• Title/Summary/Keyword: Mask material

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High Density Inductively Coupled Plasma Etching of III-V Semiconductors in BCI3Ne Chemistry (BCI3Ne 혼합가스를 이용한 III-V 반도체의 고밀도 유도결합 플라즈마 식각)

  • 백인규;임완태;이제원;조관식
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.12S
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    • pp.1187-1194
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    • 2003
  • A BCl$_3$/Ne plasma chemistry was used to etch Ga-based (GaAs, AIGaAs, GaSb) and In-based (InGaP, InP, InAs and InGaAsP) compound semiconductors in a Planar Inductively Coupled Plasma (ICP) reactor. The addition of the Ne instead of Ar can minimize electrical and optical damage during dry etching of III-V semiconductors due to its light mass compared to that of Ar All of the materials exhibited a maximum etch rate at BCl$_3$ to Ne ratios of 0.25-0.5. Under all conditions, the Ga-based materials etched at significantly higher rates than the In-based materials, due to relatively high volatilities of their trichloride etch products (boiling point CaCl$_3$ : 201 $^{\circ}C$, AsCl$_3$ : 130 $^{\circ}C$, PCl$_3$: 76 $^{\circ}C$) compared to InCl$_3$ (boiling point : 600 $^{\circ}C$). We obtained low root-mean-square(RMS) roughness of the etched sulfate of both AIGaAs and GaAs, which is quite comparable to the unetched control samples. Excellent etch anisotropy ( > 85$^{\circ}$) of the GaAs and AIGaAs in our PICP BCl$_3$/Ne etching relies on some degree of sidewall passivation by redeposition of etch products and photoresist from the mask. However, the surfaces of In-based materials are somewhat degraded during the BCl$_3$/Ne etching due to the low volatility of InCl$_{x}$./.

CMP of BTO Thin Films using Mixed Abrasive slurry (연마제 첨가를 통한 BTO Film의 CMP)

  • Kim, Byeong-In;Lee, Gi-Sang;Park, Jeong-Gi;Jeong, Chang-Su;Gang, Yong-Cheol;Cha, In-Su;Jeong, Pan-Geom;Sin, Seong-Heon;Go, Pil-Ju;Lee, U-Seon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.05a
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    • pp.101-102
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    • 2006
  • BTO ($BaTiO_3$) thin film is one of the high dielectric materials for high-density dynamic random access memories (DRAMs) due to its relatively high dielectric constant, It is generally known that BTO film is difficult to be etched by plasma etching, but high etch rate with good selectivity to pattern mask was required. The problem of sidewall angle also still remained to be solved in plasma etching of BTO thin film. In this study, we first examined the patterning possibility of BTO film by chemical mechanical polishing (CMP) process instead of plasma etching. The sputtered BTO film on TEOS film as a stopper layer was polished by CMP process with the sell-developed $BaTiO_3$- and $TiO_2$-mixed abrasives slurries (MAS). respectively. The removal rate of BTO thin film using the $BaTiO_3$-mixed abrasive slurry ($BaTiO_3$-MAS) was higher than that using the $TiO_2$-mixed abrasive slurry ($TiO_2$-MAS) in the same concentrations. The maximum removal rate of BTO thin film was 848 nm/min with an addition of $BaTiO_3$ abrasive at the concentration of 3 wt%.

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THE EFFECT OF THICKNESS OF THE PROVISIONAL CROWN AND FIXED PARTIAL DENTURE MATERIALS ON THE TRANSLUCENCY AND MASKING EFFECT

  • Jae, Hyun-Jee;Kim, Sung-Hun;Lee, Seok-Hyung;Pae, Ahran
    • The Journal of Korean Academy of Prosthodontics
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    • v.45 no.6
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    • pp.724-734
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    • 2007
  • Statement of problem. Translucency and masking effect of provisional crown and fixed partial denture materials is an important esthetic consideration. But, provisional resin materials differ substantially in their ability to mask underlying colors. Purpose. The purpose of this study was to evaluate the translucency differences of provisional resin materials at various thicknesses and the correlation between the translucency and the masking efficiency. Material and methods. Two polymethyl methacrylate resins (Jet Tooth Shade, Alike) and three resin composites (Protemp 3 Garant, Luxatemp and Revotek LC) were used. Specimens (n=6) were fabricated from each material in 0.3, 0.5, 0.8, 1.0, 1.5, 2.0 and 3.0 mm thickness. The CIELAB parameters of each specimens were measured using a spectrophotometer. The translucency parameter (TP) values and the masking effect $({\Delta}ME^*{_{ab}})$ values were computed and all data were statistically analyzed by one-way ANOVA and the multiple comparisons Scheffe test. The correlation between the thickness and the TP values and the correlation between the thickness and the ${\Delta}ME^*{_{ab}}$ values were also evaluated by correlation analysis and regression analysis. Results. The TP values and the ${\Delta}ME^*{_{ab}}$ values were significantly related to the thickness in all specimens. The TP values were more sensitive to the change of thickness than the ${\Delta}ME^*{_{ab}}$ values. The order of the translucency by brand was different from the order of the masking effect by brand in all thickness groups. Conclusion. Within the limitations of this study, the translucency and masking effect of the provisional resin materials investigated were significantly related to their thickness. The masking effect of provisional resin was correlated with the translucency parameter, but the order of the masking effect by brand was different from the order of the translucency parameter.

