• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.390-396
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• 1998

Neutral stream was generated from Helicon plasma source and was applied to etch silicon for the purpose of preventing physical and electrical damages from the bombardment of charged particles with high translation energy. By installing a permanent magnet and applying positive bias beneath the substrate, the cusp-magnetic and electric fiddles were generated in order to remove the charged particles from the downstream plasma. As a result, the electron density and ion density in the vicinity of the substrate were reduced by 1/1000 and 1/10, respectively. The directional etching of silicon was observed and the etch rate was found to be very low to below 100 $\AA$/min at a pressure of $8.5{\times}10^{-4}$ Torr, when $Cl_2$ and 10% $SF_{sigma}$ etchant gases were used.

• Transactions of the Korean hydrogen and new energy society
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• v.27 no.1
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• pp.114-120
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• 2016

This paper describes generating efficiency characteristics of the double acting Stirling engine/generator for domestic small-scale CHP (Combined Heat and Power) system. In small distributed generation applications, Stirling engine has competition from fuel cell, microturbine and etc. In order to be economical in the applications, a long life with minimum maintenance is generally required. Free piston Stirling engine (FPSE) has no crank and rotating parts to generate lateral forces and require lubrication. Double acting Stirling engine/generator has one displacer and two power piston which are supported by flexure springs. Two power pistons oscillate with symmetric displacement and are connected with moving magnet type linear generators for power generation from PV work. In experiments, 1 kW class double acting free piston Stirling engine/generator is fabricated and tested. Heat is supplied to hot end of engine by the combustion of natural gas and converted to electric power by linear generators which are assembled with power pistons. The electric parameters such as voltage, current and phase are measured with for variable flow rate of fuel gas. Especially, generating efficiency of FPSE is measured with three different measurement methods. Generating efficiency of the double acting Stirling engine/alternator is about 24%.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.11
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• pp.1675-1680
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• 2013

Recently, the permanent magnet linear synchronous motor as low noise, high speed and high thrust force transportation system has been proposed but this motor causes an increase of material cost because of its characteristic arranging the armature on the full length of transportation lines when this system is applied to the long distance transportation system. Therefore, we suggested discontinuous arrangement method of the armature to solve this problem. However, Detent force which causes thrust force ripple generating noise, vibration and decline of performance is generated when a mover pass between the armatures. Thus, in this paper, we examined characteristic of detent force to reduce the end edge effect according to the end edge teeth's height and auxiliary teeth and suggested the shape that can the most reduce the detent force.

• The Journal of the Korea institute of electronic communication sciences
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• v.13 no.4
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• pp.757-764
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• 2018

This paper describes the design and implementation of a 1hp class two-phase type BLDC fan motor used in an air conditioning system. The BLDC motor, which is implemented in this study, is not a commutator motor type with excellent lifetime and durability and is driven by two phase power source. The most important target specification of a motor used in an air conditioning system is that it has a high efficiency at the rated operating point. For this purpose, we designed the stator shape of the BLDC motor, the design of the rotor magnet, and the control circuit for driving. The BLDC motor has a structure where the motor part, the control part, and the power part are integrated. The finite element analysis was used to calculate the characteristics of the BLDC motors, and the conformity of the design results was confirmed by fabricating and testing the prototype model.

• Environmental Mutagens and Carcinogens
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• v.25 no.1
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• pp.25-31
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• 2005

The objective was to use MR imaging to provide a template of posterior fossa development during the late stages in the chick embryos. The MR findings were then correlated with histological data. Fourteen normal formalin-fixed embryonic specimens with a gestational age of 14 to 20 days were examined with 1.5 Tesla unit MRl using a conventional clinical magnet and pulse sequences. The MR findings were correlated with the whole-mount histological specimens. Resolution of the morphological features of posterior fossa development in embryos greater than 14 days gestational age was possible. Development of cerebellum, brain stem, 4th ventricle and bony posterior fossa was documented. In the 14-day-old embryos, a premordial cerebellum was visualized in the enlarged bony posterior fossa, and it covered the the roof of the primitive fourth ventricle. The bony posterior fossa grows at the same rate along the supratentorial skull. The supratentorial skull and the rostral part of the brain grows at the same rate. The cerebellum begins to grow later than the rostral part of the brain. In the 19- to 20-day-old embryos, MRl revealed the rapid development of the cerebellar hemispheres, along with an increase in volume manifested by the more typical mushroom-shaped configuration observed in the newly hatched. At this stage, the cerebellum almost completely filled the posterior fossa and covered the entire fourth ventricle. The brain stem grew steadily, but the volume change was too subtle to evaluate. Features of cerebellar histogeneis were beyond the resolution of MRl. However, there were lots of artifacts in the features of the bony posterior fossa. An MR template of normal posterior fossa development would be useful to avoid confusion of normal development with abnormal development and to identify the expected developmental features when provided the estimated gestational age of a embryo.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2005.11a
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• pp.95-99
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• 2005

