1 |
RaIf G. Longwitz, et aI, 'Study of Micro glow discharges as Ion Sources', 29th EPS Conference on plasma phys. and Contr. Fusion Montreux, ECA, 26B, P-2.026, 2002
|
2 |
K H Becker, K H Schoenbach and J G Eden, 'Microplasmas and applications', J. Phys. D: Appl, Phys, 39, R55 - R70, 2006
DOI
ScienceOn
|
3 |
H. Park, T. Lee, K. Park, H.Baik, S. Lee and K. Song, 'Formation of large-volume, high-pressure plasmas in microholIow cathode discharge', Appl. Phys, Lett., Vol. 82, No. 19, May 2003
|
4 |
D. C. Meeker, Finite Element Method Magnetics, Version 4.0.1 (03Dec2006 Build)
|
5 |
L. Baars-Hibbe, et al, 'Micro-structured electrode arrays : atmospheric pressure plasma processes and applications', Surface and Coatings technology, 174-175, 419-423, 2003
|
6 |
김주환, 문형식, 김영민, '미소간극을 갖는 MEMS 방전소자 제작 및 특성 연구', 2004년 대한전기학회 전기물성.응용부문회 추계학술대회 논문집 P46-48,2004
|