A Study on the Characteristics of ITO Thin Film for Top Emission OLED (Top Emission OLED를 위한 ITO 박막 특성에 대한 연구)

  • Kim, Dong-Sup;Shin, Sang-Hoon;Cho, Min-Joo;Choi, Dong-Hoon;Kim, Tae-Geun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.450-450
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    • 2006
  • Organic light-emitting diodes (OLED) as pixels for flat panel displays are being actively pursued because of their relatively simple structure, high brightness, and self-emitting nature [1, 2]. The top-emitting diode structure is preferred because of their geometrical advantage allowing high pixel resolution [3]. To enhance the performance of TOLEDs, it is important to deposit transparent top cathode films, such as transparent conducting oxides (TCOs), which have high transparency as well as low resistance. In this work, we report on investigation of the characteristics of an indium tin oxide (ITO) cathode electrode, which was deposited on organic films by using a radio-frequency magnetron sputtering method, for use in top-emitting organic light emitting diodes (TOLED). The cathode electrode composed of a very thin layer of Mg-Ag and an overlaying ITO film. The Mg-Ag reduces the contact resistivity and plasma damage to the underlying organic layer during the ITO sputtering process. Transfer length method (TLM) patterns were defined by the standard shadow mask for measuring specific contact resistances. The spacing between the TLM pads varied from 30 to $75\;{\mu}m$. The electrical properties of ITO as a function of the deposition and annealing conditions were investigated. The surface roughness as a function of the plasma conditions was determined by Atomic Force Microscopes (AFM).

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Developing a clothing and textiles studio course for future home economics teachers using principles of PBL and maker education (PBL과 메이커 교육을 적용한 가정과 예비교사를 위한 의류학 실습 수업 개발)

  • Lee, Yhe-Young
    • The Research Journal of the Costume Culture
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    • v.29 no.1
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    • pp.134-151
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    • 2021
  • The aim of this research is to develop a clothing and textiles studio course for preservice home economics teachers applying principles of Project-Based Learning (PBL) and maker education to equip future teachers with the ability to nurture creativity among adolescents. The studio course was developed in the following stages: analysis, design, development, implementation, and evaluation. We concluded that the resulting course met the following objectives extracted from the 2015 revised curriculum of home economics subjects: to promote creative and environmentally-friendly fashion design and styling abilities, gain the ability to use makerspace tools, understand flat pattern making and sewing processes, and develop creative thinking, aesthetic sense, and communication skills. Furthermore, the educational effects of PBL and maker education were confirmed through student comments on the course. Students mentioned the practicality of the material in their actual lives along with their enhanced integration of the subject material, self-directedness, aesthetic sense, ability to learn through trial and error, collaboration and communication, and sharing. Based on results from the implementation and evaluation stages, a clothing and textiles studio course should include the following modules: introduction of terms and tools, submission and sharing of clothing reformation and upcycling techniques, introduction to hand sewing, pouch making, heat-transfer printing, 3D printing, mask making, hat making, vest making, and the final team project on fashion styling. It is important for instructors to provide detailed guidelines on selecting personas for styling, looking for available materials, and selecting materials online.

Effect of cement type, luting protocol, and ceramic abutment material on the shade of cemented titanium-based lithium disilicate crowns and surrounding peri-implant soft tissue: a spectrophotometric analysis