This paper presents a general proposal to design and calculate the performance of a tubular permanent magnet linear generator treated here on the basis of the Finite Element Method. Optimizing the linear generator dimensions reduces the cogging force, which occurs due to the interaction between stator teeth and the permanent magnets. The generated AC voltage is analyzed and evaluated for both no load and load cases to take the armature reaction effects on the air gap flux density. A repetitive routine is followed to calculate the output AC voltage from the change of flux and the speed of the single-phase linear generator. The AC output voltage is calculated for different resistive loads, and hence, the linear generator load characteristic is obtained. The designed linear generator is capable to generate an output power of 5.3kW with AC output voltage of 222V with an efficiency of 96.8% at full load of 23.8A. The full load current is chosen based on the thermal properties of the coil wire insulations.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.15 no.5
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• pp.1018-1024
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• 2011

For the driving of the sinusoidal type permanent magnet synchronous motor with a maximum continuous torque, the 1200 delayed three phase sinusoidal current inputs which matched with the absolute rotor position are needed at the stator coil. Therefore, the detection of a absolute rotor position is required inevitably. And the right angle relationship between stator magnetic field and rotor magnetic field has to be preserved at a stator by this commutation action. The detection of a absolute position for the commutation can be made generally by the output signal analysis of the encoder attached at a motor shaft. The purposes of this study are to design signal processing logic circuits which could detect the absolute position of motor with a modern encoder system and generate the three reference wave for making sinusoidal current input at a stator coil.

• The Transactions of the Korean Institute of Power Electronics
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• v.10 no.2
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• pp.138-147
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• 2005

This paper presents a SPMSM(Surface-mounted Permanent Magnet Synchronous Motor) servo drive system using high performance TMS320F2812 DSP for the industrial application. The DSP(Digital Signal Processor) Controller enables an enhanced real time algorithm and cost-effective design intelligent for only exclusively motor drives which can be yield enhanced operation, fewer system components, lower control system cost, increased efficiency and high performance. The suggested system contain speed and current sensing circuits, SVPWM(Space Vector Pulse Width Modulation) and I/O interface circuit. The developed servo drive control system showns a good response characteristics results and high performance features in general purposed 400[w] machine. This system can achieve cost reduction and size minimization of controllers.

• The Transactions of the Korean Institute of Power Electronics
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• v.10 no.1
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• pp.52-60
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• 2005

Generally, a voltage difference or voltage distortion exists between the reference voltage and the practical voltage applied to a motor in a pulse width modulated(PWM) voltage source inverter(VSI). This voltage distortion varies with the operating conditions such as the temperature, DC link voltage, and phase current level. Also the voltage distortion affects the machine current distortion, torque pulsations, and control performance. In this paper, the voltage distortion in a PWM VSI is analyzed and a new on-line estimation method based on the model reference adaptive system(MRAS) is proposed to compensate the time varying voltage distortion, while considering the parameter variations for a permanent magnet synchronous motor (PMSM). The simulation and experimental results show the effectiveness of the proposed voltage difference observer and the compensation method.

• Journal of the Korean institute of surface engineering
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• v.36 no.1
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• pp.14-21
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• 2003

Thin films of ZrO$_2$ and TiO$_2$ were deposited on Si(100) substrates using RF magnetron sputtering technique. To study an influence of the sputtering parameters, systematic experiments were carried out in this work. XRD data show that the $ZrO_2$ films were mainly grown in the [111] orientation at the annealing temperature between 800 and $1000^{\circ}C$ while the crystal growth direction was changed to be [012] at above $1000^{\circ}C$. FT-IR spectra show that the oxygen stretching peaks become strong due to $SiO_2$ layer formation between film layers and silicon surface after annealing, and proved that a diffusion caused by either oxygen atoms of $ZrO_2$ layers or air into the interface during annealing. Different crystal growth directions were observed with the various deposition parameters such as annealing temperature, RF power magnitude, and added $O_2$ amounts. The growth rate of $TiO_2$ thin films was increased with RF power magnitude up to 150 watt, and was then decreased due to a sputtering effect. The maximum growth rate observed at 150 watt was 1500 nm/hr. Highly oriented, crack-free, stoichiometric polycrystalline $TiO_2$<110> thin film with Rutile phase was obtained after annealing at $1000^{\circ}C$ for 1 hour.