• 제목/요약/키워드: MIMO Controller

검색결과 108건 처리시간 0.03초

Identification and Multivariable Iterative Learning Control of an RTP Process for Maximum Uniformity of Wafer Temperature

  • Cho, Moon-Ki;Lee, Yong-Hee;Joo, Sang-Rae;Lee, Kwang-S.
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2003년도 ICCAS
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    • pp.2606-2611
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    • 2003
  • Comprehensive study on the control system design for a RTP process has been conducted. The purpose of the control system is to maintain maximum temperature uniformity across the silicon wafer achieving precise tracking for various reference trajectories. The study has been carried out in two stages: thermal balance modeling on the basis of a semi-empirical radiation model, and optimal iterative learning controller design on the basis of a linear state space model. First, we found through steady state radiation modeling that the fourth power of wafer temperatures, lamp powers, and the fourth power of chamber wall temperature are related by an emissivity-independent linear equation. Next, for control of the MIMO system, a state space modeland LQG-based two-stage batch control technique was derived and employed to reduce the heavy computational demand in the original two-stage batch control technique. By accommodating the first result, a linear state space model for the controller design was identified between the lamp powers and the fourth power of wafer temperatures as inputs and outputs, respectively. The control system was applied to an experimental RTP equipment. As a consequence, great uniformity improvement could be attained over the entire time horizon compared to the original multi-loop PID control. In addition, controller implementation was standardized and facilitated by completely eliminating the tedious and lengthy control tuning trial.

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내부 불평형 기진력을 갖는 원통형 구조물의 능동진동제어 (Active Vibration Control of Shell Structure Subjected to Internal Unbalanced Excitation)

  • 김승기;정우진;배수룡;이상규;곽문규
    • 한국소음진동공학회논문집
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    • 제27권2호
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    • pp.195-203
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    • 2017
  • This paper is concerned with the active vibration control of shell structure that is subjected to internal unbalanced excitation by using active mounts and accelerometers. The unbalanced excitation is caused by a rotating unbalanced mass. The control algorithm considered in this study is the negative acceleration feedback (NAF) control. A simplified dynamic model was derived to verify the effectiveness of the NAF control. Four actuators and four accelerometers were mounted on the shell structure, so that the multiple-input and multiple-output (MIMO) NAF controller was designed by both centralized and decentralized ways. Numerical results show that both the decentralized and centralized NAF controllers are effective. Based on the numerical simulation, the proposed decentralized NAF controller was applied to the real shell structure. Experimental results show that the proposed decentralized NAF controller can effectively suppress vibrations of the shell structure.

이족로봇의 선형모델결정과 제어에 관한 연구 (A Study on the Determination of Linear Model and Linear Control of Biped Robot)

  • 박인규;김진걸
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 추계학술대회 논문집 학회본부 D
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    • pp.765-768
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    • 2000
  • Linearization of the biped dynamic equations and design of linear controller for the linearized equations are studied in this paper. The biped robot with inverted pendulum type trunk, used to stabilize the dynamic balancing of the biped robot during dynamic walking period, is modelled with 14 DOF and simulated. Despite of well defined linear control theories so far, the linear control methods was limited to the applications for a walking robot, because they have been inherently strong nonlinear properties, such as a modeling parameter uncertainties, external forces as noise, inertial and Coriolis terms by three dimensional modeling and so on. To linearize the nonlinear equations of motion of biped robot on MIMO and time varying linear equations of motion, 1st order Taylor series is used to formulate the linear equation. And a 2nd order numerical perturbation method Is used to approximate partial differential equations. Using the linearized equations of motion, a linear controller is designed by pole placement method with feed forward compensation. Using the obtained linearized equations and linear controller, the continuous walking simulation is performed.

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Adaptive Sliding Mode Control Synthesis of Maritime Autonomous Surface Ship

  • Lee, Sang-Do;Xu, Xiao;Kim, Hwan-Seong;You, Sam-Sang
    • 해양환경안전학회지
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    • 제25권3호
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    • pp.306-312
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    • 2019
  • This paper investigates to design a controller for maritime autonomous surface ship (MASS) by means of adaptive super-twisting algorithm (ASTA). A input-out feedback linearization method is considered for multi-input multi-output (MIMO) system. Sliding Mode Controller (SMC) is suitable for MASS subject to ocean environments due to its robustness against parameter uncertainties and disturbances. However, conventional SMC has inherent disadvantages so-called, chattering phenomenon, which resulted from the high frequency of switching terms. Chattering may cause harmful failure of actuators such as propeller and rudder of ships. The main contribution of this work is to address an appropriate controller for MASS, simultaneously controls surge and yaw motion in severe step inputs. Proposed control mechanism well provides convergence bewildered by external disturbances in the middle of steady-state responses as well as chattering attenuation. Also, the adaptive algorithm is contributed to reducing non-overestimated value of control gains. Control inputs of surge and yaw motion are displayed by smoother curves without excessive control activities of actuators. Finally, no overshoot can be seen in transient responses.