  • Peter Gehrke;Maria Julia Pietruska;Johannes Ladewig;Carsten Fischer;Robert Sader;Paul Weigl
    • The Journal of Advanced Prosthodontics
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    • v.16 no.4
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    • pp.231-243
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    • 2024
  • PURPOSE. The objective of the study was to analyze the impact of cement, bonding pretreatment, and ceramic abutment material on the overall color results of CAD-CAM ceramic crowns bonded to titanium-based hybrid abutments. MATERIALS AND METHODS. For single implant restoration of a maxillary lateral incisor a total of 51 CAD-CAM-fabricated monolithic lithium disilicate crowns were fabricated and subsequently bonded onto 24 lithium disilicate Ti-base abutments, 24 zirconia Ti-base abutments and 3 resin abutment replicas as a control group. The 48 copings were cemented with three definitive and one provisional cement on both grit-blasted and non-blasted Ti-bases. The color of each restoration and surrounding artificial gingiva was measured spectrophotometrically at predefined measuring points and the CIELAB (ΔEab) color scale values were recorded. RESULTS. The color outcome of ceramic crowns bonded to hybrid abutments and soft tissues was affected differently by cements of different brands. Grit-blasting of Ti-bases prior to cementing CAD-CAM copings affected the color results of allceramic crowns. There was a significant difference (P = .038) for the median ΔE value between blasted and non-blasted reconstructions at the cervical aspect of the crown. Full-ceramic crowns on zirconia Ti-base abutments exhibited significantly lower ΔE values below the threshold of visibility (ΔE 1.8). In all subcategories tested, the use of a highly opaque temporary cement demonstrated the lowest median ΔE for both the crown and the artificial gingiva. CONCLUSION. Various cements, core ceramic materials and airborne particle abrasion prior to bonding can adversely affect the color of Ti-base supported ceramic crowns and peri-implant soft tissue. However, zirconia CAD-CAM copings and an opaque cement can effectively mask this darkening.

Stress distribution following face mask application using different finite element models according to Hounsfield unit values in CT images (CT상의 HU 수치에 따른 상악골 전방견인 효과의 유한요소 분석)

  • Chung, Dong-Hwa
    • The korean journal of orthodontics
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    • v.36 no.6
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    • pp.412-421
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    • 2006
  • Objective: The result of finite element analysis depends on material properties, structural expression, density of element, and boundar or loading conditions. To represent proper elastic behavior, a finite element model was made using Hounsfield unit (HU) values in CT images. Methods: A 13 year 6 month old male was used as the subject. A 3 dimensional visualizing program, Mimics, was used to build a 3D object from the DICOM file which was acquired from the CT images. Model 1 was established by giving 24 material properties according to HU. Model 2 was constructed by the conventional method which provides 2 material properties. Protraction force of 500g was applied at a 45 degree downward angle from Frankfort horizontal (FH) plane. Results: Model 1 showed a more flexible response on the first premolar region which had more forward and downward movement of the maxillary anterior segment. Maxilla was bent on the sagittal plane and frontal plane. Model 2 revealed less movement in all directions. It moved downward on the anterior part and upward on the posterior part, which is clockwise rotation of the maxilla. Conclusion: These results signify that different outcomes of finite element analysis can occur according to the given material properties and it is recommended to use HU values for more accurate results.

Development of Bi0.5(Na0.78K0.22)0.5TiO3 Lead-free Piezoelectric Ceramic Material with Core-shell Structure for Biomedical (바이오 메디컬용 코어-쉘 구조의 Bi0.5(Na0.78K0.22)0.5TiO3계 무연압전세라믹 소재의 개발)

  • Seong-jun Yun;Joonsoo Bae
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.46 no.3
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    • pp.15-22
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    • 2023
  • BNKT Ceramics, one of the representative Pb free based piezoelectric ceramics, constitutes a perovskite(ABO3) structure. At this time, the perovskite structure (ABO3) is in the form where the corners of the octahedrons are connected, and in the unit cell, two ions, A and B, are cations, A ion is located at the body center, B ion is located at each corner, and an anion O is located at the center of each side. Since Bi, Na, and K sources constituting the A site are highly volatile at a sintering temperature of 1100℃ or higher, it is difficult to maintain uniformity of the composition. In order to solve this problem, there should be suppression of volatilization of the A site material or additional compensation of the volatilized. In this study, the basic composition of BNKT Ceramics was set to Bi0.5(Na0.78K0.22)0.5TiO3 (= BNKT), and volatile site (Bi, Na, and K sources) were coated in the form of a shell to compensate additionally for the A site ions. In addition, the physical and electrical properties of BNKT and its coated with shell additives(= @BNK) were compared and analyzed, respectively. As a result of analyzing the crystal structure through XRD, both BNKT(Core) and @BNK(Shell) had perovskite phases, and the crystallinity was almost similar. Although the Curie temperature of the two sintered bodies was almost the same (TC = 290 ~ 300 ℃), it was confirmed that the d33 (piezoelectric coefficient) and Pr (residual polarization) values were different. The experimental results indicated that the additional compensation for a shell additive causes the coarsening, resulting in a decrease in sintering density and Pr(remanent polarization). However, coating shell additives to compensate for A site ion is an effective way to suppress volatilization. Based on these experimental results, it would be the biggest advantage to develop an eco-friendly material (Lead-free) that replaced lead (Pb), which is harmful to the human body. This lead-free piezoelectric material can be applied to a biomedical device or products(ex. earphones (hearing aids), heart rate monitors, ultrasonic vibrators, etc.) and skin beauty improvement products (mask packs for whitening and wrinkle improvement).

