• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.3
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• pp.253-260
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• 2012

In nowadays, the infrared optics is frequently employed to various fields such as military, aerospace, industry and medical. To develop the infrared optics, special glasses which can transmit infrared wave are required. Ge(Germanium), Si(silicon), and fluoride glasses are typically used for material of the infrared optics. Compared with Ge and Si glasses, fluoride glasses have high transmittance in infrared wavelength range. Additionally, UV(ultraviolet) and visible light can be transmitted through fluoride glasses. There characteristics of fluoride glasses makes it possible to evaluate optical performance with generally used visible testing equipment. In this paper, we used design of experiment to find ultra precision machining characteristic of Ge and fluoride glasses and optimized machining process to obtain required form accuracy of PV(Peak to Valley) $0.2\;{\mu}m$.

• Journal of the Semiconductor & Display Technology
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• v.16 no.2
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• pp.32-38
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• 2017

This paper is about the analysis on the vibration characteristic of tooling units on the precision bed in high-speed automatic lathe for precision machining. An automatic lathe operating at about 25,000 RPM is a critical factor in the self-weight stress and deformation of the bed. Especially, the resonance frequency should be grasped in advance to prevent abnormal vibration that may occur during processing. If the wrong bed is used, the resonant frequency can have a fatal influence on the precision machining and increase the defective rate of precision machined parts such as semiconductor parts. In this paper, vibration characteristics were evaluated through static load and resonance frequency analysis of automatic lathe bed. As a result, the maximum stress was 0.14MPa, the maximum deformation amount was $17.9{\mu}m$, and the natural frequency was 364.72Hz. The resonance frequency was calculated as 718Hz, and the stability was confirmed by being in the range of 400Hz or more, which is the processing condition.

• Journal of the Semiconductor & Display Technology
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• v.17 no.1
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• pp.66-70
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• 2018

This paper is about the analysis on the vibration characteristic of tooling units on the precision bed in turning and hobbing automatic lathe for precision machining. An automatic lathe operating at about 12,000 RPM is a critical factor in the self-weight stress and deformation of the bed. Especially, the resonance frequency should be grasped in advance to prevent abnormal vibration that may occur during processing. If the wrong bed is used, the resonant frequency can have a fatal influence on the precision machining and increase the defective rate of precision machined parts such as semiconductor parts. In this paper, vibration characteristics were evaluated through static load and resonance frequency analysis of automatic lathe bed. As a result, the maximum stress was 14.52 MPa, the maximum deformation amount was $12.15{\mu}m$, and the natural frequency was 189.43 Hz. The resonance frequency was calculated as 500 Hz, and the stability was confirmed by being in the range of 200 Hz or more, which is the processing condition.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.90-95
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• 2005

To perform the finish outside-diameter grinding process of ferrules which are widely used as fiber optic connectors, a high-precision centerless grinding machine is necessary. In this study, the thermal characteristics of the high-precision centerless grinding machine such as the temperature distribution, temperature rise and thermal deformation, are estimated based on the virtual prototype of the grinding machine and the heat generation rates of heat sources related to the machine operation conditions. The reliability of the predicted results is demonstrated by the temperature characteristics measured from the physical prototype. Especially, the predicted and measured results show the fact that the high-precision centerless grinding machine consisted of the hydrostatic GW and RW spindle systems, hydrostatic RW feeding mechanism, RW swivel mechanism, on-machine GW and RW dressers, and concrete-filled steel bed, has very stable thermal characteristics.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.2
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• pp.105-111
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• 2012

High speed machining is the core technology that influences the performance of machine tools, and the high speed motor spindle is widely used for the high speed machine tools. The important problem in high speed spindle is to minimize the thermal effect by motor and bearing and frequency effect. This paper presents the thermal characteristic analysis and frequency experiment for a high speed spindle considering the flow rate of cooling oil. A high speed spindle is composed of angular contact ceramic ball bearings, high speed built-in motor, oil cooling jacket and so on. The thermal analyses of high speed spindle need to minimize the thermal effect and maximize the cooling effect and they are carried out under the various cooling conditions. Heat generations of the bearing and the high speed motor are estimated from the theoretical and experimental data. To find out the characteristic of vibration, the high speed spindle is excited in operational range. This result can be applied to the design and manufacture of a high speed tapping spindle.

• Transactions of the Korean Society of Automotive Engineers
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• v.2 no.6
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• pp.38-49
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• 1994

In this study, grindability of some representative engineering ceramics are experimentally investigated using resin bond diamond wheel with conventional surface grinding machine, and proper grinding conditions which can be obtained from various experimental results are established also for mechanical components which are proper to domestic circumstances with high reliability. And through the results of experiment, it is confirmed that grinding energies of the ceramics, especially in the case of $Al_2O_3$, are lower than steel with same machining condition in the conventional grinding because of their fine-brittle fracture mode type removal process, though the ceramics are well-known to unmachinable materials. And moreover, the total pass numbers needed for spark-out process to be completed are depend on their mechanical properties because that grinding stiffness is different from each other. The grinding force, ginding power and ground surface roughness are also measured and compared. Furthermore, the experiments carried out in this study, some useful results are obtained with can guide to grind engineering ceramics with conventional surface grinding machine.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.2
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• pp.123-127
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• 2009

In order to get more higher integration density of devices, it is getting to be used more and more micro via interconnection lines for interconnecting layers or devices. However, it is very important to enhance the electrical characteristic by reducing the electrical resistivity of micro via interconnection line because it affects the reliability of packaging. In this paper, Micro vias were patterned with a diameter from 10 to 100 um by increasing the step of 10 um and 100 um height and were fabricated by micromachining technology to investigate the electrical characteristic of micro via interconnection lines. These micro vias were filled with copper by electroplating process with appling pulse current mode. And the electrical characteristics of micro via interconnection lines were measured. The measured value of electrical resistivity shows with a range from 20 to $26\;m{\Omega}$. This value from micro via interconnection lines fabricated by pulse current mode electroplating process shows better result than the resistivity from than micro via interconnection lines fabricated by DC mode ($31\;m{\Omega}$).

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.43-46
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• 2003

To develop bevel gear dies that have characteristics of high precision and enough life time, the technology of die manufacturing and design which increase the resistance of wear and fatigue is essentially needed. Here in the study, we have investigated several materials for dies and electrode. And, the most economical and suitable electrode material has been selected through the characteristic analysis of electrode materials such as copper, graphite and chromium copper. With the help of CAD/CAM/CAE, the total manufacturing system of high precision electrode for bevel gear has been established.

• Proceedings of the Society of Korea Industrial and System Engineering Conference
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• 2002.05a
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• pp.1-8
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• 2002

At present, company has to produce a product that consumer like with a competitive price, a good quality, and a fitting time to supply. Process control and qualify control are very important to supply with a product uniformly and inexpensively In this paper, the characteristic of product quality is monitored by control chart during the machining process and construction of quality control cycle is considered to divide into two types in this case that different assignable causes lead to shifts having different magnitudes. Then we are intended to find a process shift magnitude which has economical quality cost policy and are considered to quality cost functions to find a process shift magnitude. Those costs are categorized into the well-known categories of prevention, appraisal, and internal failure and external failure. This paper ends with numerical examples that demonstrate the usefulness of the model.