• 한국지반공학회논문집
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• 제39권8호
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• pp.41-48
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• 2023

미생물에 의한 탄산칼슘 침전(MICP)은 생물학적 기술로 지반의 공학적 특성을 향상시키는 개량공법이다. 본 논문에서는 식물 생장에 MICP 약액의 농도가 미치는 영향을 분석하였다. 큰김의털 종자를 주문진 표준사로 채워진 식물 용기에서 생장시킨 다음에 표면 처리법으로 MICP 약액을 살포하였다. 실험 결과는 MICP 약액이 처리된 식물의 줄기 생장은 무처리 식물과 비교하여 억제되었다. MICP 약액으로 인한 토양의 화학적 성분 변화를 분석하기 위해 pH와 전기전도도를 측정하였으며, pH는 MICP 약액 처리와 상관 없이 모든 경우에서 pH 7에 가까운 중성상태를 보였지만, 전기전도도는 MICP 약액의 농도가 높을수록 증가하였다. MICP 처리 과정에서 발생한 이온들이 식물 뿌리 주변 토양의 삼투압을 증가시켜 식물 성장에 필요한 물과 양분의 흡수를 저해하였고, 궁극적으로 식물 생장을 억제하였기 때문이다.

• 한국지반신소재학회논문집
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• 제22권2호
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• pp.13-21
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• 2023

최근 지구온난화 등으로 인하여 지구의 평균해수면이 상승하는 추세이다. 삼면이 바다인 국내의 경우 연안침식이 초래되어 국토 손실 및 연안의 위험성을 높일 가능성이 있다. 미생물에 의한 탄산칼슘 형성(MICP) 기술은 미생물에 의한 탄산칼슘침강 기술이며, 지반의 강성과 강도를 증진시키는 친환경적 방법이다. 본 연구에서는 연안 침식 저감을 위하여 MICP 기술을 제안하였다. 연안 조건을 고려하여 용매로 해수를 사용하고 탈염수와 그 성능을 비교하였다. 탈염수와 해수 조건하에서 미생물에 의한 요소분해능을 조사하였다. 소일칼럼을 제작하여 MICP 처리된 모래의 강도 평가를 실시하였다. MICP 처리는 표면살포법에 의해 처리되었는데, 이러한 방식은 기존의 혼합 방식과 달라 전통적인 강도 평가 방식은 적절하지 않음을 확인하였다. 미세 구조 분석을 통해 다른 용매가 사용된 경우의 광물적 변화를 관측하였다. 실험 결과, 해수는 미생물에 의한 요소분해 반응을 느리게 만드는 것을 확인하였다. 표면 경화된 모래는 침관입시험을 통해 효과적으로 평가할 수 있었다. 이 연구에서는 해수를 용매로 사용하여도 탈염수 수준으로 충분히 MICP 기술 적용이 가능함을 확인하였다.

• Geomechanics and Engineering
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• 제35권1호
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• pp.95-108
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• 2023

Soft soil ground is a crucial factor limiting the development of the construction of transportation infrastructure in coastal areas. Soft soil is characterized by low strength, low permeability and high compressibility. However, the ordinary treatment method uses Portland cement to solidify the soft soil, which has low early strength and requires a long curing time. Microbially induced carbonate precipitation (MICP) is an emerging method to address geo-environmental problems associated with geotechnical materials. In this study, a method of bio-cementitious mortars consisting of MICP and cement was proposed to stabilize the soft soil. A series of laboratory tests were conducted on MICP-treated and cement-MICP-treated (C-MICP-treated) soft soils to improve mechanical properties. Microscale observations were also undertaken to reveal the underlying mechanism of cement-soil treated by MICP. The results showed that cohesion and internal friction angles of MICP-treated soft soil were greater than those of remolded soft soil. The UCS, elastic modulus and toughness of C-MICP-treated soft soil with high moisture content (50%, 60%, 70%, 80%) were improved compared to traditional cement-soil. A remarkable difference was observed that the MICP process mainly played a role in the early curing stage (i.e., within 14 days) while cement hydration continued during the whole process. Micro-characterization revealed that the calcium carbonate filling the pores enhanced the soft soil.

