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Stable Atmospheric Plasma Generation at a Low Voltage using a Microstructure Array  

Han, Sung-Ho (삼성전자 반도체총괄)
Kim, Young-Min (홍익대 공대 전자전기공학부)
Kim, Jae-Hyeok (홍익대 대학원 전기정보제어공학과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.56, no.4, 2007 , pp. 773-776 More about this Journal
Abstract
A microstructure array has been proposed for micro plasma generation using electroplating and double exposed process. A stable atmospheric plasma has been generated at a low voltage by utilizing the micro electrode gap. Self-aligned microstructure can provide uniform electrode overlap with precisely controlled gap between the electrodes. The proposed structure allows for triode operation, which can expand the generated plasma over a large area by applying a lateral electric field. Electrical characteristics of the micro triode confirm the large numbers of the plasma ions are drifted to the secondary cathode by the lateral electrical field.
Keywords
MEMS; Electroplating; Self-aligned; Discharge; Plasma;
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