Effects of thickness of GIZO active layer on device performance in oxide thin-film-transistors

  • Woo, C.H.;Jang, G.J.;Kim, Y.H.;Kong, B.H.;Cho, H.K.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.137-137
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    • 2009
  • Thin-film transistors (TFTs) that can be prepared at low temperatures have attracted much attention due to the great potential for flexible electronics. One of the mainstreams in this field is the use of organic semiconductors such as pentacene. But device performance of the organic TFTs is still limited by low field effect mobility or rapidly degraded after exposing to air in many cases. Another approach is amorphous oxide semiconductors. Amorphous oxide semiconductors (AOSs) have exactly attracted considerable attention because AOSs were fabricated at room temperature and used lots of application such as flexible display, electronic paper, large solar cells. Among the various AOSs, a-IGZO was considerable material because it has high mobility and uniform surface and good transparent. The high mobility is attributed to the result of the overlap of spherical s-orbital of the heavy pest-transition metal cations. This study is demonstrated the effect of thickness channel layer from 30nm to 200nm. when the thickness was increased, turn on voltage and subthreshold swing were decreased. a-IGZO TFTs have used a shadow mask to deposit channel and source/drain(S/D). a-IGZO were deposited on SiO2 wafer by rf magnetron sputtering. using power is 150W, working pressure is 3m Torr, and an O2/Ar(2/28 SCCM) atmosphere at room temperature. The electrodes were formed with Electron-beam evaporated Ti(30nm) and Au(70nm) structure. Finally, Al(150nm) as a gate metal was evaporated. TFT devices were heat treated in a furnace at $250^{\circ}C$ in nitrogen atmosphere for an hour. The electrical properties of the TFTs were measured using a probe-station to measure I-V characteristic. TFT whose thickness was 150nm exhibits a good subthreshold swing(S) of 0.72 V/decade and high on-off ratio of 1E+08. Field effect mobility, saturation effect mobility, and threshold voltage were evaluated 7.2, 5.8, 8V respectively.

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Fabrication of Field Emitter Arrays by Transferring Filtered Carbon Nanotubes onto Conducting Substrates

  • Jang, Eun-Soo;Goak, Jung-Choon;Lee, Han-Sung;Lee, Seung-Ho;Lee, Nae-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.311-311
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    • 2009
  • Carbon nanotubes (CNTs) belong to an ideal material for field emitters because of their superior electrical, mechanical, and chemical properties together with unique geometric features. Several applications of CNTs to field emitters have been demonstrated in electron emission devices such as field emission display (FED), backlight unit (BLU), X-ray source, etc. In this study, we fabricated a CNT cathode by using filtration processes. First, an aqueous CNT solution was prepared by ultrasonically dispersing purified single-walled CNTs (SWCNTs) in deionized water with sodium dodecyl sulfate (SDS). The aqueous CNT solution in a milliliter or even several tens of micro-litters was filtered by an alumina membrane through the vacuum filtration, and an ultra-thin CNT film was formed onto the alumina membrane. Thereafter, the alumina membrane was solvated by acetone, and the floating CNT film was easily transferred to indium-tin-oxide (ITO) glass substrate in an area defined as 1 cm with a film mask. The CNT film was subjected to an activation process with an adhesive roller, erecting the CNTs up to serve as electron emitters. In order to measure their luminance characteristics, an ITO-coated glass substrate having phosphor was employed as an anode plate. Our field emitter array (FEA) was fairly transparent unlike conventional FEAs, which enabled light to emit not only through the anode frontside but also through the cathode backside, where luminace on the cathode backside was higher than that on the anode frontside. Futhermore, we added a reflecting metal layer to cathode or anode side to enhance the luminance of light passing through the other side. In one case, the metal layer was formed onto the bottom face of the cathode substrate and reflected the light back so that light passed only through the anode substrate. In the other case, the reflecting layer coated on the anode substrate made all light go only through the cathode substrate. Among the two cases, the latter showed higher luminance than the former. This study will discuss the morphologies and field emission characteristics of CNT emitters according to the experimental parameters in fabricating the lamps emitting light on the both sides or only on the either side.

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