• Title/Summary/Keyword: Masking Process

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The surface propery change of multi-layer thin film on ceramic substrate by ion beam sputtering (이온빔 스퍼터링법에 의한 다층막의 표면특성변화)

  • Lee, Chan-Young;Lee, Jae-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.259-259
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    • 2008
  • The LTCC (Low Temperature Co-fired Ceramic) technology meets the requirements for high quality microelectronic devices and microsystems application due to a very good electrical and mechanical properties, high reliability and stability as well as possibility of making integrated three dimensional microstructures. The wet process, which has been applied to the etching of the metallic thin film on the ceramic substrate, has multi process steps such as lithography and development and uses very toxic chemicals arising the environmental problems. The other side, Plasma technology like ion beam sputtering is clean process including surface cleaning and treatment, sputtering and etching of semiconductor devices, and environmental cleanup. In this study, metallic multilayer pattern was fabricated by the ion beam etching of Ti/Pd/Cu without the lithography. In the experiment, Alumina and LTCC were used as the substrate and Ti/Pd/Cu metallic multilayer was deposited by the DC-magnetron sputtering system. After the formation of Cu/Ni/Au multilayer pattern made by the photolithography and electroplating process, the Ti/Pd/Cu multilayer was dry-etched by using the low energy-high current ion-beam etching process. Because the electroplated Au layer was the masking barrier of the etching of Ti/Pd/Cu multilayer, the additional lithography was not necessary for the etching process. Xenon ion beam which having the high sputtering yield was irradiated and was used with various ion energy and current. The metallic pattern after the etching was optically examined and analyzed. The rate and phenomenon of the etching on each metallic layer were investigated with the diverse process condition such as ion-beam acceleration energy, current density, and etching time.

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Fabrication and Characterization of 32x32 Silicon Cantilever Array using MEMS Process (MEMS 공정을 이용한 32x32 실리콘 캔틸레버 어레이 제작 및 특성 평가)

  • Kim Young-Sik;Na Kee-Yeol;Shin Yoon-Soo;Park Keun-Hyung;Kim Yeong-Seuk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.10
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    • pp.894-900
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    • 2006
  • This paper reports the fabrication and characterization of $32{\times}32$ thermal cantilever array for nano-scaled memory device applications. The $32{\times}32$ thermal cantilever array with integrated tip heater has been fabricated with micro-electro-mechanical systems(MEMS) technology on silicon on insulator(SOI) wafer using 9 photo masking steps. All of single-level cantilevers(1,024 bits) have a p-n junction diode in order to eliminate any electrical cross-talk between adjacent cantilevers. Nonlinear electrical characteristic of fabricated thermal cantilever shows its own thermal heating mechanism. In addition, n-channel high-voltage MOSFET device is integrated on a wafer for embedding driver circuitry.

Color image quantization using color activity weighted distortion measure of human vision (인간 시각의 칼라 활성 가중 왜곡 척도를 이용한 칼라 영상 양자화)

  • 김경만;이응주;박양우;이채수;하영호
    • Journal of the Korean Institute of Telematics and Electronics B
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    • v.33B no.4
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    • pp.101-110
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    • 1996
  • Color image quantization is a process of selecting a set of colors to display an image with some representative colors without noticeable perceived difference. It is very important in many applications to display a true color image in a low cost color monitor or printer. the basic problem is how to display 224 colors with 256 or less colors, called color palette. In this paper, we propose an algorithm to design the 256 or less size color palette by using spatial maskin geffect of HVS and subjective distortion measure weighted by color palette by using spatial masking effect of HVS and subjective distortion measure weighted by color activity in 4*4 local region in any color image. The proposed algorithm consists of octal prequantization and subdivision quantization processing step using the distortion measure and modified Otsu's between class variance maximization method. The experimental results show that the proposed algorithm has higher visual quality and needs less consuming time than conventional algorithms.

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Machinability of Machinable Ceramics in Powder Blasting (Powder Blasting에 의한 머시너블 세라믹의 절삭성)

  • 김광현;최영현;박동삼;조원승;조명우
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2002.04a
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    • pp.296-301
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    • 2002
  • In this study, we investigated the machinability of machinable ceramics which were developed by a research lab. of Inha Univ., Korea. The effect of the nozzle scanning times, the size of patterns and compositions of BN in ceramics on the erosion depth of samples with no mask and samples with three different mask pattern in powder blasting of machinable ceramics. The blasting conditions were the impact angles 90$^{\circ}$, scanning times of noble up to 30 and the stand-off distances 100mm. The widths of mask pattern were 0.1mm, 0.5mm and 1 mm. The powder was alumina sharp particles, WA#600. The mass flow rate of powder during the erosion test was fixed constant at 150g/min and the blasting pressure of powder at 0.25Mpa

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Development of Fast Dissolving Tablet Containing Herb Extract by Freeze-Drying Technique

