Deposition of ZrO |
Shin, Y.S.
(Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University)
Jeong, S.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University) Heo, C.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University) Bae, I.S. (Department of Chemistry, Kookmin University) Kwak, H.T. (Department of Chemistry, Kookmin University) Lee, S.B. (Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University) Boo, J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University) |
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