• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.262.2-262.2
• /
• 2014

Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.25 no.2
• /
• pp.149-156
• /
• 2017

Various kinds of accessories(e.g., clock, radio, automatic door locks, alarm devices, etc.) or unit components (e.g., black box, navigation system, alarm, private audio, etc.) require dark current even when the vehicle power is turned off. However, accessories or unit components can be the causes of excessive dark current generation. It results in battery discharge and the vehicle's failure to start. Therefore, immediate detection of abnormal dark current and response are very important for a successful repair job. In this paper, we can increase the maintenance efficiency by presenting a standardized diagnostic process for the measurement of the dark current and the existing problem. As a result of the absence of a system to block the dark current in a vehicle, diagnosis and repair were performed immediately by using a standardized dark current diagnostic process.

• Proceedings of the KIEE Conference
• /
• 1999.07e
• /
• pp.2212-2214
• /
• 1999

In this paper, a novel Generator On-line Diagnosis System (GODS) is proposed. This system monitors the insulation condition of the stator winding by on-line measurements of partial discharge (PD). Sensor, such as SSC (Stator Slot Coupler) and RFCT (Radio Frequency Current Transformer) are used for PD measurement. PD signals are continuously measured and digitized with a high speed A/D converter to build the database of the generator's insulation condition. Also this system can communicate with the central monitoring system via RS-485. This helps more efficient operation and maintenance of the generator.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.11a
• /
• pp.492-494
• /
• 2002

The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases: (1) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.62 no.6
• /
• pp.881-885
• /
• 2013

In this paper, we present a deterioration judgment model of urban rail power equipment using driving history, the frequency and number of failures. In addition, we have developed a deterioration judgment program based on the derived failure rate. A deterioration judgment model of power equipments on metro system was designed to establish how much environmental factors, such as thermal cycling, humidity, overvoltage and partial discharge. The deterioration rate of the transformers followed the Arrhenius log life versus reciprocal Kelvin temperature (hotspot temperature) relation. The deterioration judgment program is linked to the online condition monitoring system of urban railway system. The deterioration judgment program is based on the user interface it is possible to apply immediately to the urban rail power equipment.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.54 no.8
• /
• pp.343-349
• /
• 2005

The gas in oil analysis of transformer is the most widely used technology for diagnosis of transformer in the world. It has brought excellent results to prevention of transformer failure. The criteria for maintenance and judgement, however, is still required continuous supplement to improve the accuracy of the diagnosis on the basis of accumulated data of gas analysis and investigations in the transformer In this study, the relationship between the detection rate of the defects and the source of troubles are analyzed according to the investigation in the transformer, which was conducted by KEPCO in 2004. As a result, the validity of the criteria being used at present was examined thoroughly.

• Proceedings of the KIEE Conference
• /
• 2000.07b
• /
• pp.1018-1020
• /
• 2000

In the operation and maintenance activity of hydro turbine generator, one of the important parameters is the efficiency. This study analyze the case of efficiency management by pressure time method and survey the application of this method through the actual test. And it is confirmed that the Pressure time method exccesively limit the general condition to be applied. If index method is used for efficiency management because the index method calibrated by absolute discharge(by flow of pressure time method) is very accurate. it make to be able to manage the realtime efficiency.

• Physical Therapy Korea
• /
• v.1 no.1
• /
• pp.83-87
• /
• 1994

The purpose of this paper is to provide an overview of the clinical physical therapy program used at the University of Yonsei Rehabilitation Hospital, for the practicing university trained physical therapists who may be unfamiliar with patients who have suffered a myocardial infarction. The four primary phases of the cardiac physical therapy graded exercise program are: 1) coronary care unit program (phase I), 2) general ward program (phase II), 3) convalescence program (phase III), 4) maintenance program (phase IV). The exercise prescription defines the exercise intensity, duration, frequency, and mode of exercise a after pre- discharge low level graded exercise test(LL-GXT) or symptom limited maximum graded exercise test. A typical exercise routine consists of preparation warm-up exercise, therapeutic exercise, cool-down exercise. Physical therapy is involved in the acute care and rehabilitation of the patient after a myocardial infarction. Therefore, the physical therapist must throughly comprehened the cardiac anatomy, cycle, performance, conduction system, pathogenesis, risk factors, and exercise benefits.

• Proceedings of the KIEE Conference
• /
• 2005.07c
• /
• pp.2079-2081
• /
• 2005

Electrical treeing occurrence is caused by some defect in solid insulator. Those are accompany the PD(partial discharge) occurrence. And lifetime of the insulator is affected by PD. So, detection of electrical treeing is important thing as this view. Especially, detection of the end treeing is more important and have meaning for industrial engineering because concerned with maintenance and replacement of equipment. In this paper, evaluation of treeing process were studied and PCA(principle component analysis)-LDA(linear discriminant analysis) as classification method were used. The result is present the good recognition.

• Proceedings of the KIEE Conference
• /
• 2003.07c
• /
• pp.1894-1896
• /
• 2003

In this paper, a novel monitoring system, data acquisition & diagnosis unit (DADU), for high-voltage rotating machines is proposed. This system monitors the insulation condition, current, voltage, vibration, and temperature of the stator winding by on-line measurements of partial discharge (PD), flux, etc. This helps more efficient operation and maintenance of the rotating machines.