  • Kim, Jae-Il;Choi, Hoo-Kyun
    • Journal of Pharmaceutical Investigation
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    • v.40 no.3
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    • pp.161-166
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    • 2010
  • A fast dissolving tablet was developed using the freeze-drying technique. Hyeonggaeyeongyotang was selected as a model oriental medicine. Formulation and processing parameters were studied to obtain freeze-dried tablet with high drug loading, good palatability, and fast disintegration time. $Kollidon^{(R)}$ CLM served as both matrix former and taste masking agent. Ethanol used as co-solvent, decreased the disintegration time of tablet. Aspartame was employed to impart better taste. Drying condition was found to have a major effect in the morphology of the tablets. Freeze-drying process was optimized to decrease the processing time and improve the appearance of the tablets.

Multimode Configuration Doped with a Chiral Agent for Transflective Liquid Crystal Display with a Single Cell Gap

  • Yu, Chang-Jae;Kim, Jin-Yool;Kim, Dong-Woo;Lee, Sin-Doo
    • Journal of Information Display
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    • v.5 no.3
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    • pp.8-13
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    • 2004
  • We demonstrate a transflective liquid crystal display (LCD), doped with a chiral agent to produce a low helical twisting power, in a multimode configuration consisting of the homogeneous alignment and the hybrid alignment. The multimode transflective LCD with a single cell gap was fabricated using a single-step photoalignment technique with a self-masking process of an array of metal reflectors in the reflective region. In our configuration, the electro-optical disparity between the transmissive region and the reflective region was found to be significantly reduced by the low helical twisting power of the chiral dopant.

Robust Audio Watermarking Using HAS and Neural Network (신경망과 HAS을 이용한 강인한 오디오 워터마킹 알고리즘)

  • Jung, Se-Won;Piao, Cheng-Ri;Han, Seung-Soo
    • Proceedings of the KIEE Conference
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    • 2006.07d
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    • pp.2101-2102
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    • 2006
  • In this paper, a new digital audio watermarking algorithm is presented. The proposed algorithm embeds watermark into audio signal based on human auditory system (HAS). This algorithm is a blind audio watermarking method, which does not require any prior information during watermark extraction process. This algorithm finds watermarking position using time-domain masking effect. First we insert the watermark into wavelet domain, and then we use a back-propagation neural network (BPN) to learn the characteristics of relationship between the watermark and the watermarked audio. Due to the teaming and adaptive capabilities of the BPN, the false recovery of the watermark can be greatly reduced by the trained BPN. Experimental results show that the proposed method has good inaudibility and high robustness to common audio processing attacks.

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Applied machine vision technique in measuring the position of the hot steel strip (Hot strip 위치측정을 위한 Vision 기술 적용)

  • 노경숙;이동원
    • 제어로봇시스템학회:학술대회논문집
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    • 1996.10b
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    • pp.1072-1075
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    • 1996
  • In hot rolling process at steel plant, cooling of the rolled strip at the exit of the rolling mill is one of the most important processes that would decide the quality of products. To guarantee the thermal equity over the strip, the device called an edge-masking unit is being used. That is installed between the strip and the sprayers to cover the side edge of the strip from spraying water. The accuracy of positioning the bracket is the key to this operation. A machine vision technique can be applied to measure the position of the side edges before an as-rolled strip enters into the cooling facility to rectify the error of preset position of the bracket. This paper shows the simulation result of applying the machine vision technique to measuring the position of a strip and suggests the solution for the target.

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Localized formation of porous silicon usin gdoping concentration selectivity (도핑농도의 선택도를 이용한 국부적 다공질 실리콘의 형성)

  • 이주혁;김성진;이성필;이철진;최복길;박천만;심관수
    • Proceedings of the IEEK Conference
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    • 1998.06a
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    • pp.465-468
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    • 1998
  • For porous silicon layer to be used as active layer in various devices, it is necessary to be formed locally along with a designed pattern on the wafer. However, there is still no suitable masking layer to withstand against the high concentration of HF for a time of some minutes up to some hours during the anodic process effectively. In this work, we investigated the property of selectivity between p$^{+}$ and n layers to form localized porous silicon even without a mask by the difference of the anodic I-V characteristics on the doping level and doping type. The width of the pattern made in the sample was 2mm, and the formed porous silicon layer was observed by SEM to see the morphology on the cross section below the surface. As the results, it was found that the selectivity was reasonable for the pattern size over 100.mu.m.m.

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Effect of the Number of Nozzle Scanning in Micro-Line Grooving of Glass by Powder Blasting (Powder Blasting을 이용한 유리의 미세 선형 홈 가공시 노즐 주사 횟수의 영향)

  • 박경호;김광현;최종순;박동삼
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2001.04a
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    • pp.294-299
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    • 2001
  • The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for various materials, capable of producing micro structures larger than 100 m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film.

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