• Journal of Biomedical Engineering Research
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• v.37 no.5
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• pp.168-177
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• 2016

In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of $3mm{\times}15mm{\times}0.5mm$. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure.

• Journal of the Korea institute for structural maintenance and inspection
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• v.17 no.2
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• pp.21-32
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• 2013

This is a preliminary study for the real-time feedback vibration control of building structures. The study developed a wireless acceleration sensor system based on authentic technology capacities, to integrate with the Prototype AMD system and ultimately construct the feedback vibration control system. These systems were used to evaluate the basic performance levels of the control systems within model building structures. For this purpose, the study first developed a wireless acceleration sensor unit that integrates an MEMS sensor device and bluetooth communication module. Also, the study developed an operating program that enables control output based on real-time acceleration response measurement and control law. Furthermore, the Prototype AMD and motor driver system were constructed to be maneuvered by the AC servo-motor. Eventually, all these compositions were used to evaluate the real-time feedback vibration control system of a 2-story model building, and qualitatively measure the extent of vibrational reduction of the target structure within the laboratory validation tests. As a result of the tests, there was a definite vibrational reduction effect within the laboratory validation tests. As a result of the tests, there was a definite vibrational reduction effect within 1st and 2nd resonance frequency as well as the random frequency of the model building structure. Ultimately, this study confirmed the potential of its wireless acceleration sensor system and AMD system as an effective tool that can be applied to the active vibration control of other structures.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.22-29
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• 2008

• Ceramist
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• v.7 no.3
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• pp.38-47
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• 2004

최근 micro structure, micro sensor, micro actuator 및 microelectronics 등을 활용하는 microelectromecha-nical systems (MEMS) 기술은 마이크로 로봇, micro manipulation, 광학 소자 및 시스템, 유체, 열, 바이오 및 화학공정 등을 위한 시스템 그리고 atomic force와 scanning tunneling microscope 등에 사용되는 다양한 소자 등 많은 잠재력을 가지고 있다. 이들 응용 분야 들은 micro actuator와 같은 mechanical power source가 요구되는 경우가 있다. 압전 특성을 포함하는 강유전체 재료는 이러한 micro actuator를 위해 여러 가지 다양한 장점을 지니고 있는데, 이들을 정리하면 다음과 같다. (중략)

• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.114-115
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• 2003

최근 급속히 성장하고 있는 Wavelength-division-multiplexing (WDM) 시스템에 파장가변 필터는 핵심적인 소자로 적용될 수 있으며, 높은 가격 경쟁력과 광학 필터로서 좋은 특성과 높은 가변 특성을 구현할 수 있다. 이러한 파장가변 필터는 multi-beam 간섭을 이용하고, Micro electro mechanical systems (MEMS) 공정 기술인 벌크 마이크로 머시닝 기술을 이용하여 구현되어지고 있다. 또한 파장 가변 필터는 Optical-performance monitoring, Spectrometer, Optical noise filter, Sensor 등 여러 분야에 응용될 수 있다. (중략)

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.9
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• pp.669-676
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• 2013

In this study, we introduce a polymer(polyimide) based pressure sensor to measure real-time heart beat and blood pressure. The sensor have been designed with consideration of skin compatibility of material, cost effectiveness, manufacturability and wireless detection. The designed sensor was composed of inductor coils and an air-gap capacitor which generate self-resonant frequency when electrical source is applied on the system. The sensor was obtained with metalization, etching, photolithography, polymer adhesive bonding and laser cutting. The fabricated sensor was shaped in circular type with 10mm diameter and 0.45 mm thickness to fit radial artery. Resonant frequencies of the fabricated sensors were in the range of 91~96 MHz on 760 mmHg pressurized environment. Also the sensor has good linearity without any pressure-frequency hysteresis. Sensitivity of the sensor was 145.5 kHz/mmHg and accuracy was less than 2 mmHg. Real-time heart beat measurement was executed with a developed hand-held measurement system. Possibility of real-time blood pressure measurement was showed with simulated artery system. After installation of the sensor on skin above radial artery, simple real blood pressure measurement was performed with 64 mmHg blood pressure variation.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2482-2487
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• 2007

Numerical simulations are conducted for the analysis of a thermal mass air flow sensor with periodic heating pulses on silicon-nitride ($Si_3N_4$) thin membrane structure. This study aims to find the locations of temperature sensors on the thin membrane and the heating pulse conditions, that the higher sensitivity can be achieved, for the development of a MEMS fabricated mass air flow sensor which is driven in periodic heating pulse. The simulations, thus, focus on the membrane temperature profile according to variation of the flow velocity, heating duration time and imposed power. The flow velocity of the simulations is ranging from 3 m/s to 35 m/s, heating duration time from 1 ms to 3 ms and imposed power from 50 mW to 90 mW. The corresponding Reynolds numbers vary from 1000 to 10000.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.5
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• pp.105-111
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• 2000

Micronization of sensor is a trend of the silicon sensor development with regard to a piezoresistive silicon pressure sensor, the size of the pressure sensor diaphragm have become smaller year by year, and a microaccelerometer with a size less than 200~300${\mu}{\textrm}{m}$ has been realized. Over the past four or five years, numerical modeling of microsensors and microstructures has gradually been developed as a field of microelectromechanical system(MEMS) design process. In this paper, we study some of the micromachining processes of single crystal silicon(SCS) for the microaccelerometer, and their subsequent processes which might affect thermal and mechanical loads. The finite element method(FEM) has been a standard numerical modeling technique extensively utilized in structural engineering discipline for component design of microaccelerometer. Temperature rise sufficiently low at the suspended beams. Instead, larger temperature gradient can be seen at the bottom of paddle part. The center of paddle part becomes about 5~2$0^{\circ}C$ higher than the corner of paddle and suspended beam edges.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.10
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

• Proceedings of the Korea Society of Information Technology Applications Conference
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• 2005.11a
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• pp.207-210
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• 2005

Ubiquitous computing is one of the key technology areas in the "Project on Development of Ubiquitous computing and network technology" promoted by the Ministry of Science and Technology as a frontier business of the $21^{st}$ century in Korea, which is based on the new concept merging physical space and computer-based cyber space. With recent advances in Micro Electro Mechanical System (MEMS) technology, low cost and low-power consumption wireless micro sensor nodes have been available. Using these smart sensor nodes, there are many activities to monitor real world, for example, habitat monitoring, earthquake monitoring and so on. In this paper, we introduce web-based real environment monitoring system incorporating wireless sensor nodes. It collects sensing data produced by some wireless sensor nodes and stores them into a database system to analyze. Our environment monitoring system is composed of a networked camera and environmental sensor nodes, which are called Mica2 and developed by University of California at Berkeley. We have modified and ported network protocols over TinyOS and developed a monitoring application program using the MTS310 and MTS420 sensors that are able to observe temperature, relative humidity, light and accelerator. The sensed data can be accessed user-friendly because our environment monitoring system supports web-based user interface. Moreover, in this system, we can setup threshold values so the system supports a function to inform some anomalous events to administrators. Especially, the system shows two useful pre-processed data as a kind of practical uses: a discomfort index and a septicity index. To make both index values, the system restores related data from the database system and calculates them according to each equation relatively. We can do enormous works using wireless sensor technologies, but just environment monitoring. In this paper, we show just one of the plentiful applications using sensor technologies.