.109-113
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• 1999

Thermal mass flow meter (TMF) is used measuring the small mass flow rate of gases. Generally, flow rate measuring accuracy of TMF is $\pm2{\%}$ of full scale. TMF is manufactured for specified working pressure and specified working gas by customer. If it were applied for different working pressure and gases, flow rate measurement accuracy decreased dramatically. In this study, a TMF tested with three different gases and pressure range of 0.2 MPa to 1.0 MPa. Effect of specific heat cause to increase flow measurement error as much as ratio of specific heat compare with reference gas. Pressure change cause to increase flowrate measurement deviation about $-0.2{\%}$ as the working pressure decreased 0.1 MPa.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.783-784
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• 2010

• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.2
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• pp.63-70
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• 2003

In this paper, an MFC (Mass Flow Controller) which is widely used in many semiconductor manufacturing processes for controlling the mass flow rate of a gas is designed and implemented using the PIC 16F876 of Microchip, Inc. The MFC implemented in this thesis has the form of hybrid-type, i.e., the mixed-type of the analog-type MFC, which has many problems such as low accurary, and digital-type MFC, which use an expensive DSP (Digital Signal Processor) and an ADC (Analog to Digital Convertor) with high precision. The MFC is consists of the sensor unit, the control unit and the actuator unit, and it has used the automatic calibration algorithm and the reference table method for the improvement of the performance.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.154-161
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• 2000

As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.3
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• pp.382-388
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• 2006

This study experimented to understand the effect of transporting ice slurry through in pipe with valve. And at this experiment it used ethylene glycol-water solution and a concentration is 30wt%. The experimental apparatus was constructed of ice slurry generation tank, turbo flow meter, manometers for differential pressure measuring, PIV system for flow pattern measuring. illumination and along a horizontal circular tube with valve as test section. The experiments were carried out under various conditions, with velocity of fluid at the entry ranging from 0.5 to 1.5 m/s and concentration of IPF is 30%. Also valve open rate is 50%, 75%, 100%.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.9
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• pp.1276-1283
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• 2002

Recently, HSDI (High Speed Direct Injection) diesel engine has been spotlighted as a next generation engine because it has a good potential for high thermal efficiency and fuel economy. This study was carried out to investigate the in-cylinder flow characteristics generated in a 4-valve small diesel cylinder head with a tangential and helical intake port. The flow characteristics such as coefficient of flow rate(Cf), swirl ratio (Rs), and mass flow rate (ms) were measured in the steady flow test rig using the impulse swirl meter and the analysis of in-cylinder flow field was conducted by experiment using the PIV and calculation using the commercial CFD code. As the results from steady flow test indicate, the mass flow rate of the cylinder head with a short distance between the two intake ports is increased over 13% than that of the other head. However, the non-dimensional swirl ratio is decreased approximately 15%. From in-cylinder flow characteristics obtained by PIV and CFD calculation, we found that the swirl center was eccentric from the cylinder center and the velocity distribution became uniform near the TDC. In addition, the results of the calculation are good agreement with the experimental results.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.12
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• pp.2407-2414
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• 1992

Constant temperature hot wire air flow meter for automobiles requires temperature compensation system because hot wire output signal is sensitive to ambient temperature variations as well as fluid velocity. The objectives of the present study are to design an air flow meter circuit which is capable of compensating the hot wire output signal for ambient temperature variations and to investigate the mechanism of such temperature compensation. This circuit is composed of platinum hot wire, platinum resistor, two variable resistors, a constant resistor and a DC-amplifier. In particular, by simply replacing a constant resistor in one of the bridge arms of the conventional circuit with platinum resistor and a variable resistor for the purpose of temperature compensation, the deviation of output signal with respect to ambient temperature variations between 27deg. C 70deg. C could be reduced to less than 2.5% for mass flow rate and to less than 5% for velocity respectively. The mechanism of temperature compensation against ambient temperature variations was explained by means of measuring the heat transfer coefficient with hot wire temperature variations and analyzing and analyzing conventional empirical equations qualitatively.

• Journal of KSNVE
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• v.10 no.2
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• pp.280-290
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• 2000

The paper deals with vibration suppression and dynamic stability of a vertical cantilevered pipe conveying an internal flowing fluid and having an attached mass. Real pipe systems may have some valves or mechanical attached parts, which can be regarded as attached lumped masses. The effect of attached mass on the dynamic stability of a cantilevered pipe conveying fluid is investigated for different locations and magnitudes of the attached mass. The flow rate was controlled through motor pump output and measured by a flow meter. Experimental resutls in the vicinity of flutter fluid velocity were compared with theoretical predictions. It has been found that the experimental results are in substantial agreement with the theoretical predictions. Finally, in order to suppress the vibration of the pipe subjected to a disturbance, and control technique using an internal flowing fluid is introduced.