불확실성을 고려한 횡축형 자기 베어링 시스템의 로버스트 제어에 관한 연구 (A Study on the Robust Control of Horizontal-Shaft Magnetic Bearing System Considering Perturbation)

  • 김창화;정병건;양주호
    • Journal of Advanced Marine Engineering and Technology
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    • 제34권1호
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    • pp.92-101
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    • 2010
  • 본 연구에서는 회전체를 지지하는 자기 베어링에 관하여, 2장에서는 적분형 서보계를 이용하여 횡축형 자기베어링 시스템(Horizontal-shaft Magnetic Bearing System: HMBS)에 대한 불확실성을 고려하면서 과도상태 응답개선에 대한 이론적인 고찰과 제어기설계 수식을 유도한다. 그리고 HMBS에 대해 물리 퍼래미터 변동에 대한 강인성과 외란의 영향을 저감하고 기준위치 변경에 따른 추종성을 갖도록 상태 피드백 제어기를 LMI 기법을 이용하여 설계한다. 3장에서는 설계한 제어칙을 가지고 시스템 불확실성의 변동에 대해 시간영역의 설계사양을 고려한 경우와 고려하지 않은 경우에 대하여 시뮬레이션을 행하고 실제 적용 가능성을 검토한다.

A NOVEL MULTI-INPUT MULTI-OUTPUT FUZZY CONTROLLER

  • Huaguang, Zhang;Bien, Zeungnam;Yinguo, Piao
    • 한국지능시스템학회:학술대회논문집
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    • 한국퍼지및지능시스템학회 1998년도 The Third Asian Fuzzy Systems Symposium
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    • pp.194-198
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    • 1998
  • A novel fuzzy basis function vector- based adaptive control approach for Multi-input and Multi-output(MIMO) system is presented in this paper, in which the nonlinear plants is first linearised, the fuzzy basis function vector is then introduced to adaptively learn the upper bound of the system uncertainty vector, and its output is used as the paramenters of the compensator in the sense that both the robustness and the asymptotic error convergence can be obtained for the closed loop nonlinear control system.

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생분해성 랩 와인딩 기계의 장력제어를 위한 모델링 (Modeling for Tension Control of the Bio-Wrap Winding Machine)

  • 박우철;김해성;김동일;양성모;기창두
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1901-1905
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    • 2005
  • This Paper describes the mathematical modeling and control of the tension and the speed of moving Bio-wrap in a wrap winding machine. In winding process, important control specifications include the regulation of wrap tension and velocity. In this research, a tension and velocity model has been developed for winding processes. A prototype winding system has been constructed, and the controller has been implemented in a real time PC-based environment. The tension control system is modeled a MIMO of the two-input and four-output system. The performance of the modeled system has been evaluated via simulation using MATLAB and experiments.

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소각 프린트의 증기발생 및 배기가스에 대한 파라메트릭 ARX 모델규명 (Identification of a Parametric ARX Model of a Steam Generation and Exhaust Gases for Refuse Incineration Plants)

  • 황이철
    • 제어로봇시스템학회논문지
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    • 제8권7호
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    • pp.556-562
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    • 2002
  • This paper studies the identification of a combustion model, which is used to design a linear controller of a steam generation quantity and harmful exhaust gases of a Refuse Incineration Plant(RIP). Even though the RIP has strong nonlinearities and complexities, it is identified as a MIMO parametric ARX model from experimental input-output data sets. Unknown model parameters are decided from experimental input-output data sets, using system identification algorithm based on Instrumental Variables(IV) method. It is shown that the identified model well approximates the input-output combustion characteristics.

자동 학습 퍼지 제어기를 이용한 발전용 보일러 시스템 제어에 관한 연구 (A Study on the Boiler System Control of Fossil-Power Plant Using a Self-organizing Fuzzy Logic Control)

  • 문운철
    • 대한전기학회논문지:전력기술부문A
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    • 제50권11호
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    • pp.514-519
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    • 2001
  • This Paper presents an application of a on-line self-organizing fuzzy logic controller to a boiler system of fossil-power plant. A boiler-turbine system is described as a MIMO nonlinear system in this paper. Then, three single loop fuzzy logic controllers are designed independently. The control rules and the membership functions of proposed fuzzy logic control system are generated automatically without using plant model. The simulation shows successful results for wide range operation of boiler system of fossil-power plant.

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삼상 DC/AC 인버터의 디지털 제어 (Digital Controller Design for Three-phase AC/DC Inverter)

  • 이진목;권경민;손경민;최은진;임재관;최재호
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.1005_1006
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    • 2009
  • 본 논문에서는 단독부하형 삼상인버터의 디지털 전압제어기를 설계한다. 단독부하운전은 선형부하의 변동이나 비선형 부하에서도 안정적인 전압을 공급하는 것이 목적이다. 삼상 인버터를 선형 제어기로 제어하기 위해서 이상동기회전자표계로 제어하지만 두 개의 간섭항 때문에 MIMO 시스템으로 되어 해석적인 제어기를 설계하기 어려워 대부분의 연구에서는 시행착오법으로 제어기를 설계하였다. 본 논문에서는 삼상 인버터의 축변환시에 발생하는 간섭항의 영향을 상대이득행렬로 분석하여 간섭항의 영향을 분석하고 삼상 인버터 시스템을 SISO 시스템으로 만들어 전압제어기만을 갖는 최소 차수의 제어기를 해석적으로 설계하며 응답속도를 향상시키기위해서 오버슈트와 정정시간을 조절할 수 있는 극배치기법으로 설계한다. 설계한 제어기는 시뮬레이션과 실험을 통해서 강인성을 보인다.

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