• Geomechanics and Engineering
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• 제33권2호
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• pp.133-140
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• 2023

Soil erosion can cause scouring and failures of underwater structures, therefore, various soil improvement techniques are used to increase the soil erosion resistance. The microbially induced calcium carbonate precipitation (MICP) method is proposed to increase the erosion resistance, however, there are only limited experimental and numerical studies on the use of MICP treatment for improvement of surface erosion resistance. Therefore, this study investigates the improvement in surface erosion resistance of sands by MICP through laboratory experiments and numerical modeling. The surface erosion behaviors of coarse sands with various calcium carbonate contents were first investigated via the erosion function apparatus (EFA). The test results showed that MICP treatment increased the overall erosion resistance, and the contribution of the precipitated calcium carbonate to the erosion resistance and critical shear stress was quantified in relation to the calcium carbonate contents. Further, these surface erosion processes occurring in the EFA test were simulated through the coupled computational fluid dynamics (CFD) and discrete element method (DEM) with the cohesion bonding model to reflect the mineral precipitation effect. The simulation results were compared with the experimental results, and the developed CFD-DEM model with the cohesion bonding model well predicted the critical shear stress of MICP-treated sand. This work demonstrates that the MICP treatment is effective in improving soil erosion resistance, and the coupled CFD-DEM with a bonding model is a useful and promising tool to analyze the soil erosion behavior for MICP-treated sand at a particle scale.

• 반도체디스플레이기술학회지
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• 제2권3호
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• pp.7-11
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• 2003

In this research, the etching characteristics of via contact and deep contact hole have been studied using multi-pole inductively coupled plasma(MICP) etching system. We investigated Plasma density of MICP source using the Langmuir probe and etching characteristics with RF frequency, wall temperature, chamber gap, and gas chemistry containing Carbon and Fluorine. As the etching time increases, formation of the polymer increases. To improve the polymer formation, we controlled the temperature of the reacting chamber, and we found that temperature of the chamber was very effective to decrease the polymer thickness. The deep contact etch profile and high selectivity(oxide to photoresist) have been achieved with the optimum mixed gas ratio containing C and F and the temperature control of the etching chamber.

• Nuclear Engineering and Technology
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• 제54권10호
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• pp.3631-3640
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• 2022

Uranium mill tailing ponds (UMTPs) are risk source of debris flow and a critical source of environmental U and Rn pollution. The technology of microbial induced calcium carbonate precipitation (MICP) has been extensively studied on reinforcement of UMTs, while little attention has been paid to the effects of MICP on U & Rn release, especially when incorporation of metakaolin and bacillus subtilis (MBS). In this study, the reinforcement and U & Rn immobilization role of MBS -MICP solidification in different grouting cycle for uranium mill tailings (UMTs) was comprehensively investigated. The results showed that under the action of about 166.7 g/L metakaolin and ~50% bacillus subtilis, the solidification cycle of MICP was shortened by 50%, the solidified bodies became brittle, and the axial stress increased by up to 7.9%, and U immobilization rates and Rn exhalation rates decrease by 12.6% and 0.8%, respectively. Therefore, the incorporation of MBS can enhance the triaxial compressive strength and improve the immobilization capacity of U and Rn of the UMTs bodies solidified during MICP, due to the reduction of pore volume and surface area, the formation of more crystals general gypsum and gismondine, as well as the enhancing of coprecipitation and encapsulation capacity.

