• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.4
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• pp.524-530
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• 2002

Micro electric spark discharge device was fabricated on a FOTURAN glass wafer using MEMS processing technique and its performance of electron discharge and subsequent formation of ignition kernel were tested. Micro electric spark device is an essential subsystem of a power MEMS that has been under development in this laboratories. In a combustion chamber of sub millimeter scale depth, spark electrodes are formed by electroplating Ni on a base plate of FOTURAN glass wafer. Optimization of spark voltage and spark gap is crucial for stable ignition and endurance of the electrodes. Namely, wider spark gaps insures stable ignition but requires higher ignition voltage to overcome the spark barrier. Also, electron discharge across larger voltage tends to erode the electrodes limiting the endurance of the overall system. In the present study, the discharge characteristics of the proptotype ignition device was measured in terms of electric quantities such as voltage and currant with spark gap and end shape as parameters. Discharge voltage shows a little decrease in width of less than 50㎛ and increases with electrode gap size. Reliability test shows no severe damage over 10$\^$6/ times of discharge test resulting in satisfactory performance for application to proposed power MEMS devices.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1536-1540
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• 1997

Recently, many advanced technologies in electronics, mechanics, material and computer science have been applied to medictine and they have changed the method of diagnosis and treatment to more quantitative way than before. Now day, with the aid of this technology, the device for the minimal invasive diagnosis and treatment is being developed for the convenience and safety of patients. this paper introduces application of senso and MEMS(Micro Electro Mechnical System) in medicine and biotechnology, which are essential factor for the realization of minimal invasive diagnosis and treatment.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.478-480
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• 2009

This experiment implemented a laser projection system that used the 2D MEMS scanner as the driving method for the display device. The 2D MEMS scanner, which can scan the images horizontally and vertically, was applied to drive the projection system using the interlaced scanning method. The laser was directly modulated to implement the grayscale and the images were WVGA resolution quality.

• 전기의세계
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• v.45 no.9
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• pp.37-41
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• 1996

MEMS 기술에 의해 개발되고 있는 많은 제품들 가운데 가장 잠재력 있고 큰 시장을 가진 대형 projector의 개발은 핵심 chip이 현재 DMD(Digital Micromirror Device), AMA(Actuated Mirror Array), 그리고 GLV(Grating Light Valve) 방식으로 진행되고 있으며 TI사가 개발 중인 DMD projector가 상품화에 근접해 있으며 고화질의 시제품을 SID(Society for Information Display) 국제 전시회에 출품하여 전세계 연구원들의 이목을 끌었으며 앞으로 어떻게 수율을 높이고 광학계의 단순화를 이루어 제작비를 낮추는 가가 관심의 초점이다. MEMS 연구를 하는 한 사람으로서의 사견으로도 이 제품이 성공하여야 범세계적으로 일어나고 있는 MEMS 기술이 더욱 확실한 신기술로서의 지위를 갖고 연구되리라 믿는다.

• Smart Structures and Systems
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• v.6 no.1
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• pp.1-16
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• 2010

This paper presents a novel smart MEMS accelerometer which employs a hybrid control algorithm and an estimator. This scheme is realized by adding a sliding-mode controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing finger displacement from passing a maximum preset value as well as adding an adaptive nonlinear observer to a conventional PID closed loop system. This estimator is used for online estimation of the parameter variations for MEMS accelerometers and gives the capability of self testing to the system. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.

• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.184-188
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• 2006

This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.7
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• pp.979-986
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• 2013

Recently, in the electric, electronic, robotic, and medical industries, a great attention has been paid to the development of MEMS-based smart devices with a compact size and highly intelligency. The MEMS technology is very effective in designing into a compact size and lightweight by combining into one the complex electrical, mechanical, chemical, and biological features which are required by smart devices, and at the same time, in bulk batch manufacturing. Therefore, this study, to prepare for upcoming new MEMS-based technological paradigm, analyzes MEMS processes and then considers its Applications.

• Journal of Sensor Science and Technology
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• v.19 no.4
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• pp.259-270
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• 2010

MEMS(micro electro mechanical systems) is a technology for the manufacture hyperfine structure, as a micro-sensor and a driving device, by a variety of materials such as silicon and polymer. Many study for utilizing the MEMS applications have been performed in variety of fields, such as light devices, high frequency equipments, bio-technology, energy applications and other applications. Especially, the field of Bio-MEMS related with bio-technology is very attractive, because it have the potential technology for the miniaturization of the medical diagnosis system. Bio-MEMS, the compound word formed from the words 'Bio-technology' and 'MEMS', is hyperfine devices to analyze biological signals in vitro or in vivo. It is extending the range of its application area, by combination with nano-technology(NT), Information Technology(IT). The LOC(lab-on-a-chip) in Bio-MEMS, the comprehensive measurement system combined with Micro fluidic systems, bio-sensors and bio-materials, is the representative technology for the miniaturization of the medical diagnosis system. Therefore, many researchers around the world are performing research on this area. In this paper, the application, development and market trends of Bio-MEMS are investigated.

• Proceedings of the SAREK Conference
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• 2008.11a
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• pp.170-174
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• 2008

Recently, a problem related to the thermal management in portable electronic and telecommunication devices is becoming issued. That is due to the trend of slimness of the devices, so it is not easy to find the optimal thermal management technology for the devices. From now on, a pressed circular type cooling device has been mainly used, however the cooling device with thin thickness is becoming needed by the inner space constraint. In the present study, the silicon and metal flat plate type cooling device with the separated vapor and liquid flow path was designed and fabricated. Through the experimental study, the normal isothermal characteristic by vapor-liquid phase change was confirmed and the cooling device with 70mm of total length showed 6.8W of the heat transfer rate within the range of $4{\sim}5^{\circ}C$/W of thermal resistance. In the meantime, the metal cooling device was developed for commercialization. The device was designed to have all structures of evaporator, vapor flow path, liquid flow path and condenser in one plate. And an envelope of that could be completed by combining the two plates of same structure and size. And the simplicity of fabrication process and reduction of manufacturing cost could be accomplished by using the stamping technology for fabricating large flow paths relatively. In the future, it will be possible to develop the commercialized cooling device by revising the fabrication process and enhancing the thermal performance of that.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.14 no.12
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• pp.2805-2810
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• 2010

The Passive Device called SAW Device of the ID Tag or a small sensor that can replace all of MEMS technology Micro Device. When using SAW Device will be able to replace that sensor control the power needed or separate space. Enlarge the scope of this advantage to use as a platform for various SAW Device is required. However, the current SAW Sensor development has many, but SAW Sensor that can leverage the platform's development is sketchy. Therefore, this paper implements SAW Reader can be measured in SAW Device Using an FPGA more simple and efficient Reader platform.