Deposition of ZrO and TiO Thin Films Using RF Magnet ron Sputtering Method and Study on Their Structural Characteristics |
Shin, Y.S.
(Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University)
Jeong, S.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University) Heo, C.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University) Bae, I.S. (Department of Chemistry, Kookmin University) Kwak, H.T. (Department of Chemistry, Kookmin University) Lee, S.B. (Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University) Boo, J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, SungKyunKwan University) |
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