• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.05a
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• pp.355-358
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• 2003

Recently, micro forming process technology have been developed since the size of machine parts become the crucial factor for minimizing of products in general electronic products. Most small machine parts consist of gear and rotation axis and the wear by mechanical contact is known as the primary factor for life reduction of high precision machine part. Lots of studies for mechanical wear and friction have been reported and many researches of MEMS technology have been studied recently. But just few studies for wear of micro or milli sized machine part have teen implemented. In this research, the wear equation is suggested according to the contact shape of axial part in micro or milli sized machine part. And wear analysis model which can predict the magnitude of wear through this suggested equation with numerical analysis program.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.871-874
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• 2004

Fabrication of a high-resolution shadow mask, or called nanostencil, is presented. This high-resolution shadowmask is fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. 500 nm thick and 2x2 mm large membranes are made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. Subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to high resolution of FIB milling process, nanoscale apertures down to 70 nm could be made into the membrane.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.10a
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• pp.26-31
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• 2001

Recently, miniaturization and mass production are the main trends in manufacturing fields. Therefore, ultraprecision machining and MEMS technology have been taken more and more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products, such as PDP and IT components, in precision products manufacturing. However, the deburring is significant problem in making smooth and precise parts in micro endmilling. This paper shows removal characteristics of burr generated by micro endmilling process. Additionally, it is necessary to understand the formation mechanism of burr of micro barrier ribs to find proper deburring method.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.4
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• pp.773-776
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• 2007

A microstructure array has been proposed for micro plasma generation using electroplating and double exposed process. A stable atmospheric plasma has been generated at a low voltage by utilizing the micro electrode gap. Self-aligned microstructure can provide uniform electrode overlap with precisely controlled gap between the electrodes. The proposed structure allows for triode operation, which can expand the generated plasma over a large area by applying a lateral electric field. Electrical characteristics of the micro triode confirm the large numbers of the plasma ions are drifted to the secondary cathode by the lateral electrical field.

• Journal of Fisheries and Marine Sciences Education
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• v.19 no.3
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• pp.366-372
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• 2007

This paper presents the fabrication techniques of microcooling fins for microelectronics applications. The various types of cooling fins have been fabricated on the surface of a silicon wafer (4inch-N type) by using wet etching technique. The designed micro fins and micro channels are considered as an effective method for cooling microelectronics devices generating high heat flux. Further we extensively investigate the design processes fabricating micro fins and channels which can cool the heat generated from high density electronics devices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.301-306
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• 2000

This paper describes on the fabrication of a SOI substrate by SDB technology and electrochemical etch-stop. The surface of the thinned SDB SOI substrate is more uniform than that of grinding or polishing by mechanical method, and this process was found to be a very accurate method for SOI thickness control. During electrochemical etch-stop, leakage current versus voltage curves were measured for analysis of the open current potential(OCP) point, the passivation potential(PP) point and anodic passivation potential. The surface roughness and the controlled thickness selectivity of the fabricated a SDB SOI substrate were evaluated by using AFM and SEM, respectively.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.141.6-141
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• 2001

This paper presents the attitude algorithm using Fuzzy technique to mix gyro information with accelerometer. The attitude angle calculated by the low-cost gyros only increases its error with time rapidly because of the integration process of the algorithm and large sensor error. It is known that the accelerometer output includes the attitude information of a vehicle and its information is more effective during low dynamic maneuver. Therefore it is needed to combine two information appropriately for obtaining the attitude information from low-cost MEMS inertial sensors. Because Fuzzy logic is very effective to make a decision of maneuvering state, it is applied to the mixed algorithm. It is shown by experiment ...

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.977-980
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• 1997

Ultraprecision machining process and MEMS technology have been taken more and more important position in machining of micro parts such as PDP and IT components, as the application field of micro parts increases. A micro machining center is very effective equipment for the fabrication of micro parts, because of its benefits such as lower power consumption, high precision and lower machining cost. Therefore, we study the possibility of application to the micro machining of barrier ribs used in PDP and also analyse the machining characteristics. The fabricated barrier rib has 30~$200\mu\textrm{m}$ pitch and was made by the flat endmill with the diameter of 0.2mm, 40, 000rpm condition.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.755-758
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• 2000

Rapid prototyping is one of the most important technology for 21th century industry. To overcome the limitation of the material and function, Functional Prototype Development(FPD) concept is newly proposed. Wide function is necessary such as mechanical, optical, chemical and electrical property in order to solve broad requirements of the industry. The process of FPD has more than two conventional processes based on fusion technology and the FPD system is integrated with the interdisciplinary, interfacing and intelligent concepts. This paper shows some representative achievements such as optic coloring prototypes, electric multi layer printed circuit broad(MLB) and MEMS using electrostrictive polymer. Finally, we confirmed that FPD has a great possibility which can be applied in broad industry and will be a powerful tool in near future.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.10
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• pp.83-90
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• 2007

The vehicle dynamic control system needs to detect the yaw rate of vehicle and a yaw rate sensor is required as a central component. Therefore, A sensor on the basic of the "tuning fork method" for automotive controls is being developed. The sensor was fabricated by the surface micro machining process to miniaturize its size. The sensor output offset is ${\pm}0.37^{\circ}/sec$ in the room temperature. The resonance frequency of the fabricated yaw rate sensor is measured to 5.29kHz for the drive mode. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.