• Geomechanics and Engineering
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• 제32권1호
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• pp.85-96
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• 2023

Microbially induced carbonate precipitation (MICP) is extensively discussed as a promising topic for ground stabilization. The practical effect of stabilizing the expansive soil is presented in this paper with a logical process from the bacterial activity to the treatment technology. Temperature, pH, shaking frequency, and inoculation amount are discussed to evaluate the bacterial activity. The physic-mechanic properties are also evaluated to discuss the effect of the MICP process on expansive soil. Results indicate that the MICP method achieves the mitigation of expansion. The treated soil has a low proportion of fine particles (< 5 ㎛), the plasticity index significantly decreases, and strength values improve much. MICP process has a significant cementation effect on the soil matrix. Moreover, the infiltration model test presents the coating effect on the topsoil. According to the relation between the CaCO₃ content and the treatment effect, the topsoil has better treatment than the deeper soil.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 춘계학술대회 발표 논문집
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• pp.12-17
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• 2003

본 연구에서는 MICP Etching system 을 이용한 Via contact 및 Deep contact hole etch process 특성을 연구하였다. Langmuir probe 를 이용한 MICP source 의 Plasma density & electron temperature 측정하였고 탄소와 플로우르를 포함하는 혼합 Plasma 를 형성하여 RF frequency, wall temperature, chamber gap, gas chemistry 등의 변화에 따른 식각 특성을 조사하였다. Plasma density 는 1000w 에서 $10^{11}$/$cm^3$ 이상의 high density plasma와 uniform plasma 형성을 확인하였고 $CH_{2}F_{2}$와 CO의 적절한 혼합비를 이용하여 Oxide to PR 선택비가 10 이상인 고선택비 조건을 확보하였다. 고선택비 형성에 따라 Polymer 형성이 많이 되었고 이를 개선하기 위하여 반응 챔버의 온도 조절을 통하여 Polymer 증착 방지에 효과적인 것을 확인하였다. MICP source를 이용하여 탄소와 플로우르의 혼합 가스와 식각 챔버의 온도 조절에 의한 선택비 증가를 확보하여 High Aspect Ratio Contact Hole Etch 가능성을 확보하였다.

• Geomechanics and Engineering
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• 제32권3호
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• pp.347-359
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• 2023

With the development of infrastructure, there is a critical shortage of filling materials all over the word. However, a large amount of silt accumulated in the lower reaches of the Yellow River is treated as waste every year, which will cause environmental pollution and waste of resources. Microbial induced calcium carbonate precipitation (MICP) technology, with the advantage of efficient, economical and environmentally friendly protection, is selected to solidify the abandoned Yellow River silt with poor mechanical properties into high-quality filling material in this paper. Based on unconfined compressive strength (UCS) test, determination of calcium carbonate (CaCO₃) content and scanning electron microscope (SEM) test, the effects of cementation solution concentration, treatment times and relative density on the solidification effect were studied. The results show that the loose silt particles can be effectively solidified together into filling material with excellent mechanical properties through MICP technology. The concentration of cementation solution have a significant impact on the solidification effect, and the reasonable concentration of cementation solution is 1.5 mol/L. With the increase of treatment times, the pores in the soil are filled with CaCO₃, and the UCS of the specimens after 10 times of treatment can reach 2.5 MPa with a relatively high CaCO₃ content of 26%. With the improvement of treatment degree, the influence of relative density on the UCS increases gradually. Microscopic analysis revealed that after MICP reinforcement, CaCO₃ adhered to the surface of soil particles and cemented with each other to form a dense structure.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.279-281
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• 1997

The properties of Platinum dry etching were investigated in MICP(Magnetized Inductively Coupled Plasma). The problem with Platinum etching is the redeposition of sputtered Platinum on the sidewall. Because of the redeposits on the sidewall, the etching of patterned Platinum structure produce feature sizes that exceed the original dimension of the PR size and the etch profile has needle-like shape.[1] Generally, $Cl_2$ plasma is used for the fence-free etching.[1][2][3] The main object of this study was to investigate a new process technology for the fence-free Pt etching. Platinum was etched with Ar plasma at the cryogenic temperature and with Ar/$SF_6$ plasma at room temperature. In cryogenic etching, the height of fence was reduced to 20% at $-190^{\circ}C$ compared with that of room temp., but the etch profile was not fence-free. In Ar/$SF_6$ Plasma, chemical reaction took part in etching process. The trend of properties of Ar/$SF_6$ Plasma etching is similar to that of $Cl_2$ Plasma etching. Fence-free etching was possible, but PR selectivity was very low. A new gas chemistry for fence-free Platinum etching was proposed in this study.