• 한국산학기술학회논문지
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• 제4권2호
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• pp.63-70
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• 2003

본 논문에서는 반도체 제조장비의 핵심 부품 중에 하나인 질량유량제어기(MFC, Mass Flow Controller)클 설계하고 구현하였다 Microchip社의 마이크로콘트롤러(Microcontroller) PIC 16F876을 사용하여 개발된 MFC는 여러가지 문제점을 가진 아날로그(Analog) 방식의 MFC와 고가의 DSP(Digital Signal Processor) 및 고분해능의 AD변환기(Analog to Digital Convertor)를 사용하는 디지털 MFC의 장점을 혼합한 하이브리드형(Hybrid-Type)이다. 본 논문에서 개발된 MFC는 크게 센서부(Sensor Unit), 제어부(Control Unit), 구동기부(Actuator Unit)로 구성되었으며, 성능향상을 위한 자동보정(Automatic Calibration) 알고리즘과 표준테이블(Reference Table) 방식을 사용하였다.

• 연구논문집
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• 통권22호
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• pp.85-96
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• 1992

A mass flow controller(MFC) is commonly used in the semiconductor industries to control the flow rate of various process gases. The measurement and precise control of the of flow rate the gas are the key for a succesful IC fabrication. To eventually design a reliable MFC, a pre-proto type MFC was built and its flow characteristics were investigated. Most of the functional components of the pre-proto type were built for the present study, but the remainder were adopted from a commercial unit. The flow control characteristics were compared with that of a standard MFC. Major dimensions of an MFC for 0-10 SLM capacity were suggested.

• 대한의용생체공학회:의공학회지
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• 제42권4호
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• pp.193-200
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• 2021

Flowmeter and oxygen sensors are listed in COVID-19 essential medical devices. This article reports a Teensy microcontroller-based Oxygen mass flow controller (MFC), core part of the oxygen respirator or extracorporeal membrane oxygenation (ECMO). The developed MFC consisting of the microcontroller, MEMS flow sensor, and solenoid valve was able to accurately control 0 to 100 sccm of oxygen flow rate. The pressure of vacuum chamber increased proportionally to the flow rate (0.998 of Pearson correlation coefficient). The experimental results proved that the developed MFC exhibits comparable performance to a commercial MFC in accuracy, settling time, linearity with pressure, and repeatability of oxygen mass flow control. It is expected that this simple and cheap MFC is utilized for oxygen therapy against the severe acute respiratory syndrome coronavirus 2.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.595-600
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• 2001

Thermal mass flow meter(TMF) and thermal mass flow controller(MFC) were used to measure and to control the mass flow rate of gases. TMF and MFC were designed for specified working pressure and gas. For the case of different working pressure and gases, the flow rate measurement accuracy decreased dramatically. In this study, a TMF and MFC was tested with three different gases and pressure range from 0.2 MPa up to 1.0 MPa. Effect of specific heat causes to increase flow measurement error as much as ratio of specific heat compared with reference gas. Changing of pressure causes to increase flow rate measurement error about -0.2% as the working pressure decreased 0.1 MPa. Response time of MFC was below 3.12 s for the case of increasing of flow rate. But the response time was increased up to 6.92 s for the case of decreasing of flow rate. When the solenoid valve was fully closed, a initial delay time of output of MFC was increased up to 1.36 s.

• 제어로봇시스템학회논문지
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• 제13권1호
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• pp.19-25
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• 2007

The MFC(Mass Flow Controller) is an equipment that measures and controls mass flow rates of fluid. Most of the HFC system is still using the PID algorithm. The PID algorithm shows superior performance on the MFC system. But the PID algorithm in the MFC system has a few problems as followed. The characteristic of the MFC system is changed according to the operating environment. And, when the piezo valve that uses the control valve is assembled in the MFC system, a coupling error is generated. Therefore, it is very difficult to find out the exact parameters of MFC system. In this paper, we propose adaptive PID algorithm in order to compensate these problems of a traditional PID algorithm. The adaptive PID algorithm estimates the parameters of MFC system using LMS(Least Mean Square) algorithm and calculates the coefficients of PID controller. Besides, adaptive PID algorithm shows better transient response because adaptive PID algorithm includes a feedforward. And we implement MFC system using proposed adaptive PID algorithm with self-tuning and Ziegler and Nickels's method. Finally, comparative analysis of the proposed adaptive PID and the traditional PID is shown.

• 한국컴퓨터정보학회논문지
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• 제15권4호
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• pp.99-106
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• 2010

본 논문에서는 MFC(Mass Flow Controller) 유닛으로부터 전송된 유체의 압력을 모니터하고 흐름 제어 기능을 수행하는 유체 유동 모니터링 시스템을 제안한다. 이 시스템은 MFC 유닛과 채널 디바이스, 모니터 및 관리 소프트웨어로 구성된다. MFC 유닛은 유체 압력 값을 측정하여 채널 디바이스로 전송하고, 채널 디바이스는 MFC 유닛과 모니터 및 관리 소프트웨어간의 입출력 인터페이스를 제공하는 기능을 한다. 모니터 및 관리 소프트웨어는 각 채널의 MFC 유닛에서 실시간으로 측정한 유체 압력 값을 모니터링하여 분석하고 제어한다. 이 소프트웨어는 20개의 채널과 0.1의 모니터링 주기로 구성하여 1초당 200개 즉, 1시간당 72만개의 데이터를 처리한다. 이때 입력 데이터 수의 증가에 따라 저장 공간도 비례하여 증가한다. 이러한 데이터 수의 증가와 저장 공간의 증가는 데이터 조회 성능을 저하시키기 때문에 데이터를 효율적으로 관리할 수 있는 변경값 감지 기법과 변경 범위 감지 기법으로 구현한다.

• Journal of Advanced Marine Engineering and Technology
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• 제28권3호
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• pp.531-537
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• 2004

In this paper, the static and dynamic characteristics in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC. the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations among flow rate, heat generated by heating wire. and sensor location were investigated to find optimized condition. Finally, the relation between sensor voltage through analog digital conversion(ADC) and flow rate in the sensor tube can be represented. Based on this study, static and dynamic characteristics of sensor tube can be used for design of mass flow controller.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.893-894
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• 2013

• 동력기계공학회지
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• 제7권3호
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• pp.35-39
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• 2003

In this paper, the heat transfer phenomena in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC, the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations of flow rate, generated heat by heating wire, sensor location and tube thickness were investigated to find the optimized condition. Based on this study, static and dynamic characteristics of sensor can be used for mass flow controller.

• 반도체디스플레이기술학회지
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• 제7권2호
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• pp.55-58
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• 2008

The objective of the research is to design, manufacture and test a Mass Flow Controller(MFC) capable of measuring compressible fluid flows based on a "bucket and stop-watch"method. The basic principle is the measurement of time, where the time taken to fill and empty a bucket of known volume is measured. This method of flow measurement is a new concept when compared to a commercilized current mass flow controller. For the flow meter to be able to compete with established designs it not only must be comparable in cost and robustness, it must be very accurate and reliable as well. This device should be able to handle fluid flows in the range of 0.1ml/min to 10ml/min within an accuracy of ${\pm}$1%. A possible application for a device such as this is in electronics industry where arsenic gas is used in the production of silicon chips.